JPH11211615A - Inspection apparatus of substrate for display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size of an inspection apparatus by decreasing the occupation area thereof although a substrate of large size can be inspected. SOLUTION: The inspection apparatus comprises a plurality of tables 40 each receiving a substrate 12 at an angle of 90 deg. or thereabout to a horizontal plane and being moved, under that state, to a delivery region 24 and an inspection region 26 contiguous to each other in the direction parallel with the substrate 12, and a TV camera 18 being moved two-dimensionally at least in a plane parallel with the substrate 12. Since the occupation area of the apparatus is reduced although a substrate of large size, especially a multiple chamfered substrate, can be inspected, size of the apparatus is reduced and waiting time at the tester part is shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a display panel substrate such as a glass substrate of a liquid crystal display panel, and more particularly to an apparatus suitable for a large substrate having a plurality of substrates which are finally separated. It relates to an inspection device.

[0002]

2. Description of the Related Art In a liquid crystal display panel, a plurality of liquid crystal panels are formed on a large glass substrate (that is, a multi-panel panel substrate), and the multi-panel panel substrate is finally separated into a plurality of liquid crystal display panels. ing. In the case of a multiple-panel substrate, an electric circuit is formed thereon by transistors, transparent electrodes, and the like before the liquid crystal is filled, and the substrate is inspected for defects.

One technique for inspecting such a multi-panel board is to irradiate the entire panel board with light and at the same time take a picture of the entire panel board with a television camera and determine whether there is any defect based on the output signal of the camera. Some inspections are performed (for example, Japanese Patent Application Laid-Open No. 5-256794). The panel board is
It is supported horizontally on the table of the measurement stage. The table is two-dimensionally moved in a horizontal plane so that the entire panel substrate is irradiated with light while the panel substrate is horizontally supported, and the entire panel substrate is in the field of view of the television camera.

However, when this conventional technique is applied to an apparatus for inspecting a multi-panel board, the multi-panel board is horizontally supported on a table, so that the occupied area of the apparatus becomes large and the apparatus itself becomes large. I do. Also, if the same CCD camera is used to take an image of each board on the multiple board, the table must be moved with respect to the CCD camera. Therefore, the movable range of the table becomes larger and the occupied area of the apparatus becomes larger. And the device becomes larger. Furthermore, the larger the size of the substrate, the longer it takes to transfer the substrate to the table,
The waiting time in the tester section is wasted.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to reduce the area occupied by an apparatus and reduce the size of the apparatus, even though a large-sized substrate can be inspected.

[0006]

An inspection apparatus according to the present invention comprises a plurality of tables for supporting and transporting a display panel substrate at a substrate receiving portion at an angle of 90 degrees or close to a horizontal plane, and the table. A table moving mechanism for selectively moving a delivery area and an inspection area adjacent to each other in a direction parallel to the substrate, a television camera arranged in the inspection area to photograph the substrate, and at least the substrate A camera moving mechanism for moving the table in a direction intersecting with the moving direction of the table in a plane parallel to the table.

[0007] The board is received by the table in the delivery area, is conveyed from the delivery area to the inspection area by the table, is photographed by the television camera for each of one or more substrate parts in the inspection area, and is then moved from the inspection area to the delivery area by the table. Conveyed. Delivery of the substrate to one table is performed while inspecting the substrate supported by the other table.

[0008] The shooting area of the television camera can be changed or adjusted by moving the television camera with respect to the substrate instead of the substrate. For this reason, the television camera is moved with respect to the substrate according to the substrate to be photographed.

[0009] As described above, the plurality of tables which receive the substrate in a state having an angle of 90 degrees or close to the horizontal plane, and which are moved to a delivery area and an inspection area which are adjacent to each other in a direction parallel to the substrate, With a television camera that is moved in a direction parallel to the table movement direction in a plane parallel to the substrate, it is possible to inspect a large size substrate, especially a multi-cavity substrate. The occupied area is reduced, the size of the device is reduced, and the waiting time of the tester section is reduced.

[0010] The substrate receiving portion may have a flat surface. Thereby, even if the substrate has a large size, it is possible to prevent the substrate received on the table from bending.

Each of the tables has a substrate 1 for vacuum-sucking the substrate.
The above-described suction groove may be provided in the substrate receiving portion, and one or more stoppers to be brought into contact with the substrate may be provided at a lower end portion and at least one side end portion of the substrate receiving portion. Thereby, the substrate can be positioned with respect to the table by bringing the lower edge and the side edge of the substrate into contact with the stopper.

