JP2004022903A - Treatment equipment of substrate for display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a support mechanism which has a small and simple structure but can support the substrates for display which are different in size can be received. <P>SOLUTION: The treatment equipment includes four receptacle bases 50, 52, 54, 56 which receive corner parts of the substrate for display which is to be treated, respectively, and the support mechanism 58 which supports adjacent the receptacle bases in such a manner that the bases can be moved in a mutually approaching direction and in a mutually parting direction, in a surface which is parallel to the substrate for display. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an apparatus for processing a display substrate such as a glass substrate or a display panel on which a thin film transistor is formed.
[0002]
[Prior art]
In a display panel having a large number of pixels arranged at high density, such as a liquid crystal display panel, it is often necessary to correct defective pixels and use the display panel as a non-defective product without making the display panel defective. Has been done.
[0003]
In general, such a correction processing technique involves mounting a display panel having defective pixels on an XY stage that moves two-dimensionally, and irradiating the display panel with illumination light from below, while removing the display panel with defective pixels. This is performed by irradiating a laser beam for processing from above to a defective portion (for example, JP-A-9-90304, JP-A-2001-91919, and JP-A-2002-40674).
[0004]
In a processing apparatus that performs this type of correction processing, the processing laser beam and the illumination light must be irradiated onto the display panel from above and below, respectively. An opening having a large size is formed on the XY stage. Therefore, in the conventional processing apparatus, the XY stage must be replaced every time the display panel is changed to a display panel having a different size.
[0005]
In order to solve the above problem, four rectangular frame members arranged to receive the sides of a rectangular display substrate like a liquid crystal display panel are used as receiving members, and one frame member is used as a fixed receiving member. The other one of the frame members facing the fixed receiving member is a first movable frame member that moves two-dimensionally in the X and Y directions with respect to the fixed frame member, and the remaining two frame members are fixed to the fixed receiving member. A processing apparatus using second and third movable receiving members that move in the X direction or the Y direction has been proposed (JP-A-2002-91336).
[0006]
In this processing apparatus, each receiving material is formed in a rectangular plate shape so that each side of the display substrate can be received by the receiving material even if the size of the display substrate is changed to a different size. In addition, by moving each movable receiving member with respect to the fixed receiving member, the size of the opening formed by the four receiving members is adapted to the size of the display substrate to be processed.
[0007]
[Problem to be solved]
However, in the above-described treatment apparatus, it is necessary to use a receiving material having a length dimension capable of receiving the display substrate having the maximum size that can be processed, and since the moving direction of the receiving material differs for each receiving material, The support mechanism for the material is large and complicated.
[0008]
SUMMARY OF THE INVENTION An object of the present invention is to provide a receiving member supporting mechanism having a small size and a simple structure in spite of being capable of receiving display substrates of different sizes.
[0009]
[Solutions, actions, and effects]
The processing apparatus according to the present invention moves four receiving bases that individually receive the corners of the display substrate to be processed and adjacent receiving bases in directions parallel to and separated from each other in a plane parallel to the display substrate. And a supporting mechanism for supporting as much as possible.
[0010]
The display substrate receives the corner thereof and is received by the base. When the size of the display substrate is changed to a different size, the adjacent receiving bases are moved in directions parallel to and away from each other in a plane parallel to the display substrate according to the size of the display substrate.
[0011]
According to the present invention, since the corners of the display substrate are received by the receiving bases and the adjacent receiving bases are moved in directions that are close to and away from each other, the moving directions of the receiving bases are the same, and thus the supporting of the receiving bases is supported. The mechanism is reduced in size and has a simple structure.
[0012]
The processing apparatus according to the present invention further includes a first stopper disposed on one of the receiving bases such that one end portions of a pair of adjacent first and second sides of the display substrate are abuttable. The other end of the first side may include a second stopper disposed on a receiving base adjacent to the one receiving base so as to be able to abut. By doing so, the two adjacent sides of the display substrate are brought into contact with the stopper, whereby the display substrate can be positioned with respect to the device.
