JP2003282386A5 - - Google Patents

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Publication number
JP2003282386A5
JP2003282386A5 JP2002088153A JP2002088153A JP2003282386A5 JP 2003282386 A5 JP2003282386 A5 JP 2003282386A5 JP 2002088153 A JP2002088153 A JP 2002088153A JP 2002088153 A JP2002088153 A JP 2002088153A JP 2003282386 A5 JP2003282386 A5 JP 2003282386A5
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JP
Japan
Prior art keywords
substance
control device
supply
supply system
facility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002088153A
Other languages
English (en)
Japanese (ja)
Other versions
JP4294910B2 (ja
JP2003282386A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002088153A priority Critical patent/JP4294910B2/ja
Priority claimed from JP2002088153A external-priority patent/JP4294910B2/ja
Priority to PCT/JP2003/003874 priority patent/WO2003081647A1/en
Priority to US10/507,699 priority patent/US7305275B2/en
Priority to CNA03809536XA priority patent/CN1650400A/zh
Publication of JP2003282386A publication Critical patent/JP2003282386A/ja
Publication of JP2003282386A5 publication Critical patent/JP2003282386A5/ja
Application granted granted Critical
Publication of JP4294910B2 publication Critical patent/JP4294910B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002088153A 2002-03-27 2002-03-27 半導体デバイス製造プラントにおける物質供給システム Expired - Fee Related JP4294910B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002088153A JP4294910B2 (ja) 2002-03-27 2002-03-27 半導体デバイス製造プラントにおける物質供給システム
PCT/JP2003/003874 WO2003081647A1 (en) 2002-03-27 2003-03-27 Material supply system in semiconductor device manufacturing plant
US10/507,699 US7305275B2 (en) 2002-03-27 2003-03-27 Material supply system in semiconductor device manufacturing plant
CNA03809536XA CN1650400A (zh) 2002-03-27 2003-03-27 半导体器件制造工厂中的原料供给系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002088153A JP4294910B2 (ja) 2002-03-27 2002-03-27 半導体デバイス製造プラントにおける物質供給システム

Publications (3)

Publication Number Publication Date
JP2003282386A JP2003282386A (ja) 2003-10-03
JP2003282386A5 true JP2003282386A5 (https=) 2005-08-25
JP4294910B2 JP4294910B2 (ja) 2009-07-15

Family

ID=28449425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002088153A Expired - Fee Related JP4294910B2 (ja) 2002-03-27 2002-03-27 半導体デバイス製造プラントにおける物質供給システム

Country Status (4)

Country Link
US (1) US7305275B2 (https=)
JP (1) JP4294910B2 (https=)
CN (1) CN1650400A (https=)
WO (1) WO2003081647A1 (https=)

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US7862662B2 (en) * 2005-12-30 2011-01-04 Lam Research Corporation Method and material for cleaning a substrate
US20070084793A1 (en) * 2005-10-18 2007-04-19 Nigel Wenden Method and apparatus for producing ultra-high purity water
JP4018726B2 (ja) * 2006-02-07 2007-12-05 東洋炭素株式会社 半導体製造プラント
EP1994456A4 (en) 2006-03-16 2010-05-19 Applied Materials Inc METHOD AND DEVICE FOR PRESSURE CONTROL IN MANUFACTURING SYSTEMS FOR ELECTRONIC DEVICES
WO2008147522A1 (en) * 2007-05-25 2008-12-04 Applied Materials, Inc. Methods and apparatus for assembling and operating electronic device manufacturing systems
KR101551170B1 (ko) * 2007-05-25 2015-09-09 어플라이드 머티어리얼스, 인코포레이티드 저감 시스템의 효율적 작동을 위한 방법들 및 장치
US20090018688A1 (en) * 2007-06-15 2009-01-15 Applied Materials, Inc. Methods and systems for designing and validating operation of abatement systems
EP2009532A1 (en) * 2007-06-29 2008-12-31 Siemens Aktiengesellschaft A method for real-time scheduling of processes at distributed manufacturing sites
WO2009055750A1 (en) * 2007-10-26 2009-04-30 Applied Materials, Inc. Methods and apparatus for smart abatement using an improved fuel circuit
WO2009100163A1 (en) * 2008-02-05 2009-08-13 Applied Materials, Inc. Methods and apparatus for operating an electronic device manufacturing system
KR101581673B1 (ko) * 2008-02-05 2015-12-31 어플라이드 머티어리얼스, 인코포레이티드 제조 프로세스들로부터의 가연성 폐기물 가스들을 처리하기 위한 시스템 및 방법
JP2013115117A (ja) * 2011-11-25 2013-06-10 Tokyo Electron Ltd 資源再利用装置、処理装置群コントローラ、資源再利用システム、資源再利用方法、及び資源再利用プログラム
TW201312638A (zh) * 2012-03-03 2013-03-16 Hong Tung Resource Co Ltd 矽晶圓切割廢料之處理方法
JP6368458B2 (ja) * 2013-05-24 2018-08-01 株式会社荏原製作所 除害機能付真空ポンプ
JP2016134569A (ja) * 2015-01-21 2016-07-25 株式会社東芝 半導体製造装置
CN109571227B (zh) * 2018-12-27 2021-08-31 西安奕斯伟硅片技术有限公司 抛光液供给系统、方法及抛光系统
JP7665482B2 (ja) 2021-09-24 2025-04-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システム、及び群管理装置
CN118928972B (zh) * 2024-10-14 2025-01-14 内蒙古大全半导体有限公司 一种电子级多晶硅料暂存系统

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
JP2533495B2 (ja) * 1986-07-25 1996-09-11 株式会社日立製作所 ワ−クスケジユ−リング方法及び装置
JPS6362325A (ja) * 1986-09-03 1988-03-18 Nec Corp ドライエツチング装置
US5023787A (en) * 1988-02-01 1991-06-11 Rainbird Sprinkler Mfg. Corp. Irrigation control and flow management system
JP3277340B2 (ja) * 1993-04-22 2002-04-22 日本酸素株式会社 半導体製造工場向け各種ガスの製造方法及び装置
WO1996029598A1 (en) 1995-03-17 1996-09-26 Hitachi, Ltd. Waste water control system
JPH0947750A (ja) 1995-08-10 1997-02-18 Ricoh Co Ltd 水処理システム
US6217659B1 (en) * 1998-10-16 2001-04-17 Air Products And Chemical, Inc. Dynamic blending gas delivery system and method
JP2000135426A (ja) 1998-10-30 2000-05-16 Tokico Ltd 混合装置
DE19900805C2 (de) * 1999-01-12 2002-06-13 Infineon Technologies Ag Verfahren und Vorrichtung zur Erzeugung von Reinstwasser
TW495819B (en) * 2000-05-31 2002-07-21 Toshiba Corp Method and system for electronic commerce of semiconductor product, system and method of production, and design system, design method and manufacturing method of production equipment
US7317972B2 (en) * 2001-10-31 2008-01-08 Aqua Conserve, Inc. Management of peak water use
JP2003271218A (ja) * 2002-03-15 2003-09-26 Toshiba Corp 半導体製造装置、半導体製造システム及び基板処理方法

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