[0012] Further, a plurality of suction members arranged on each table at an interval to releasably suck a plurality of portions of the substrate, and the table for displacing the suction members in a direction orthogonal to the substrate. And a displacement mechanism disposed at This allows the suction member to approach or separate from the table in a state where the substrate is suctioned by the suction member, so that the substrate can be prevented from dropping from the table when the substrate is transferred to the table, As a result, the transfer of the substrate to the table becomes safe.

The table can be moved at intervals in a direction intersecting with the substrate. This prevents the two tables from hindering their movement, reduces the footprint of the device and makes the device more compact.

The camera moving mechanism includes a first stage for moving the television camera in a vertical direction, a second stage for moving the television camera in a horizontal direction, and moving the television camera in a direction orthogonal to the substrate. A third stage to be moved and a drive source to rotate the lead screw can be provided. Thereby, even if the table is arranged at intervals in the direction orthogonal to the substrate,
The distance between the table and the television camera can be changed or adjusted according to the table moved to the inspection area.

In a preferred embodiment, the table moving mechanism includes a lead screw extending in a moving direction of the table, and a lead nut attached to one of an upper portion and a lower portion of the table and screwed with the lead screw. Guide means for guiding the other of the upper part and the lower part of the table.

The apparatus further includes a main body having the delivery area and the inspection area, and the main body further includes a control section for controlling each device of the apparatus and a tester section for processing an output signal of the television camera. It can be provided below the delivery area and the inspection area. This allows
The positional relationship between the delivery area and the inspection area, the control unit and the tester unit is up and down, and
The synergistic effect of supporting and transporting the apparatus at an angle of 0 degree or close to it makes the device occupied area smaller.

[0017] The main body may further include a display unit for displaying an image obtained by the television camera. Thus, the quality of the substrate can be inspected by visually checking the image displayed on the display unit.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG.
Is used for inspection of the display panel substrate 12 shown in FIG.

As shown in FIG. 6, the substrate 12 is a large-sized (ie, multiple-panel) substrate for a liquid crystal display panel.
Moreover, it is formed of transparent glass or synthetic resin. The substrate 12 is a circuit substrate before liquid crystal is sealed, and includes a plurality of substrate units 14 that are finally divided into individual liquid crystal display panels.
Having. Each substrate section 14 is formed with at least an electric circuit including a transparent electrode, a transistor, and the like.

Referring to FIG. 1 to FIG.
Includes a main body 16. The main body 16 is formed in a box shape, that is, a housing, by forming a frame with a plurality of long members and assembling a plurality of plate members with the frame.

The main body 16 has a tester section 20 for judging the quality of measurement data captured by a television camera 18 described later in detail, and a control section 22 for controlling the entire apparatus on the lower side. A transfer area 24 for performing inspection and an inspection area 26 for inspecting (ie, measuring) the substrate 12 are provided on the upper side, and an operation panel 28 is provided at an intermediate portion. The delivery area 24 is provided on the left, and the measurement area, that is, the inspection area 26 is provided on the right.

The main body 16 also has an opening 30 for transferring substrates on the upper left side, and a display panel 32 for visually displaying an image based on data obtained by the television camera 18 at an upper portion. Have on the front. Inspection device 10
The indicator light 34 for notifying the abnormality of the above is attached to the main body 16 so as to extend upward from the main body 12. Thereby, the indicator lamp 3 can be provided even at a position distant from the inspection device 10
4 can be confirmed. The operation panel 28 has a display unit 36 for visually displaying various information, and a plurality of push button switches 38.

A pair of tables 40 is provided on the upper part of the main body 16.
Are movably arranged in the transfer area 24 and the inspection area 26. The table 40 is formed of a rectangular plate-shaped member, is set up substantially perpendicularly with the thickness direction being the front-back direction, and is further substantially perpendicular to the substrate 12 (in the example shown in the drawing). Then, they are spaced in the front-back direction.

Each table 40 is supported by a table moving mechanism. Each table moving mechanism has a transfer area 2
4 and a lead screw 42 extending in the upper part of the inspection area 26 in the left-right direction, and a linear shaft 44 extending in the left-right direction below the delivery area 24 and the inspection area 26. The lead screw 42 is rotatably supported by the upper transport base 46 and is spaced apart in the front-rear direction. The linear shaft 44 is connected to the lower transport base 4.
6 and are spaced apart in the front-rear direction.

