JP2004009172A - 多関節ロボットおよびその制御装置 - Google Patents

多関節ロボットおよびその制御装置 Download PDF

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Publication number
JP2004009172A
JP2004009172A JP2002163511A JP2002163511A JP2004009172A JP 2004009172 A JP2004009172 A JP 2004009172A JP 2002163511 A JP2002163511 A JP 2002163511A JP 2002163511 A JP2002163511 A JP 2002163511A JP 2004009172 A JP2004009172 A JP 2004009172A
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JP
Japan
Prior art keywords
axis
control
robot
tool
axes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2002163511A
Other languages
English (en)
Japanese (ja)
Inventor
Hirokazu Kariyazaki
仮屋崎　洋和
Tatsuzo Nakazato
中里　辰三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2002163511A priority Critical patent/JP2004009172A/ja
Priority to PCT/JP2003/006556 priority patent/WO2003101676A1/ja
Priority to KR1020047019696A priority patent/KR100774077B1/ko
Priority to US10/516,453 priority patent/US7363092B2/en
Priority to TW092114942A priority patent/TW200307593A/zh
Publication of JP2004009172A publication Critical patent/JP2004009172A/ja
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Numerical Control (AREA)
  • Manipulator (AREA)
JP2002163511A 2002-06-04 2002-06-04 多関節ロボットおよびその制御装置 Abandoned JP2004009172A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002163511A JP2004009172A (ja) 2002-06-04 2002-06-04 多関節ロボットおよびその制御装置
PCT/JP2003/006556 WO2003101676A1 (en) 2002-06-04 2003-05-26 Multi-joint robot and control device thereof
KR1020047019696A KR100774077B1 (ko) 2002-06-04 2003-05-26 다관절 로봇 및 그 제어 장치
US10/516,453 US7363092B2 (en) 2002-06-04 2003-05-26 Multi-joint robot and control device thereof
TW092114942A TW200307593A (en) 2002-06-04 2003-06-02 Multi-joint robot and control device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002163511A JP2004009172A (ja) 2002-06-04 2002-06-04 多関節ロボットおよびその制御装置

Publications (1)

Publication Number Publication Date
JP2004009172A true JP2004009172A (ja) 2004-01-15

Family

ID=29706636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002163511A Abandoned JP2004009172A (ja) 2002-06-04 2002-06-04 多関節ロボットおよびその制御装置

Country Status (5)

Country Link
US (1) US7363092B2 (https=)
JP (1) JP2004009172A (https=)
KR (1) KR100774077B1 (https=)
TW (1) TW200307593A (https=)
WO (1) WO2003101676A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5829313B1 (ja) * 2014-06-25 2015-12-09 ファナック株式会社 シミュレーションを用いたオフライン教示装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100292A (ja) * 2006-10-17 2008-05-01 Toshiba Mach Co Ltd ロボットシステム
EP2728363B1 (en) * 2011-06-28 2021-06-02 Kabushiki Kaisha Yaskawa Denki Robot hand and robot

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299775A (ja) * 1994-05-11 1995-11-14 Daitoron Technol Kk 基板搬送ロボット
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
JP2000077499A (ja) * 1998-09-03 2000-03-14 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2000506789A (ja) * 1996-03-22 2000-06-06 ジェンマーク オートメーション インコーポレイテッド 多自由度ロボット
JP2000183128A (ja) * 1998-12-17 2000-06-30 Komatsu Ltd ワーク搬送装置の制御装置
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890552A (en) * 1972-12-29 1975-06-17 George C Devol Dual-armed multi-axes program controlled manipulators
JPS6027906A (ja) 1983-07-27 1985-02-13 Mitsubishi Heavy Ind Ltd ロボツト
JPH0371887U (https=) 1989-11-17 1991-07-19
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
US6752584B2 (en) * 1996-07-15 2004-06-22 Semitool, Inc. Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
KR20000014795A (ko) 1998-08-25 2000-03-15 윤종용 직교좌표 이송장치의 직선보간 방법
KR20000042618A (ko) * 1998-12-26 2000-07-15 윤종용 원통좌표계로봇
US6845295B2 (en) * 2002-03-07 2005-01-18 Fanuc Robotics America, Inc. Method of controlling a robot through a singularity

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299775A (ja) * 1994-05-11 1995-11-14 Daitoron Technol Kk 基板搬送ロボット
JP2000506789A (ja) * 1996-03-22 2000-06-06 ジェンマーク オートメーション インコーポレイテッド 多自由度ロボット
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
JP2000077499A (ja) * 1998-09-03 2000-03-14 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2000183128A (ja) * 1998-12-17 2000-06-30 Komatsu Ltd ワーク搬送装置の制御装置
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5829313B1 (ja) * 2014-06-25 2015-12-09 ファナック株式会社 シミュレーションを用いたオフライン教示装置
CN105312776A (zh) * 2014-06-25 2016-02-10 发那科株式会社 使用了模拟的离线示教装置
US9895801B2 (en) 2014-06-25 2018-02-20 Fanuc Corporation Offline teaching device using simulation

Also Published As

Publication number Publication date
TWI311521B (https=) 2009-07-01
WO2003101676A1 (en) 2003-12-11
KR100774077B1 (ko) 2007-11-06
KR20050016504A (ko) 2005-02-21
US7363092B2 (en) 2008-04-22
US20050204848A1 (en) 2005-09-22
TW200307593A (en) 2003-12-16

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