JP2003302585A - プレーナ型電磁アクチュエータ及びその制御方法 - Google Patents
プレーナ型電磁アクチュエータ及びその制御方法Info
- Publication number
- JP2003302585A JP2003302585A JP2002106692A JP2002106692A JP2003302585A JP 2003302585 A JP2003302585 A JP 2003302585A JP 2002106692 A JP2002106692 A JP 2002106692A JP 2002106692 A JP2002106692 A JP 2002106692A JP 2003302585 A JP2003302585 A JP 2003302585A
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- electromagnetic actuator
- drive coil
- force
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000003068 static effect Effects 0.000 claims abstract description 31
- 239000010409 thin film Substances 0.000 claims description 42
- 230000005672 electromagnetic field Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 19
- 230000005684 electric field Effects 0.000 abstract 2
- 239000013307 optical fiber Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002106692A JP2003302585A (ja) | 2002-04-09 | 2002-04-09 | プレーナ型電磁アクチュエータ及びその制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002106692A JP2003302585A (ja) | 2002-04-09 | 2002-04-09 | プレーナ型電磁アクチュエータ及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003302585A true JP2003302585A (ja) | 2003-10-24 |
| JP2003302585A5 JP2003302585A5 (enExample) | 2005-09-22 |
Family
ID=29390938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002106692A Pending JP2003302585A (ja) | 2002-04-09 | 2002-04-09 | プレーナ型電磁アクチュエータ及びその制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003302585A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005085929A1 (ja) * | 2004-03-09 | 2005-09-15 | Fujitsu Limited | ミラーデバイス，光制御装置，ミラーの制御方法およびミラー素子 |
| JP2006313216A (ja) * | 2005-05-09 | 2006-11-16 | Canon Inc | 揺動体装置、およびそれを用いた光偏向器 |
| JP2015061428A (ja) * | 2013-09-19 | 2015-03-30 | 日本信号株式会社 | プレーナ型アクチュエータ |
| CN110794571A (zh) * | 2019-11-14 | 2020-02-14 | 京东方科技集团股份有限公司 | 透光组件 |
| WO2021075798A1 (ko) * | 2019-10-15 | 2021-04-22 | 엘지이노텍 주식회사 | 프리즘 구동 장치 |
-
2002
- 2002-04-09 JP JP2002106692A patent/JP2003302585A/ja active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005085929A1 (ja) * | 2004-03-09 | 2005-09-15 | Fujitsu Limited | ミラーデバイス，光制御装置，ミラーの制御方法およびミラー素子 |
| JP2006313216A (ja) * | 2005-05-09 | 2006-11-16 | Canon Inc | 揺動体装置、およびそれを用いた光偏向器 |
| JP2015061428A (ja) * | 2013-09-19 | 2015-03-30 | 日本信号株式会社 | プレーナ型アクチュエータ |
| WO2021075798A1 (ko) * | 2019-10-15 | 2021-04-22 | 엘지이노텍 주식회사 | 프리즘 구동 장치 |
| KR20210044646A (ko) * | 2019-10-15 | 2021-04-23 | 엘지이노텍 주식회사 | 프리즘 구동 장치 |
| CN114585956A (zh) * | 2019-10-15 | 2022-06-03 | Lg伊诺特有限公司 | 棱镜驱动装置 |
| EP4047404A4 (en) * | 2019-10-15 | 2022-12-21 | LG Innotek Co., Ltd. | PRISM DRIVE DEVICE |
| CN114585956B (zh) * | 2019-10-15 | 2024-03-01 | Lg伊诺特有限公司 | 棱镜驱动装置 |
| US12313841B2 (en) | 2019-10-15 | 2025-05-27 | Lg Innotek Co., Ltd. | Prism drive device |
| KR102833502B1 (ko) * | 2019-10-15 | 2025-07-11 | 엘지이노텍 주식회사 | 프리즘 구동 장치 |
| CN110794571A (zh) * | 2019-11-14 | 2020-02-14 | 京东方科技集团股份有限公司 | 透光组件 |
| CN110794571B (zh) * | 2019-11-14 | 2022-12-09 | 京东方科技集团股份有限公司 | 透光组件 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2987750B2 (ja) | プレーナ型電磁アクチュエータ | |
| US6633212B1 (en) | Electronically latching micro-magnetic switches and method of operating same | |
| JP4380233B2 (ja) | 光偏向器 | |
| JP3425814B2 (ja) | 電磁アクチュエータ及びその製造方法 | |
| JPH07175005A (ja) | プレーナー型ガルバノミラー及びその製造方法 | |
| JP2004117832A (ja) | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 | |
| JP2000314842A (ja) | 光超小型機械及び光ビームの制御方法 | |
| JP2005099760A (ja) | アクチュエータ | |
| JP2004082288A (ja) | 静電型アクチュエータ及びそれを用いた光スイッチ | |
| JP2003302585A (ja) | プレーナ型電磁アクチュエータ及びその制御方法 | |
| JP2004110005A (ja) | 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法 | |
| JP2004215389A (ja) | 弾性表面波アクチュエータ及び弾性表面波アクチュエータを適用した偏向器 | |
| TW494251B (en) | Optical switch | |
| KR100644896B1 (ko) | 전자력 구동 스캐닝 마이크로미러 및 이를 사용한광스캐닝 장치 | |
| CN213182194U (zh) | 一种电磁式mems扭转微镜 | |
| US7019877B2 (en) | Light beam deflector | |
| US6937121B2 (en) | Magnetic actuator | |
| JP4376513B2 (ja) | プレーナー型電磁アクチュエータ | |
| JP5558799B2 (ja) | プレーナ型アクチュエータ | |
| US7265887B2 (en) | Two axis low inertia torsional hinged optical device | |
| JP2009093107A (ja) | アクチュエータ、光スキャナおよび画像形成装置 | |
| WO1997041632A1 (en) | Electromagnetic actuator and its manufacture | |
| JP2003302585A5 (enExample) | ||
| CN112946973B (zh) | 拍摄装置、电子设备以及拍摄防抖方法 | |
| JP2005250133A (ja) | 光偏向器および画像形成装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050408 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050408 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070111 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070130 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070529 |