Each lead screw 42 is screwed to a lead nut 48 attached to the upper part of the corresponding table 40, and is rotated by a drive source 50 such as a motor attached to the upper transport base 46. You. For this reason, each table 40 moves the transfer area 24 and the inspection area 2 with the rotation of the corresponding lead screw 42.
6 selectively. Each linear shaft 44
A ball bush 52 attached to the lower end of the corresponding table 40 slidably penetrates.

The transport bases 46 extend continuously and parallel over the entire length range in the left-right direction within the main body 16 at intervals in the vertical direction, and have a U-shape extending continuously over the entire length range of the base 46. With grooves. The transport base 46 is attached to the main body 16 such that the openings of the grooves face each other. The lead screw 42 and the linear shaft 44 corresponding to the table 40 on the rear side extend in the groove of the corresponding transport base 46, respectively.

The front surface of each table 40 is a flat substrate receiving portion which receives the substrate 12 in a state of being set at substantially 90 degrees with respect to a horizontal plane, and conveys the substrate 12 in a horizontal direction (horizontal direction) parallel thereto. It has been. For this reason, even if the size of the substrate 12 is large, the substrate 12 is prevented from being bent while being received by the table 40. In addition to the fact that the tables 40 are spaced in a direction perpendicular to the substrate 12, the tables 40 do not hinder their movement, the area occupied by the apparatus is reduced, and the apparatus is downsized.

Each table 40 has a plurality of suction grooves 54 for vacuum suction of the substrate 12 in the substrate receiving portion.
One or more stoppers 56 with which the substrate 2 is in contact are provided at each of the lower end and the right end of the substrate receiving portion. Therefore, the substrate 12 can be maintained in a predetermined state on the table 40 during the delivery, transportation, and inspection of the substrate 12. Also,
By bringing the lower edge and the right edge of the substrate 12 into contact with the stopper 56, the substrate 12 can be positioned with respect to the table 40.

In the illustrated example, five concentric rectangular suction grooves 54 and one suction groove 54 extending in the vertical direction are formed so as to communicate with each other. Are provided at the lower edge and the right edge of the substrate 12 at intervals. The suction groove 54 is connected to a vacuum pump.

Each table 40 has a plurality of suction members 58.
And a displacement mechanism 6 for displacing each suction member 58 in the front-rear direction.
0 is arranged. The suction member 58 is a general suction pad, and is disposed at a position corresponding to a rectangular corner so as to releasably suck a corner of the substrate 12. Each displacement mechanism 60 is an air cylinder in the illustrated example, and is assembled to the rear surface of the table 40 in the cylinder portion with the rod portion penetrating the table 40.

The suction member 58 is moved by a displacement mechanism 60 in a direction perpendicular to the substrate 12 so that the substrate 12 approaches or separates from the table 40 while the substrate 12 is suctioned. For this reason, the substrate 12 with respect to the table 40
The substrate 12 can be prevented from dropping from the table 40 at the time of transfer, and the transfer of the substrate 12 to the table 40 can be performed safely.

When the substrate 12 has a rectangular shape with a narrow width, each table 40 preferably has a structure in which the longitudinal direction of the substrate is received in a horizontal direction. Accordingly, it is possible to prevent the substrate 12 from being bent by its own weight in a state where the substrate 12 is received by the table 40.

The television camera 18 is a so-called CCD camera using a charge-coupled device, and includes a table 40 moved to the inspection area 26 and the substrate 12 supported by the table 40.
The camera is supported by the camera moving mechanism in a state facing the camera.

The camera moving mechanism comprises a first stage 62 for moving the television camera 18 in the vertical direction and a second stage 6 for moving the television camera 18 horizontally in the horizontal direction.
4 and a third stage 66 for moving the television camera 18 in the front-rear direction.

The first stage 62 is a block-shaped camera stage that is long in the left-right direction, and faces the table 40 moved to the inspection area 26. The camera stage, that is, the first stage 62, includes a pair of rods 68 extending vertically in the inspection area 26 at intervals in the left-right direction.
And a lead screw 70 extending vertically between the rods 68. The lead screw 70 is moved by being rotated by a drive source 72 such as an electric motor.

Both rods 68 vertically penetrate a ball bush 74 provided on the first stage 62, and are attached to a pair of upper and lower elongated members 76 at both ends. The long member 76 is attached to the main body 16 so as to extend in the left-right direction in parallel in the inspection area 26 at intervals in the up-down direction.