[0013]
The processing apparatus according to the present invention further comprises: a first pusher disposed on the adjacent receiving base to press the display substrate toward the first stopper; and A second pusher located on the remaining receiving base to press against the second stopper. By doing so, the positioning of the display substrate with respect to the device is performed by the stopper and the pusher.
[0014]
The support mechanism comprises: a pair of first support means for receiving a pair of the adjacent receiving bases movably in the first direction for each pair of the adjacent receiving bases in the first direction; Second support means movably received in a second direction intersecting the first direction. By doing so, the movement of each receiving base in the first and second directions becomes smooth and accurate, and the supporting mechanism is made smaller and the structure becomes simpler.
[0015]
The processing apparatus according to the present invention may further include a pair of connecting means for connecting receiving bases adjacent in the second direction so as to be movable in the second direction. By doing so, the movement of the receiving base in the second direction becomes smoother and more accurate.
[0016]
The processing apparatus according to the present invention further comprises: a support for supporting the second support means so as to two-dimensionally move the second support means in a plane parallel to the display substrate; Illuminating means arranged between the display substrate and the support base to irradiate the display substrate from below, and light beam irradiating means for irradiating processing light from above to the display substrate Can be. In this case, the processing device can be used as a correction device that performs correction processing on the display substrate. Further, a portion to be corrected can be specified, and a large arrangement space for the lighting means is not required.
[0017]
The illuminating means includes an arm disposed on the base on which the support base is disposed so as to straddle at least the support base, and an optical fiber disposed on the arm and irradiating the display substrate with the illumination light. Can be included. By doing so, the arrangement space for the lighting means can be made smaller.
[0018]
The processing apparatus according to the present invention further comprises: moving the second support means two-dimensionally in a plane parallel to the display substrate and moving the second support means in an axial direction perpendicular to the display substrate. A stage for receiving the supporting means, and one or more probe units arranged at an interval above the receiving base, wherein the probe unit includes a plurality of contacts pressed against the display substrate. Is also good. By doing so, the processing apparatus can be used as an inspection apparatus for a display substrate such as a display panel or a glass substrate, particularly as a lighting inspection apparatus.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Referring to FIG. 1 to FIG. 3, the processing apparatus 10 is used as a correction apparatus that performs processing for correction processing on a display substrate 12 such as a liquid crystal display panel. The display substrate 12 has a defective portion such as a defective pixel, and the defective portion is corrected by a processing light beam such as a laser beam.
[0020]
In the present invention, in FIG. 2, the left-right direction is referred to as X direction, the direction perpendicular to the paper is referred to as Y direction, and the up-down direction is referred to as up-down direction or Z direction.
[0021]
The processing apparatus 10 includes a base 14, a first support 16 installed on the base 14, a second support 18 installed on the first support 16, A fence 20 mounted on the support 16; a receiving stage 22 for receiving the display substrate 12 to be processed; an illumination device 24 for irradiating the received display substrate 12 with illumination light from below; A light beam irradiation device 26 for irradiating the substrate 12 with light beams for processing from above.
[0022]
The base 14 has the shape of a table in which four leg members 30 are attached to four corners of a thick plate-like member 28, and is installed on a frame (not shown) of the processing apparatus 10.
[0023]
The first support 16 is a stator device of a two-dimensional stage in the XY direction, which is commercially available as a planar servomotor stage, and the second support 18 is a movable device of such a planar servomotor stage. is there. The planar servo motor stage uses a linear motor as a drive source, and performs servo control, that is, position control of the linear motor.
[0024]
In the illustrated example, both the first and second support bases 16 and 18 move the receiving stage 22 two-dimensionally in the XY directions in a plane parallel to the display substrate 12 received by the receiving stage. Is composed.
[0025]
However, the first and second support bases 16 and 18 may use two-dimensional stages other than the planar servo motor stage, or may use an XYZ that also functions as a Z stage that moves the receiving stage 22 in the vertical direction. It may be configured as a three-dimensional stage, or may be configured as an XYZθ stage that also serves as a θ stage that rotates the receiving stage 22 angularly around the Z axis.
[0026]
The fence 20 has the shape of a rectangular frame and is mounted on the first support 16. The fence 20 is for preventing the second support 18 serving as the mover device of the XY stage from falling from the first support 16 serving as the stator device. Is also good.
