JPH06502942A - - Google Patents

Info

Publication number
JPH06502942A
JPH06502942A JP51791391A JP51791391A JPH06502942A JP H06502942 A JPH06502942 A JP H06502942A JP 51791391 A JP51791391 A JP 51791391A JP 51791391 A JP51791391 A JP 51791391A JP H06502942 A JPH06502942 A JP H06502942A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51791391A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US07/638,279 priority Critical patent/US5062446A/en
Application filed filed Critical
Priority to PCT/US1991/006963 priority patent/WO1992012474A1/en
Publication of JPH06502942A publication Critical patent/JPH06502942A/ja
Application status is Pending legal-status Critical

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7737Thermal responsive
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7759Responsive to change in rate of fluid flow
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7761Electrically actuated valve
JP51791391A 1991-01-07 1991-09-24 Pending JPH06502942A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US07/638,279 US5062446A (en) 1991-01-07 1991-01-07 Intelligent mass flow controller
PCT/US1991/006963 WO1992012474A1 (en) 1991-01-07 1991-09-24 Intelligent mass flow controller

Publications (1)

Publication Number Publication Date
JPH06502942A true JPH06502942A (ja) 1994-03-31

Family

ID=24559374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51791391A Pending JPH06502942A (ja) 1991-01-07 1991-09-24

Country Status (6)

Country Link
US (1) US5062446A (ja)
EP (1) EP0566574B1 (ja)
JP (1) JPH06502942A (ja)
AU (1) AU8753791A (ja)
DE (2) DE69106893T2 (ja)
WO (1) WO1992012474A1 (ja)

Cited By (6)

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JP2005534110A (ja) * 2002-07-19 2005-11-10 セレリティー グループ,インコーポレイテッド マスフローコントローラにおける圧力補償のための方法および装置
JP2009524821A (ja) * 2006-01-26 2009-07-02 エム ケー エス インストルメンツ インコーポレーテッドMks Instruments,Incorporated 質量流量コントローラにおける熱吸引の補償
JP2010091320A (ja) * 2008-10-06 2010-04-22 Horiba Stec Co Ltd 質量流量計及びマスフローコントローラ
JP2014056618A (ja) * 2002-06-24 2014-03-27 Mks Instruments Inc 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法
JP2016512350A (ja) * 2013-03-01 2016-04-25 日立金属株式会社 複数の流体の種類に亘って改善された性能のためのマスフローコントローラ及び方法
JP2016514331A (ja) * 2013-03-12 2016-05-19 イリノイ トゥール ワークス インコーポレイティド 近距離無線通信及び/又はusbインターフェースを有する質量流量制御器

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EP0566574A1 (en) 1993-10-27
AU8753791A (en) 1992-08-17
US5062446A (en) 1991-11-05
DE69106893T2 (de) 1995-05-18
DE69106893D1 (de) 1995-03-02
EP0566574B1 (en) 1995-01-18
WO1992012474A1 (en) 1992-07-23

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