JP2003532034A - 収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリ - Google Patents
収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリInfo
- Publication number
- JP2003532034A JP2003532034A JP2001579949A JP2001579949A JP2003532034A JP 2003532034 A JP2003532034 A JP 2003532034A JP 2001579949 A JP2001579949 A JP 2001579949A JP 2001579949 A JP2001579949 A JP 2001579949A JP 2003532034 A JP2003532034 A JP 2003532034A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- storage
- sorbent medium
- physical sorbent
- distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 239000002594 sorbent Substances 0.000 title claims description 222
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 18
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- 238000000034 method Methods 0.000 claims description 80
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims description 68
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 60
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- 239000000463 material Substances 0.000 claims description 49
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 38
- 229910052723 transition metal Inorganic materials 0.000 claims description 36
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- 229910000077 silane Inorganic materials 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- -1 diborane Chemical compound 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
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- 239000000356 contaminant Substances 0.000 claims description 14
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- 239000000460 chlorine Substances 0.000 claims description 10
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 9
- 229910052801 chlorine Inorganic materials 0.000 claims description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 8
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- 229910000059 tellane Inorganic materials 0.000 claims description 7
- VTLHPSMQDDEFRU-UHFFFAOYSA-N tellane Chemical compound [TeH2] VTLHPSMQDDEFRU-UHFFFAOYSA-N 0.000 claims description 7
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 150000001450 anions Chemical class 0.000 claims description 6
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- 239000000377 silicon dioxide Substances 0.000 claims description 6
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 claims description 6
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- 238000011049 filling Methods 0.000 claims description 3
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
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- 229910052743 krypton Inorganic materials 0.000 description 1
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- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
- F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0388—Arrangement of valves, regulators, filters
- F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0107—Single phase
- F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
- F17C2223/038—Subatmospheric pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/564,323 | 2000-05-03 | ||
| US09/564,323 US6406519B1 (en) | 1998-03-27 | 2000-05-03 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
| PCT/US2001/013922 WO2001083084A1 (en) | 2000-05-03 | 2001-04-27 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003532034A true JP2003532034A (ja) | 2003-10-28 |
| JP2003532034A5 JP2003532034A5 (enExample) | 2008-07-03 |
Family
ID=24254011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001579949A Pending JP2003532034A (ja) | 2000-05-03 | 2001-04-27 | 収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリ |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1284806A4 (enExample) |
| JP (1) | JP2003532034A (enExample) |
| KR (1) | KR100858077B1 (enExample) |
| CN (1) | CN1204954C (enExample) |
| AU (1) | AU2001257439A1 (enExample) |
| WO (1) | WO2001083084A1 (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156650A (ja) * | 2004-11-29 | 2006-06-15 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP2014207200A (ja) * | 2013-04-16 | 2014-10-30 | 東京電力株式会社 | ナトリウム−硫黄電池における火災の消火方法 |
| KR101914799B1 (ko) * | 2010-09-16 | 2018-11-02 | 솔베이(소시에떼아노님) | 불화수소 공급 유닛 |
| WO2025013629A1 (ja) * | 2023-07-13 | 2025-01-16 | 株式会社レゾナック | 高圧ガス容器の洗浄方法 |
| WO2025013630A1 (ja) * | 2023-07-13 | 2025-01-16 | 株式会社レゾナック | 高圧ガス容器の洗浄方法 |
| KR102886905B1 (ko) * | 2019-12-12 | 2025-11-17 | 프랙스에어 테크놀로지, 인코포레이티드 | 고성능의 구조적으로 개질된 미립자 탄소 흡착제를 이용하는 도펀트 유체 저장 및 분배 시스템 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6921062B2 (en) | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
| US7300038B2 (en) * | 2002-07-23 | 2007-11-27 | Advanced Technology Materials, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