[0027]
The lighting device 24 includes a gate-shaped arm 32. The arm 32 is attached to the base 14 so as to straddle the first support 16 and the second support 18.
[0028]
An optical fiber 34 is disposed on the arm 32 as shown in FIGS. The optical fiber 34 receives light generated by a light source (not shown) and converts the light into a spot-like illumination light 36 through a hole 38 formed in the longitudinal center of the upper member of the arm 32 to the lower surface of the display substrate 12. Irradiate.
[0029]
Instead of using the optical fiber 34, as shown in FIG. 7, a light source 36 a for irradiating the spot-like illumination light 36 from the hole 38 to the lower surface of the display substrate 12 may be arranged on the arm 32.
[0030]
The light beam irradiation device 26 is a laser device that generates a laser beam as a processing light beam 40, and houses a laser generator and an optical system in a housing 42. The light beam irradiating device 26 is attached to the base 14 by a plurality of support members 44 in the housing 42 so as to irradiate the processing light beam 40 from directly above the defective portion of the display substrate 12. The processing light beam 40 is output from the laser barrel 46.
[0031]
The illuminating device 24 and the light beam irradiating device 26 are preset so that the illuminating light 36 and the processing light beam 40 irradiate the same portion of the display substrate 12 in the XY directions.
[0032]
The first and second support bases 16 and 18 position the display substrate 12 between the illumination device 24 and the light beam irradiating device 26 so that the illumination light 36 and the processing light beam 40 Is driven when the display substrate 12 and the receiving stage 22 are moved so as to be irradiated.
[0033]
As shown in FIGS. 4 to 8, the receiving stage 22 includes four receiving bases 50, 52, 54, 56 for individually receiving the four corners of the display substrate 12, adjacent receiving bases 50 and 52, and And a support mechanism 58 for movably supporting the 54 and 56 in directions parallel to and separated from each other (XY directions) in a plane parallel to the display substrate 12.
[0034]
Each of the receiving bases 50, 52, 54, 56 is formed of a rectangular plate member, has a notch 60 in which one corner is cut off in an L shape, and further has four receiving members. The base 50, 52, 54, 56 is attached to the support mechanism 58 with the notch 60 facing the center so as to form a rectangular virtual opening or space.
[0035]
The support mechanism 58 movably receives the pair of receiving bases 50 and 52 and the pair of 54 and 56 adjacent to each other in the Y direction on the linear guide rails 62 and 62 via the paired linear guides 64 and 64 in the Y direction. The two linear guide rails 62 are movably received in the X direction by the linear guide rails 66 via a plurality of linear guides 68. For this reason, each receiving base is movable in the X direction and the Y direction.
[0036]
The receiving stage 22 further includes a pair of connecting rods 70 and 70 for connecting a pair of receiving bases 50 and 54 and a pair of 52 and 56 adjacent to each other in the X direction in a pair so as to be movable in the X direction. And 70 each include a plurality of ball bushes 72 and 72 movably extending therethrough.
[0037]
The connecting rods 70 and 70 are attached to the receiving bases 50 and 52 so as to extend from the receiving bases 50 and 52 toward the mating receiving bases 54 and 56, respectively. The ball bushes 72 and 72 are attached to the receiving bases 54 and 56, respectively. As each connecting rod 70, a linear shaft can be used.
[0038]
In the illustrated example, the linear guide rails 62, 62 and the linear guides 64, 64 form first support means, and the linear guide rails 66, 66 and the linear guide 68 form second support means. The connecting rods 70, 70 and the ball bushes 72, 72 form connecting means.
[0039]
In the illustrated example, the arm 32 of the illumination device 24 is located between the linear guides 66 and extends between the second support base 18 and the linear guides 62.
