JP2003302585A5 - - Google Patents

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Publication number
JP2003302585A5
JP2003302585A5 JP2002106692A JP2002106692A JP2003302585A5 JP 2003302585 A5 JP2003302585 A5 JP 2003302585A5 JP 2002106692 A JP2002106692 A JP 2002106692A JP 2002106692 A JP2002106692 A JP 2002106692A JP 2003302585 A5 JP2003302585 A5 JP 2003302585A5
Authority
JP
Japan
Prior art keywords
movable plate
electromagnetic actuator
drag
torsion bar
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002106692A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003302585A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002106692A priority Critical patent/JP2003302585A/ja
Priority claimed from JP2002106692A external-priority patent/JP2003302585A/ja
Publication of JP2003302585A publication Critical patent/JP2003302585A/ja
Publication of JP2003302585A5 publication Critical patent/JP2003302585A5/ja
Pending legal-status Critical Current

Links

JP2002106692A 2002-04-09 2002-04-09 プレーナ型電磁アクチュエータ及びその制御方法 Pending JP2003302585A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002106692A JP2003302585A (ja) 2002-04-09 2002-04-09 プレーナ型電磁アクチュエータ及びその制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002106692A JP2003302585A (ja) 2002-04-09 2002-04-09 プレーナ型電磁アクチュエータ及びその制御方法

Publications (2)

Publication Number Publication Date
JP2003302585A JP2003302585A (ja) 2003-10-24
JP2003302585A5 true JP2003302585A5 (enExample) 2005-09-22

Family

ID=29390938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002106692A Pending JP2003302585A (ja) 2002-04-09 2002-04-09 プレーナ型電磁アクチュエータ及びその制御方法

Country Status (1)

Country Link
JP (1) JP2003302585A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005085929A1 (ja) * 2004-03-09 2008-01-24 富士通株式会社 ミラーデバイス，光制御装置，ミラーの制御方法およびミラー素子
JP2006313216A (ja) * 2005-05-09 2006-11-16 Canon Inc 揺動体装置、およびそれを用いた光偏向器
JP6177636B2 (ja) * 2013-09-19 2017-08-09 日本信号株式会社 プレーナ型アクチュエータ
KR102833502B1 (ko) * 2019-10-15 2025-07-11 엘지이노텍 주식회사 프리즘 구동 장치
CN110794571B (zh) * 2019-11-14 2022-12-09 京东方科技集团股份有限公司 透光组件

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