JP2003519401A5 - - Google Patents
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- Publication number
- JP2003519401A5 JP2003519401A5 JP2001550056A JP2001550056A JP2003519401A5 JP 2003519401 A5 JP2003519401 A5 JP 2003519401A5 JP 2001550056 A JP2001550056 A JP 2001550056A JP 2001550056 A JP2001550056 A JP 2001550056A JP 2003519401 A5 JP2003519401 A5 JP 2003519401A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/471,484 | 1999-12-23 | ||
| US09/471,484 US6324003B1 (en) | 1999-12-23 | 1999-12-23 | Calcium fluoride (CaF2) stress plate and method of making the same |
| PCT/US2000/034645 WO2001050161A1 (en) | 1999-12-23 | 2000-12-21 | CALCIUM FLUORIDE (CaF2) STRESS PLATE AND METHOD OF MAKING THE SAME |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003519401A JP2003519401A (ja) | 2003-06-17 |
| JP2003519401A5 true JP2003519401A5 (enExample) | 2008-02-14 |
| JP4210058B2 JP4210058B2 (ja) | 2009-01-14 |
Family
ID=23871805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001550056A Expired - Fee Related JP4210058B2 (ja) | 1999-12-23 | 2000-12-21 | フッ化カルシウム（ＣａＦ２）ストレスプレートおよびそれを作製する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6324003B1 (enExample) |
| EP (1) | EP1242836B1 (enExample) |
| JP (1) | JP4210058B2 (enExample) |
| KR (1) | KR100723561B1 (enExample) |
| AU (1) | AU2443001A (enExample) |
| DE (1) | DE60026885T2 (enExample) |
| WO (1) | WO2001050161A1 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6937394B2 (en) * | 2001-04-10 | 2005-08-30 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | Device and method for changing the stress-induced birefringence and/or the thickness of an optical component |
| WO2002093209A2 (de) * | 2001-05-15 | 2002-11-21 | Carl Zeiss | Objektiv mit fluorid-kristall-linsen |
| US7239447B2 (en) * | 2001-05-15 | 2007-07-03 | Carl Zeiss Smt Ag | Objective with crystal lenses |
| JP2004531764A (ja) * | 2001-05-16 | 2004-10-14 | コーニング インコーポレイテッド | 好ましい結晶方位をもつ立方晶系結晶材料光学素子 |
| US6683710B2 (en) | 2001-06-01 | 2004-01-27 | Optical Research Associates | Correction of birefringence in cubic crystalline optical systems |
| US6785051B2 (en) | 2001-07-18 | 2004-08-31 | Corning Incorporated | Intrinsic birefringence compensation for below 200 nanometer wavelength optical lithography components with cubic crystalline structures |
| US6844972B2 (en) * | 2001-10-30 | 2005-01-18 | Mcguire, Jr. James P. | Reducing aberration in optical systems comprising cubic crystalline optical elements |
| US6995908B2 (en) | 2001-10-30 | 2006-02-07 | Asml Netherlands B.V. | Methods for reducing aberration in optical systems |
| US7453641B2 (en) * | 2001-10-30 | 2008-11-18 | Asml Netherlands B.V. | Structures and methods for reducing aberration in optical systems |
| US6970232B2 (en) * | 2001-10-30 | 2005-11-29 | Asml Netherlands B.V. | Structures and methods for reducing aberration in integrated circuit fabrication systems |
| EP1464992A1 (en) * | 2001-12-10 | 2004-10-06 | Nikon Corporation | Fluoride crystal material for optical device used for photolithographic apparatus and its manufacturing method |
| US7292388B2 (en) * | 2002-05-08 | 2007-11-06 | Carl Zeiss Smt Ag | Lens made of a crystalline material |
| CN1327294C (zh) * | 2002-05-08 | 2007-07-18 | 卡尔蔡司Smt股份公司 | 用晶体材料制造透镜 |
| DE10229614A1 (de) * | 2002-06-25 | 2004-01-15 | Carl Zeiss Smt Ag | Katadioptrisches Reduktionsobjektiv |
| US20050190446A1 (en) * | 2002-06-25 | 2005-09-01 | Carl Zeiss Amt Ag | Catadioptric reduction objective |
| US6958864B2 (en) * | 2002-08-22 | 2005-10-25 | Asml Netherlands B.V. | Structures and methods for reducing polarization aberration in integrated circuit fabrication systems |
| US6969028B2 (en) * | 2003-01-22 | 2005-11-29 | The Boeing Company | Scarf nozzle for a jet engine and method of using the same |
| US7408616B2 (en) * | 2003-09-26 | 2008-08-05 | Carl Zeiss Smt Ag | Microlithographic exposure method as well as a projection exposure system for carrying out the method |
| US7084960B2 (en) * | 2004-03-29 | 2006-08-01 | Intel Corporation | Lithography using controlled polarization |
| US7158275B2 (en) * | 2004-04-13 | 2007-01-02 | Intel Corporation | Polarization modulator |
| JP4913041B2 (ja) * | 2004-06-04 | 2012-04-11 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 強度変化の補償を伴う投影系及びそのための補償素子 |
| DE102007014587A1 (de) | 2007-03-23 | 2008-09-25 | Carl Zeiss Smt Ag | Doppelbrechende Verzögerungsplattenanordnung |
| DE102012211549B3 (de) * | 2012-07-03 | 2013-07-04 | Polytec Gmbh | Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1485083A (fr) | 1965-07-08 | 1967-06-16 | Ibm | Lames à retard de phase variable |
| US3600611A (en) | 1970-03-18 | 1971-08-17 | Kettering Scient Research Inc | Elasto-optic device with mechanical bias |
| JPH09248488A (ja) * | 1996-03-18 | 1997-09-22 | Toto Ltd | 空気清浄装置 |
| DE19637563A1 (de) | 1996-09-14 | 1998-03-19 | Zeiss Carl Fa | Doppelbrechende Planplattenanordnung und DUV-Viertelwellenplatte |
| KR100223812B1 (ko) * | 1996-10-30 | 1999-10-15 | 구본준 | 위상반전 마스크의 제조방법 |
| DE19810089A1 (de) | 1998-03-10 | 1999-09-16 | Zeiss Carl Fa | Doppelbrechende Plattenanordnung mit Spannungsdoppelbrechung |
| JP3856265B2 (ja) | 1998-03-12 | 2006-12-13 | 株式会社ニコン | 光学素子の製造方法、光学素子の複屈折算出方法及び複屈折判定方法 |
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1999
- 1999-12-23 US US09/471,484 patent/US6324003B1/en not_active Expired - Fee Related
-
2000
- 2000-12-21 DE DE60026885T patent/DE60026885T2/de not_active Expired - Lifetime
- 2000-12-21 KR KR1020027008159A patent/KR100723561B1/ko not_active Expired - Fee Related
- 2000-12-21 EP EP00988198A patent/EP1242836B1/en not_active Expired - Lifetime
- 2000-12-21 AU AU24430/01A patent/AU2443001A/en not_active Abandoned
- 2000-12-21 JP JP2001550056A patent/JP4210058B2/ja not_active Expired - Fee Related
- 2000-12-21 WO PCT/US2000/034645 patent/WO2001050161A1/en not_active Ceased