KR100774077B1 - 다관절 로봇 및 그 제어 장치 - Google Patents

다관절 로봇 및 그 제어 장치 Download PDF

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Publication number
KR100774077B1
KR100774077B1 KR1020047019696A KR20047019696A KR100774077B1 KR 100774077 B1 KR100774077 B1 KR 100774077B1 KR 1020047019696 A KR1020047019696 A KR 1020047019696A KR 20047019696 A KR20047019696 A KR 20047019696A KR 100774077 B1 KR100774077 B1 KR 100774077B1
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KR
South Korea
Prior art keywords
axis
control
robot
tool
axes
Prior art date
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Expired - Fee Related
Application number
KR1020047019696A
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English (en)
Korean (ko)
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KR20050016504A (ko
Inventor
가리야자키히로카즈
나카자토다츠미
Original Assignee
가부시키가이샤 야스카와덴키
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Publication of KR20050016504A publication Critical patent/KR20050016504A/ko
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Publication of KR100774077B1 publication Critical patent/KR100774077B1/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Numerical Control (AREA)
  • Manipulator (AREA)
KR1020047019696A 2002-06-04 2003-05-26 다관절 로봇 및 그 제어 장치 Expired - Fee Related KR100774077B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00163511 2002-06-04
JP2002163511A JP2004009172A (ja) 2002-06-04 2002-06-04 多関節ロボットおよびその制御装置
PCT/JP2003/006556 WO2003101676A1 (en) 2002-06-04 2003-05-26 Multi-joint robot and control device thereof

Publications (2)

Publication Number Publication Date
KR20050016504A KR20050016504A (ko) 2005-02-21
KR100774077B1 true KR100774077B1 (ko) 2007-11-06

Family

ID=29706636

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047019696A Expired - Fee Related KR100774077B1 (ko) 2002-06-04 2003-05-26 다관절 로봇 및 그 제어 장치

Country Status (5)

Country Link
US (1) US7363092B2 (https=)
JP (1) JP2004009172A (https=)
KR (1) KR100774077B1 (https=)
TW (1) TW200307593A (https=)
WO (1) WO2003101676A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100292A (ja) * 2006-10-17 2008-05-01 Toshiba Mach Co Ltd ロボットシステム
EP2728363B1 (en) * 2011-06-28 2021-06-02 Kabushiki Kaisha Yaskawa Denki Robot hand and robot
JP5829313B1 (ja) * 2014-06-25 2015-12-09 ファナック株式会社 シミュレーションを用いたオフライン教示装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000014795A (ko) * 1998-08-25 2000-03-15 윤종용 직교좌표 이송장치의 직선보간 방법
JP2000190258A (ja) * 1998-12-26 2000-07-11 Samsung Electronics Co Ltd 円筒座標系ロボット

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3890552A (en) * 1972-12-29 1975-06-17 George C Devol Dual-armed multi-axes program controlled manipulators
JPS6027906A (ja) 1983-07-27 1985-02-13 Mitsubishi Heavy Ind Ltd ロボツト
JPH0371887U (https=) 1989-11-17 1991-07-19
JP2599571B2 (ja) * 1994-05-11 1997-04-09 ダイトロンテクノロジー株式会社 基板搬送ロボット
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
US5789890A (en) * 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
US6752584B2 (en) * 1996-07-15 2004-06-22 Semitool, Inc. Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
JP2000077499A (ja) * 1998-09-03 2000-03-14 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2000183128A (ja) * 1998-12-17 2000-06-30 Komatsu Ltd ワーク搬送装置の制御装置
JP3973006B2 (ja) * 2000-03-23 2007-09-05 日本電産サンキョー株式会社 ダブルアーム型ロボット
US6845295B2 (en) * 2002-03-07 2005-01-18 Fanuc Robotics America, Inc. Method of controlling a robot through a singularity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000014795A (ko) * 1998-08-25 2000-03-15 윤종용 직교좌표 이송장치의 직선보간 방법
JP2000190258A (ja) * 1998-12-26 2000-07-11 Samsung Electronics Co Ltd 円筒座標系ロボット

Also Published As

Publication number Publication date
TWI311521B (https=) 2009-07-01
WO2003101676A1 (en) 2003-12-11
JP2004009172A (ja) 2004-01-15
KR20050016504A (ko) 2005-02-21
US7363092B2 (en) 2008-04-22
US20050204848A1 (en) 2005-09-22
TW200307593A (en) 2003-12-16

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