| US6991671B2 (en) * | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| KR100675063B1 (ko) * | 2005-06-27 | 2007-01-29 | 울산화학주식회사 | 저온액화가스의 충전방법 |
| KR100820377B1 (ko) * | 2006-07-07 | 2008-04-10 | 김재윤 | 질소가스충진기 |
| GB2441056A (en) * | 2006-08-18 | 2008-02-20 | Nomenca Ltd | Gas canister security retention cabinet |
| US20080241805A1 (en) | 2006-08-31 | 2008-10-02 | Q-Track Corporation | System and method for simulated dosimetry using a real time locating system |
| US8499789B2 (en) | 2008-05-29 | 2013-08-06 | Tescom Corporation | Mobile gas supply system |
| SG182510A1 (en) * | 2010-01-14 | 2012-08-30 | Advanced Tech Materials | Ventilation gas management systems and processes |
| US8858819B2 (en) | 2010-02-15 | 2014-10-14 | Air Products And Chemicals, Inc. | Method for chemical mechanical planarization of a tungsten-containing substrate |
| US9032990B2 (en) * | 2011-04-25 | 2015-05-19 | Applied Materials, Inc. | Chemical delivery system |
| KR20200124780A (ko) | 2012-05-31 | 2020-11-03 | 엔테그리스, 아이엔씨. | 배취식 침착을 위한 고 물질 플럭스를 갖는 유체의 소스 시약-기반 수송 |
| CN103638890B (zh) * | 2013-11-19 | 2016-01-06 | 全椒南大光电材料有限公司 | 高纯安全气体源的制备方法 |
| KR102408666B1 (ko) * | 2014-10-03 | 2022-06-13 | 엔테그리스, 아이엔씨. | 압력-조절 가스 공급 용기 |
| SG11201706560PA (en) | 2015-02-12 | 2017-09-28 | Entegris Inc | Smart package |
| US10052623B2 (en) | 2015-06-29 | 2018-08-21 | Industrial Technology Research Institute | Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment |
| FR3039622B1 (fr) * | 2015-07-31 | 2018-03-02 | Air Liquide Electronics Systems | Installation de distribution de gaz de travail. |
| CN107364659B (zh) * | 2017-07-31 | 2023-06-27 | 浙江巨化装备制造有限公司 | 一种无水氟化氢的安全储存设备及其制造方法 |
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| CN108421365A (zh) * | 2018-03-19 | 2018-08-21 | 杭州正大重工机械有限公司 | 一种有机废气收集和处理系统 |
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| US12233377B2 (en) * | 2019-03-27 | 2025-02-25 | Eneos Corporation | Hydrogen gas supply apparatus and hydrogen gas supply method |
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| US12018800B2 (en) | 2022-03-29 | 2024-06-25 | Praxair Technology, Inc. | Method and system for optimized gas delivery with automated redundant pressure regulation safety feature |
| CN116510474A (zh) * | 2022-09-20 | 2023-08-01 | 北京京仪自动化装备技术股份有限公司 | 用于半导体废气处理设备的反应腔和反应腔的监测方法 |
| CN116371142B (zh) * | 2023-06-01 | 2023-10-03 | 中国华能集团清洁能源技术研究院有限公司 | 烟气低温吸附再生系统和吸附剂加热输送装置 |
| CN116624753B (zh) * | 2023-06-16 | 2023-11-07 | 福建德尔科技股份有限公司 | 一种三氟化氯充装方法及系统 |
| KR102716664B1 (ko) * | 2024-07-08 | 2024-10-11 | 김형호 | 반도체 제조공정용 케미컬 저장용기 |
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| JPS61114199A (ja) * | 1984-11-03 | 1986-05-31 | ドイツチエ・ゲゼルシヤフト・フユール・ヴイーダーアウフアルバイツンク・フオン・ケルンブレンシユトツフエン・ミツト・ベシユレンクテル・ハフツング | ガラス化された放射性の廃棄物を受容するための吸込型を形成する方法及び装置 |
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- 2001-04-27 CN CNB018089798A patent/CN1204954C/zh not_active Expired - Lifetime
- 2001-04-27 JP JP2001579949A patent/JP2003532034A/ja active Pending
- 2001-04-27 EP EP01930952A patent/EP1284806A4/en not_active Withdrawn
- 2001-04-27 AU AU2001257439A patent/AU2001257439A1/en not_active Abandoned
- 2001-04-27 WO PCT/US2001/013922 patent/WO2001083084A1/en not_active Ceased
- 2001-04-27 KR KR1020027014732A patent/KR100858077B1/ko not_active Expired - Lifetime
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| JPS61114199A (ja) * | 1984-11-03 | 1986-05-31 | ドイツチエ・ゲゼルシヤフト・フユール・ヴイーダーアウフアルバイツンク・フオン・ケルンブレンシユトツフエン・ミツト・ベシユレンクテル・ハフツング | ガラス化された放射性の廃棄物を受容するための吸込型を形成する方法及び装置 |
| JPS6346164A (ja) * | 1986-08-13 | 1988-02-27 | 株式会社明電舎 | インプラント材料の製造方法 |
| JPH11264500A (ja) * | 1994-10-13 | 1999-09-28 | Advanced Technol Materials Inc | 気体化合物の貯蔵と送出のシステム |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156650A (ja) * | 2004-11-29 | 2006-06-15 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| KR101914799B1 (ko) * | 2010-09-16 | 2018-11-02 | 솔베이(소시에떼아노님) | 불화수소 공급 유닛 |
| JP2014207200A (ja) * | 2013-04-16 | 2014-10-30 | 東京電力株式会社 | ナトリウム−硫黄電池における火災の消火方法 |
| KR102886905B1 (ko) * | 2019-12-12 | 2025-11-17 | 프랙스에어 테크놀로지, 인코포레이티드 | 고성능의 구조적으로 개질된 미립자 탄소 흡착제를 이용하는 도펀트 유체 저장 및 분배 시스템 |
| WO2025013629A1 (ja) * | 2023-07-13 | 2025-01-16 | 株式会社レゾナック | 高圧ガス容器の洗浄方法 |
| WO2025013630A1 (ja) * | 2023-07-13 | 2025-01-16 | 株式会社レゾナック | 高圧ガス容器の洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100858077B1 (ko) | 2008-09-11 |
| WO2001083084A1 (en) | 2001-11-08 |
| AU2001257439A1 (en) | 2001-11-12 |
| CN1204954C (zh) | 2005-06-08 |
| EP1284806A1 (en) | 2003-02-26 |
| KR20030034065A (ko) | 2003-05-01 |
| CN1452507A (zh) | 2003-10-29 |
| EP1284806A4 (en) | 2006-03-15 |
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