[0040]
The receiving stage 22 further includes a pair of adjoining first and second sides (Y side and X side) of the display substrate 12, one end of which is disposed on one receiving base 50 so as to be individually abuttable. The stoppers 74 and 76, the stopper 78 disposed on the receiving base 52 adjacent to the receiving base 50 in the Y direction so that the other end of the first side (Y side) can contact, and the display substrate 12. A pusher 80 disposed on the receiving base 52 for pressing toward the stopper 74 and a pair of pushers 82 and 84 disposed on the receiving bases 54 and 56 for pressing the display substrate 12 toward the stoppers 76 and 78, respectively. And
[0041]
Each of the stoppers 74, 76, 78 has a pin shape, and thus not only functions as positioning pins for positioning the display substrate 12 with respect to the receiving stage 22, but also serves as positioning pins for receiving the display substrate 12. At the time of installation, it acts as a guide pin for guiding the display substrate 12.
[0042]
Each of the pushers 80, 82, and 84 has a plunger that pushes a push piece against a predetermined side of the display substrate 12, and is attached to a predetermined receiving base at the plunger.
[0043]
Prior to processing of the display substrate 12, the receiving bases 50, 52, 54, 56 are moved to a position suitable for the size of the display substrate 12 to be processed, and a suitable member such as a set screw is placed there. Is temporarily maintained by This operation is performed at a position where the light irradiation device 16 does not hinder the operation.
[0044]
Next, the display substrate 12 to be processed is placed on the receiving stage 22 such that the four corner portions are received on the receiving bases 50, 52, 54, 56 of the receiving stage 22.
[0045]
Next, the display substrate 12 is pushed by the pushers 80, 82, 84, and a predetermined side is brought into contact with predetermined stoppers 74, 76, 78. Thereby, the positioning of the display substrate 12 with respect to the receiving stage 22 is automatically performed.
[0046]
Next, the receiving stage 22 is moved between the illumination device 24 and the light irradiation device 26 by the first and second support bases 16 and 18, and further between the illumination device 24 and the light irradiation device 26. Be moved. Accordingly, the display substrate 12 is irradiated with the illumination light 36 and the processing light beam 40 through the position shown in FIG. 8A where the illumination light 36 and the processing light beam 40 are not irradiated onto the defect position 86. Is moved to the position shown in FIG.
[0047]
The XY coordinate position of the defective portion 86 can be known when the quality of the display substrate 12 is inspected by an inspection device such as a lighting inspection device. Therefore, the XY coordinate position of the defective portion 86 is stored in advance in the memory together with the number of the display substrate 12, and the first and second support tables 16 and 18 are controlled using the stored XY coordinate position. It may be driven while being controlled by a device. In this case, the lighting device 24 may be omitted.
[0048]
However, the display substrate 12 is irradiated with the illuminating light 36, and the illuminating light 36 is received by the first and second support bases 16 and 18 so that the illuminating light 36 irradiates the defective portion 86 while visually confirming the illuminated position. By moving the stage 22, the display substrate 12 may be moved to a position where the illumination light 36 and the processing light beam 40 irradiate a defective portion.
[0049]
Instead of the above, the first and second light beams are irradiated on the display substrate 12 by irradiating the display substrate 12 with the weak light beam 40 and irradiating the defective portion 68 while visually confirming the irradiated position. The display substrate 12 may be moved to a position where the processing light beam 40 irradiates the defect location 68 by moving the receiving stage 22 by the second support bases 16 and 18.
[0050]
Next, the processing light beam 40 is applied to the defective portion 86. As a result, the pixel element, wiring, circuit element, or the like existing in the defective portion 86 is broken or cut, and the defective portion 86 is corrected so as to display black when the display substrate 12 is turned on. Confirmation of whether or not the defective portion 68 has been corrected can be performed by irradiating the defective portion 68 with illumination light 36 from below, and confirming whether or not the pattern of the defective portion 68 has been cut or destroyed. it can.
[0051]
According to the processing apparatus 10, various advantages as described below are obtained.
Since the corners of the display substrate 12 are received by the receiving bases 50, 52, 54, 56 and the adjacent receiving bases are moved in directions that are close to and away from each other, the moving directions of the receiving bases are all the same as the XY directions. Therefore, the support mechanism 58 is reduced in size and has a simple structure.
