CN1204954C - 包括基于吸附剂的气体储存和输送系统的气柜装置 - Google Patents

包括基于吸附剂的气体储存和输送系统的气柜装置 Download PDF

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Publication number
CN1204954C
CN1204954C CNB018089798A CN01808979A CN1204954C CN 1204954 C CN1204954 C CN 1204954C CN B018089798 A CNB018089798 A CN B018089798A CN 01808979 A CN01808979 A CN 01808979A CN 1204954 C CN1204954 C CN 1204954C
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CN
China
Prior art keywords
gas
distribution
supply system
medium
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB018089798A
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English (en)
Chinese (zh)
Other versions
CN1452507A (zh
Inventor
格伦M·汤姆
詹姆斯V·麦克马纳斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of CN1452507A publication Critical patent/CN1452507A/zh
Application granted granted Critical
Publication of CN1204954C publication Critical patent/CN1204954C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
CNB018089798A 2000-05-03 2001-04-27 包括基于吸附剂的气体储存和输送系统的气柜装置 Expired - Lifetime CN1204954C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/564,323 2000-05-03
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (2)

Publication Number Publication Date
CN1452507A CN1452507A (zh) 2003-10-29
CN1204954C true CN1204954C (zh) 2005-06-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB018089798A Expired - Lifetime CN1204954C (zh) 2000-05-03 2001-04-27 包括基于吸附剂的气体储存和输送系统的气柜装置

Country Status (6)

Country Link
EP (1) EP1284806A4 (enExample)
JP (1) JP2003532034A (enExample)
KR (1) KR100858077B1 (enExample)
CN (1) CN1204954C (enExample)
AU (1) AU2001257439A1 (enExample)
WO (1) WO2001083084A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103503113A (zh) * 2011-04-25 2014-01-08 应用材料公司 化学输送系统
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
TWI785406B (zh) * 2020-04-01 2022-12-01 台灣積體電路製造股份有限公司 離子植入機毒性氣體輸送系統及其輸送方法

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US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
US6991671B2 (en) * 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
JP4652785B2 (ja) * 2004-11-29 2011-03-16 株式会社日立国際電気 基板処理装置
KR100675063B1 (ko) * 2005-06-27 2007-01-29 울산화학주식회사 저온액화가스의 충전방법
KR100820377B1 (ko) * 2006-07-07 2008-04-10 김재윤 질소가스충진기
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
US8499789B2 (en) 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
SG182510A1 (en) * 2010-01-14 2012-08-30 Advanced Tech Materials Ventilation gas management systems and processes
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
KR20200124780A (ko) 2012-05-31 2020-11-03 엔테그리스, 아이엔씨. 배취식 침착을 위한 고 물질 플럭스를 갖는 유체의 소스 시약-기반 수송
JP2014207200A (ja) * 2013-04-16 2014-10-30 東京電力株式会社 ナトリウム−硫黄電池における火災の消火方法
CN103638890B (zh) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 高纯安全气体源的制备方法
KR102408666B1 (ko) * 2014-10-03 2022-06-13 엔테그리스, 아이엔씨. 압력-조절 가스 공급 용기
SG11201706560PA (en) 2015-02-12 2017-09-28 Entegris Inc Smart package
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
CN107364659B (zh) * 2017-07-31 2023-06-27 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
CN107883184B (zh) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 用于航天器的高压气瓶承载装置
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
KR102040716B1 (ko) * 2018-07-10 2019-11-06 에이엠티 주식회사 가스통 자동 교체방법
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛
US12233377B2 (en) * 2019-03-27 2025-02-25 Eneos Corporation Hydrogen gas supply apparatus and hydrogen gas supply method
US11577217B2 (en) * 2019-12-12 2023-02-14 Praxair Technology, Inc. Dopant fluid storage and dispensing systems utilizing high performance, structurally modified particulate carbon adsorbents
KR102229474B1 (ko) * 2020-08-31 2021-03-17 서갑수 가스 공급 조절 박스
US11493909B1 (en) * 2021-04-16 2022-11-08 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
US11629821B1 (en) 2022-01-19 2023-04-18 Praxair Technology, Inc. Gas dosing apparatus with directional control valve
US12018800B2 (en) 2022-03-29 2024-06-25 Praxair Technology, Inc. Method and system for optimized gas delivery with automated redundant pressure regulation safety feature
CN116510474A (zh) * 2022-09-20 2023-08-01 北京京仪自动化装备技术股份有限公司 用于半导体废气处理设备的反应腔和反应腔的监测方法
CN116371142B (zh) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 烟气低温吸附再生系统和吸附剂加热输送装置
CN116624753B (zh) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 一种三氟化氯充装方法及系统
CN120981683A (zh) * 2023-07-13 2025-11-18 株式会社力森诺科 高压气体容器的清洗方法
CN121079538A (zh) * 2023-07-13 2025-12-05 株式会社力森诺科 高压气体容器的清洗方法
KR102716664B1 (ko) * 2024-07-08 2024-10-11 김형호 반도체 제조공정용 케미컬 저장용기

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103503113A (zh) * 2011-04-25 2014-01-08 应用材料公司 化学输送系统
CN103503113B (zh) * 2011-04-25 2016-02-17 应用材料公司 化学输送系统
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
TWI785406B (zh) * 2020-04-01 2022-12-01 台灣積體電路製造股份有限公司 離子植入機毒性氣體輸送系統及其輸送方法
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system

Also Published As

Publication number Publication date
KR100858077B1 (ko) 2008-09-11
WO2001083084A1 (en) 2001-11-08
AU2001257439A1 (en) 2001-11-12
JP2003532034A (ja) 2003-10-28
EP1284806A1 (en) 2003-02-26
KR20030034065A (ko) 2003-05-01
CN1452507A (zh) 2003-10-29
EP1284806A4 (en) 2006-03-15

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C06 Publication
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Owner name: ANGES INC.

Free format text: FORMER OWNER: ADVANCED TECHNOLOGY MATERIALS, INC.

Effective date: 20150519

C41 Transfer of patent application or patent right or utility model
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Address after: Massachusetts, USA

Patentee after: MYKROLIS Corp.

Address before: American Connecticut

Patentee before: Advanced Technology Materials, Inc.

C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: Massachusetts, USA

Patentee after: Entergris Co.

Address before: Massachusetts, USA

Patentee before: MYKROLIS Corp.

CX01 Expiry of patent term

Granted publication date: 20050608

CX01 Expiry of patent term