The lead screw 70 is screwed to a lead nut 78 provided on the first stage 62,
In addition, both ends are rotatably received by upper and lower bases 76. The drive source 72 is attached to the upper long member 76 and rotates the lead screw 70 forward or backward. As a result, the first stage 62 moves the substrate 1
It is moved up and down in a plane parallel to 2.

The second stage 64 is the first stage 6
2 is an X stage that is movably received in the left-right direction on the back surface of the second stage. The X stage, that is, the second stage 64, includes a driving source 8 such as a motor supported by the first stage 62.
A lead screw (not shown) rotated by 0;
The lead screw is screwed into the second stage 64
With the lead nut (not shown) attached to the
The first stage 62 is moved in the horizontal direction within a plane parallel to the substrate 12.

The third stage 66 is the second stage 6
4 is a Z stage disposed on the back of the fourth stage. The Z stage, that is, the third stage, is displaced in a direction perpendicular to the substrate 12 with respect to the second stage 64 by a moving mechanism (not shown).

The television camera 18 is mounted on the third stage 66 so as to face the substrate moved to the inspection area 26. Therefore, the first and second television cameras 18 are provided depending on the position of the substrate to be inspected. Substrate 1 by stages 62 and 64
It is moved two-dimensionally in a plane parallel to
Is moved in a direction perpendicular to the substrate 12 with respect to the table 40 in accordance with the table 40 moved to the inspection area 26 by the stage 66.

Therefore, even if the table 40 is arranged such that the moving surfaces of the two tables 40 are spaced from each other in a direction perpendicular to the substrate 12, the distance between the table 40 and the television camera 18 is moved to the inspection area 26. Can be changed or adjusted according to the table 40. A fourth stage for rotating the television camera 18 around an axis perpendicular to the substrate 12 may be provided.

Although not shown, the inspection apparatus 10 includes a light projector for irradiating the substrate 12 transported to the inspection area 26 with light. Such a floodlight is a television camera 18
Side, for example, the television camera 18 or the third stage 66
Or may be provided behind the table 40 in the inspection area 26. When the light projector is provided behind the table 40, the table 40 is preferably made transparent.

The substrate 12 to be inspected for the table 40
Is delivered through the opening 30 of the main body 16.
The table 40 receives the substrate 12 in an upright state in the transfer area 24 and transports the substrate 12 to the inspection area 26 in that state.

The board 12 conveyed to the inspection area is photographed by the television camera 18 in sequence for all the board sections 14 for each board section 14, and image processing of an output signal of the TV camera 18 is performed by the tester section 20 to determine whether the board section 14 is acceptable. Is determined.

The image of the area photographed by the television camera 18 is reproduced on the display panel 36 of the main body 16. For this reason, by moving the television camera 18 with respect to the table 40 and thus the substrate 12 while watching the image reproduced on the display panel 36, the field of view of the television camera 18 can be changed and adjusted to the correct field of view. .

When the inspection of the substrate 12 is completed, the table 4
0 is moved from the inspection area 26 to the delivery area 24,
In the delivery area 24, delivery of the inspected board and delivery of the untested board are performed. Delivery of the substrate 12 to one table 40 is performed while inspecting the substrate 12 supported by the other table 40.

Instead of having the structure in which the substrate 12 is received vertically on the table 40 and transported in that state, an angle smaller than 90 degrees, preferably an angle close to 90 degrees, with respect to the horizontal plane as shown in FIG. It is also possible to adopt a structure in which the substrate 12 is received in the table 40 and transported in that state. In this case, the larger the angle of the substrate 12 with respect to the horizontal plane,
The depth dimension of the device can be reduced. Therefore, the angle of the substrate 12 with respect to the horizontal plane is
It can be in the range of degrees.

According to the inspection apparatus 10, the substrate is received in a state having an angle of 90 degrees or close to the horizontal plane, and in this state, the plurality of transfer areas and the inspection area which are moved in the direction parallel to the substrate are moved to the inspection area. Since a table and a television camera which is moved two-dimensionally in a plane parallel to the substrate are provided, the area occupied by the apparatus is reduced despite the fact that a large-sized substrate can be inspected in a large number of planes. ,
The size of the apparatus is reduced, and the waiting time of the tester section as the inspection means is reduced.

