JP2003504748A - デジタル質量流量コントローラの動作のためのシステムおよび方法 - Google Patents

デジタル質量流量コントローラの動作のためのシステムおよび方法

Info

Publication number
JP2003504748A
JP2003504748A JP2001510059A JP2001510059A JP2003504748A JP 2003504748 A JP2003504748 A JP 2003504748A JP 2001510059 A JP2001510059 A JP 2001510059A JP 2001510059 A JP2001510059 A JP 2001510059A JP 2003504748 A JP2003504748 A JP 2003504748A
Authority
JP
Japan
Prior art keywords
mass flow
flow controller
flow rate
controller
electronic control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001510059A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003504748A5 (https=
Inventor
ケネス イー． ティンスリー，
フェイサル タリク，
Original Assignee
ミリポール・コーポレイシヨン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23377995&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2003504748(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ミリポール・コーポレイシヨン filed Critical ミリポール・コーポレイシヨン
Publication of JP2003504748A publication Critical patent/JP2003504748A/ja
Publication of JP2003504748A5 publication Critical patent/JP2003504748A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
JP2001510059A 1999-07-09 2000-06-21 デジタル質量流量コントローラの動作のためのシステムおよび方法 Withdrawn JP2003504748A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/350,744 US6343617B1 (en) 1999-07-09 1999-07-09 System and method of operation of a digital mass flow controller
US09/350,744 1999-07-09
PCT/US2000/017062 WO2001004715A1 (en) 1999-07-09 2000-06-21 System and method of operation of a digital mass flow controller

Publications (2)

Publication Number Publication Date
JP2003504748A true JP2003504748A (ja) 2003-02-04
JP2003504748A5 JP2003504748A5 (https=) 2009-01-08

Family

ID=23377995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001510059A Withdrawn JP2003504748A (ja) 1999-07-09 2000-06-21 デジタル質量流量コントローラの動作のためのシステムおよび方法

Country Status (9)

Country Link
US (3) US6343617B1 (https=)
EP (2) EP1359487B1 (https=)
JP (1) JP2003504748A (https=)
KR (1) KR100718209B1 (https=)
CN (1) CN1249545C (https=)
AT (2) ATE251773T1 (https=)
AU (1) AU5498700A (https=)
DE (2) DE60005849T2 (https=)
WO (1) WO2001004715A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007525736A (ja) * 2003-06-25 2007-09-06 エム　ケー　エス　インストルメンツ　インコーポレーテッド インサイチュ式フロー検証及び較正システム及び方法
JP2016021219A (ja) * 2014-06-20 2016-02-04 株式会社堀場エステック 中継器

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KR101076833B1 (ko) 2003-06-25 2011-10-25 엠케이에스 인스트루먼츠 인코포레이티드 인-시츄 흐름 검증 및 교정을 위한 시스템 및 방법
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Also Published As

Publication number Publication date
ATE251773T1 (de) 2003-10-15
DE60005849T2 (de) 2004-09-09
CN1249545C (zh) 2006-04-05
EP1212665B1 (en) 2003-10-08
AU5498700A (en) 2001-01-30
DE60005849D1 (de) 2003-11-13
EP1212665A1 (en) 2002-06-12
EP1359487A3 (en) 2004-02-04
US6343617B1 (en) 2002-02-05
US20020117202A1 (en) 2002-08-29
ATE374964T1 (de) 2007-10-15
KR20020039317A (ko) 2002-05-25
WO2001004715A1 (en) 2001-01-18
KR100718209B1 (ko) 2007-05-15
US20020139418A1 (en) 2002-10-03
EP1359487A2 (en) 2003-11-05
DE60036649T2 (de) 2008-07-03
US6640822B2 (en) 2003-11-04
DE60036649D1 (de) 2007-11-15
CN1371492A (zh) 2002-09-25
US6681787B2 (en) 2004-01-27
EP1359487B1 (en) 2007-10-03

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