JP2003528353A5 - - Google Patents
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- Publication number
- JP2003528353A5 JP2003528353A5 JP2001569560A JP2001569560A JP2003528353A5 JP 2003528353 A5 JP2003528353 A5 JP 2003528353A5 JP 2001569560 A JP2001569560 A JP 2001569560A JP 2001569560 A JP2001569560 A JP 2001569560A JP 2003528353 A5 JP2003528353 A5 JP 2003528353A5
- Authority
- JP
- Japan
- Prior art keywords
- composition
- weight
- weak acid
- amount
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 description 22
- 239000002253 acid Substances 0.000 description 12
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical group NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 8
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 8
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 150000001412 amines Chemical class 0.000 description 6
- 230000000269 nucleophilic effect Effects 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 4
- HXJUTPCZVOIRIF-UHFFFAOYSA-N sulfolane Chemical compound O=S1(=O)CCCC1 HXJUTPCZVOIRIF-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19007100P | 2000-03-20 | 2000-03-20 | |
| US60/190,071 | 2000-03-20 | ||
| PCT/US2001/008772 WO2001071429A1 (en) | 2000-03-20 | 2001-03-19 | Method and composition for removing sodium-containing material from microcircuit substrates |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003528353A JP2003528353A (ja) | 2003-09-24 |
| JP2003528353A5 true JP2003528353A5 (https=) | 2008-05-08 |
| JP4671575B2 JP4671575B2 (ja) | 2011-04-20 |
Family
ID=22699906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001569560A Expired - Fee Related JP4671575B2 (ja) | 2000-03-20 | 2001-03-19 | 超小型回路基板からナトリウム含有材料を除去するための方法および組成物 |
Country Status (15)
| Country | Link |
|---|---|
| EP (1) | EP1307786B1 (https=) |
| JP (1) | JP4671575B2 (https=) |
| KR (1) | KR100876067B1 (https=) |
| CN (1) | CN1230718C (https=) |
| AT (1) | ATE467154T1 (https=) |
| AU (1) | AU2001245861A1 (https=) |
| CA (1) | CA2403730C (https=) |
| DE (1) | DE60142054D1 (https=) |
| ES (1) | ES2345872T3 (https=) |
| IL (2) | IL151792A0 (https=) |
| MY (1) | MY129673A (https=) |
| NZ (1) | NZ522079A (https=) |
| PL (1) | PL195792B1 (https=) |
| TW (1) | TWI239435B (https=) |
| WO (1) | WO2001071429A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6326130B1 (en) | 1993-10-07 | 2001-12-04 | Mallinckrodt Baker, Inc. | Photoresist strippers containing reducing agents to reduce metal corrosion |
| EP1512050A2 (en) * | 2002-06-07 | 2005-03-09 | Mallinckrodt Baker, Inc. | Cleaning compositions for microelectronic substrates |
| KR100649418B1 (ko) | 2002-08-22 | 2006-11-27 | 다이킨 고교 가부시키가이샤 | 박리액 |
| JP4005092B2 (ja) | 2004-08-20 | 2007-11-07 | 東京応化工業株式会社 | 洗浄除去用溶剤 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5417802A (en) | 1994-03-18 | 1995-05-23 | At&T Corp. | Integrated circuit manufacturing |
| JPH10171130A (ja) * | 1996-12-10 | 1998-06-26 | Fuji Film Oorin Kk | フォトレジスト剥離液 |
| US6465403B1 (en) | 1998-05-18 | 2002-10-15 | David C. Skee | Silicate-containing alkaline compositions for cleaning microelectronic substrates |
-
2001
- 2001-02-08 MY MYPI20010558A patent/MY129673A/en unknown
- 2001-02-21 TW TW090103920A patent/TWI239435B/zh not_active IP Right Cessation
- 2001-03-19 AU AU2001245861A patent/AU2001245861A1/en not_active Abandoned
- 2001-03-19 ES ES01918830T patent/ES2345872T3/es not_active Expired - Lifetime
- 2001-03-19 NZ NZ522079A patent/NZ522079A/en not_active IP Right Cessation
- 2001-03-19 IL IL15179201A patent/IL151792A0/xx active IP Right Grant
- 2001-03-19 DE DE60142054T patent/DE60142054D1/de not_active Expired - Lifetime
- 2001-03-19 CN CNB018067050A patent/CN1230718C/zh not_active Expired - Fee Related
- 2001-03-19 KR KR1020027012303A patent/KR100876067B1/ko not_active Expired - Fee Related
- 2001-03-19 CA CA002403730A patent/CA2403730C/en not_active Expired - Fee Related
- 2001-03-19 AT AT01918830T patent/ATE467154T1/de active
- 2001-03-19 EP EP01918830A patent/EP1307786B1/en not_active Expired - Lifetime
- 2001-03-19 PL PL01357383A patent/PL195792B1/pl not_active IP Right Cessation
- 2001-03-19 WO PCT/US2001/008772 patent/WO2001071429A1/en not_active Ceased
- 2001-03-19 JP JP2001569560A patent/JP4671575B2/ja not_active Expired - Fee Related
-
2002
- 2002-09-17 IL IL151792A patent/IL151792A/en not_active IP Right Cessation
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