[0053]
The support mechanism 58 receives the pair of receiving bases 50 and 52 and the pair of 54 and 56 adjacent to each other in the Y direction on the linear guide rails 62 and 62 so as to be movable in the Y direction, and receives the linear guide rails 62 and 62 on the linear guide 66. , 66 so as to be movable in the X direction, the movement of each receiving base in the XY directions becomes smooth and accurate, and the support mechanism 58 becomes smaller and has a simpler structure.
[0054]
Since the receiving bases 50, 54 and 52, 56 adjacent in the X direction are movably connected in the X direction by the pair of connecting rods 70 and the pair of ball bushes 72, the movement of the receiving base in the X direction is smoother. And be accurate.
[0055]
Since the arm 32 of the lighting device 24 is located between the linear guide rails 66 and 66 and passes between the second support base 18 and the linear guide rails 62 and 62, if the location to be corrected can be clearly specified. Therefore, a large arrangement space for the lighting device 24 is not required.
[0056]
Since the arm 32 of the illumination device 24 is disposed on the base 14 so as to straddle the first and second support bases 16 and 18 and the optical fiber 34 for the illumination light 36 is disposed on the arm 32, 24 is smaller.
[0057]
In the above embodiment, the corners of the display substrate 12 are directly placed on the receiving bases 50, 52, 54, 56. FIG. 9 shows a plan view of the receiving stage 22, and FIG. As a representative example, the frame member 88 having the rectangular opening 87 is placed on the receiving bases 50, 52, 54, 56, and the corners of the display substrate 12 are placed on the frame member 88. The four sides including the corners of the display substrate 12 may be received on the bases 50, 52, 54, and 56 via 88.
[0058]
In the embodiment shown in FIGS. 9 and 10, the frame member 88 can be removably attached to the receiving bases 50, 52, 54, 56. Further, the display substrate 12 may be pushed toward predetermined stoppers by the pushers 80, 82, 84.
[0059]
In any of the above embodiments, the lighting device 24 may be moved at least in the Y direction, preferably in the XY directions. In this case, the second support table 18 need not be a stage for moving the receiving stage 22 and the display substrate 12 at least in the Y direction.
[0060]
Referring to FIG. 11, a processing apparatus 90 is used as an apparatus for inspecting a display substrate 12 such as a display panel or a glass substrate, particularly, for lighting.
[0061]
In the processing apparatus 90, an inspection stage 92 is provided in place of the first and second support bases 16 and 18. It is arranged in the back lychee unit 94.
[0062]
The inspection stage 92 is a known device that moves the backlight unit 94, the receiving stage 22, and the display substrate 12 in three directions of X, Y, and Z, and rotates around the Z axis. Is installed on a plate-shaped lower frame 96. The backlight unit 94 is also a known device that illuminates the display substrate 12 from the back.
[0063]
In the processing device 90, the probe unit 98 is disposed on the plate-shaped upper frame 100 of the processing device 90 at a distance above the receiving stage 22. The probe unit 98 attaches the substrate 102 to the upper frame 100, and attaches to the substrate 102 a plurality of probe blocks 106 each having a plurality of contacts 104 pressed against the electrodes of the display substrate 12.
[0064]
The substrate 100 has an opening 108 that is slightly larger than the display substrate 12, and is attached to the lower side of the upper frame 100 such that the opening 108 faces the opening 110 of the upper frame 100. The probe block 106 is attached to the substrate 102 such that the tip of the contact 104 projects downward. The contact 104 is, in the illustrated example, a needle-type probe.
[0065]
At the time of inspection, the display substrate 12 is positioned with respect to the contact 104 by the inspection stage 92, and then is raised and the electrode is pressed by the contact 104. In this state, electricity is supplied through the contact 104. At this time, the backlight unit 94 is turned on, so that the lighting state of the display substrate 12 is observed through the openings 110 and 108.
[0066]
In the processing device 90, if the display substrate 12 has a defective portion as a result of the lighting inspection, the processing light beam 40 may be applied to the defective portion to correct the defective portion.