However, since the table is moved in the horizontal direction parallel to the substrate, the television camera is placed only in the direction parallel to the substrate and perpendicular to the direction of movement of the table (vertical direction in the illustrated example). The table may be moved, and the relative movement between the substrate and the television camera in the horizontal direction parallel to the substrate may be performed by a table moving mechanism.

The present invention is not limited to the above embodiment. For example, the television camera may be moved in a direction parallel to the substrate and in a direction (oblique direction) crossing the table moving direction at an angle other than 90 degrees and close to 90 degrees.

Also, instead of separating the moving surface of the table in a direction perpendicular to the substrate, a transfer area is provided on both sides of the inspection area, and the table is moved in directions opposite to each other with respect to the inspection area so as to be perpendicular to the substrate. The moving surfaces of the table may be matched. In this case, the television camera need not be moved in a direction perpendicular to the substrate.

The present invention is applicable not only to an inspection apparatus for a display panel substrate such as a glass substrate for a liquid crystal display panel and a transparent circuit board, but also to an inspection apparatus for other substrates such as a substrate for a plasma display panel. can do.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of an inspection apparatus according to the present invention.

FIG. 2 is a front view of the inspection device shown in FIG. 1 in a state where a front panel of a delivery area and an inspection area is removed.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a sectional view taken along line 4-4 in FIG. 2;

FIG. 5 is a view showing another embodiment of the inspection apparatus according to the present invention, and is a cross-sectional view at the same position as FIG. 4;

FIG. 6 is a diagram showing a positional relationship between a substrate and a television camera.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Substrate 14 Substrate part 16 Main body 18 Television camera 20 Tester part 22 Control part 24 Delivery area 26 Inspection area 28 Operation panel 30 Delivery opening 32 Image display panel 40 Table 42 Lead screw of table moving mechanism 44 Table Linear shaft of moving mechanism 48 Lead nut of table moving mechanism 50 Drive source of table moving mechanism 56 Stopper 58 Suction member 60 Displacement mechanism for suction member 62, 64, 66 Stage of camera moving mechanism 68 Linear shaft of camera moving mechanism 70 Camera Lead screw of moving mechanism 72 Drive source of camera moving mechanism 78 Lead nut of camera moving mechanism

Claims (9)

[Claims] 1. A plurality of tables for supporting and transporting a display panel substrate to a substrate receiving portion in a state of having an angle of 90 degrees or close to a horizontal plane, and a transfer table adjacent to the table in a direction parallel to the substrate. A table moving mechanism for selectively moving an area and an inspection area, a television camera arranged in the inspection area to photograph the substrate, and movement of the table at least in a plane parallel to the substrate. A camera moving mechanism for moving the display panel in a direction intersecting the direction. 2. The inspection apparatus according to claim 1, wherein the substrate receiving section has a flat surface. 3. Each of the tables has at least one suction groove for vacuum-sucking the substrate in the substrate receiving portion, and at least one stopper for contacting the substrate with a lower end of the substrate receiving portion and at least one stopper. The inspection device according to claim 1, wherein the inspection device is provided at each of one side end. 4. A plurality of suction members arranged on each table spaced from each other to releasably suck a plurality of portions of the substrate, and to displace the suction members in a direction perpendicular to the substrate. The inspection apparatus according to claim 1, further comprising: a displacement mechanism disposed on the table. 5. The inspection apparatus according to claim 1, wherein the table is moved by the table moving mechanism at intervals in a direction intersecting with the substrate. 6. The camera moving mechanism includes: a first stage for moving the television camera in a vertical direction; a second stage for moving the television camera in a horizontal direction; and the television camera being orthogonal to the substrate. The inspection apparatus according to claim 5, further comprising: a third stage configured to move in a direction. 7. The table moving mechanism includes a lead screw extending in a direction in which the table moves, a lead nut attached to one of an upper part and a lower part of the table, and being screwed with the lead screw; The inspection device according to any one of claims 1 to 6, further comprising a guide unit that guides the other of the upper and lower portions, and a drive source that rotates the lead screw. 8. The apparatus further includes a main body having the delivery area and the inspection area, the main body further comprising: a control unit that controls each device of the device; and a tester unit that processes an output signal of the television camera. The inspection apparatus according to any one of claims 1 to 7, wherein the inspection apparatus has a lower part than the delivery area and the inspection area. 9. The inspection apparatus according to claim 8, wherein the main body further includes a display unit that displays an image obtained by the television camera.