[0067]
In each of the above embodiments, the display substrate 12 is processed in a horizontal state, but the present invention is also applied to an apparatus for processing the display substrate 12 in an oblique state, an upright state, or the like. be able to. Therefore, each direction, particularly the vertical direction, in the present invention does not always coincide with the direction of gravity, but rather means the so-called Z direction perpendicular to the display substrate.
[0068]
The present invention is not limited to the above embodiments, and can be variously modified without departing from the gist thereof.
[Brief description of the drawings]
FIG. 1 is a perspective view showing one embodiment of a processing apparatus according to the present invention.
FIG. 2 is a front view of the processing apparatus shown in FIG.
FIG. 3 is a right side view of the processing apparatus shown in FIG.
FIG. 4 is a perspective view showing one embodiment of a receiving stage used in the processing apparatus shown in FIG. 1;
5 is a perspective view showing a state where a display substrate is placed on the receiving stage shown in FIG. 4;
6 is a plan view of the receiving stage shown in FIG.
FIG. 7 is a right side view of the receiving stage shown in FIG. 4;
FIG. 8 is a diagram for explaining the operation of the receiving stage shown in FIG. 4;
FIG. 9 is a plan view showing an embodiment using a frame member in the receiving stage shown in FIG.
FIG. 10 is a sectional view taken along line 10-10 in FIG. 9;
FIG. 11 is a longitudinal sectional view showing another embodiment of the processing apparatus according to the present invention.
[Explanation of symbols]
10, 90 Processing device 12 Display substrate 14 Base 16, 18 First and second support bases 22 Receiving stage 24 Illumination device 26 Irradiation device for processing light beam 32 Arm of illumination device 34 Optical fiber for illumination light 36 Illumination Light 36a Illumination light source 38 Illumination hole 40 Processing light beam 50, 52, 54, 56 Receiving base 58 Supporting mechanism 62, 66 Linear guide rail 64, 68 Linear guide 70 Connecting rod 72 Ball bush 74, 76, 78 Stopper 80, 82, 84 Pusher 86 Defect location 92 Inspection stage 94 Backlight unit 98 Probe unit

Claims (8)

Four receiving bases for individually receiving the corners of the display substrate to be processed, and a support mechanism for movably supporting adjacent receiving bases in directions parallel to and away from each other in a plane parallel to the display substrate. A processing apparatus for a display substrate. A first stopper disposed on one of the receiving bases such that one end of a pair of adjacent first and second sides of the display substrate is abuttable; and another end of the first side. 2. The processing apparatus according to claim 1, further comprising: a second stopper disposed so as to be abuttable on a receiving base adjacent to the one receiving base. 3. Further, a first pusher disposed on the adjacent receiving base to press the display substrate toward the first stopper, and pressing the display substrate toward the first and second stoppers The processing apparatus according to claim 2, further comprising a second pusher disposed on the remaining receiving base as much as possible. The support mechanism comprises: a pair of first support means for receiving a pair of the adjacent receiving bases movably in the first direction for each pair of the adjacent receiving bases in the first direction; 4. The processing apparatus according to claim 1, further comprising: a second support unit that receives the second support unit so as to be movable in a second direction that intersects the first direction. 5. The processing apparatus according to claim 4, further comprising a pair of connecting means for connecting receiving bases adjacent in the second direction movably in the second direction. Further, a support base for supporting the second support means so as to move the second support means two-dimensionally in a plane parallel to the display substrate, and illuminating light on the display substrate from below. The illumination device according to claim 1, further comprising: an illuminating unit disposed between the display substrate and the support to irradiate, and a processing light irradiation unit configured to irradiate the display substrate with a processing light from above. The processing device according to claim 1. The illuminating means includes an arm disposed on the base on which the support base is disposed so as to straddle at least the support base, and an optical fiber disposed on the arm and irradiating the display substrate with the illumination light. The processing apparatus according to claim 6, comprising: A stage for receiving the second support means so as to move the second support means two-dimensionally in a plane parallel to the display substrate and to move the second support means in an axial direction perpendicular to the display substrate; 6. The display device according to claim 1, further comprising at least one probe unit disposed at an interval above the receiving base, wherein the probe unit includes a plurality of contacts pressed against the display substrate. The processing device according to claim 1.

Images