JP2003266400A - シリコン酸化物ナノ構造体の製造方法 - Google Patents

シリコン酸化物ナノ構造体の製造方法

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Publication number
JP2003266400A
JP2003266400A JP2002363162A JP2002363162A JP2003266400A JP 2003266400 A JP2003266400 A JP 2003266400A JP 2002363162 A JP2002363162 A JP 2002363162A JP 2002363162 A JP2002363162 A JP 2002363162A JP 2003266400 A JP2003266400 A JP 2003266400A
Authority
JP
Japan
Prior art keywords
silicon
aluminum
pores
silicon oxide
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002363162A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003266400A5 (enExample
Inventor
Kazuhiko Fukutani
和彦 福谷
Toru Den
透 田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2002363162A priority Critical patent/JP2003266400A/ja
Publication of JP2003266400A publication Critical patent/JP2003266400A/ja
Publication of JP2003266400A5 publication Critical patent/JP2003266400A5/ja
Withdrawn legal-status Critical Current

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JP2002363162A 2002-12-13 2002-12-13 シリコン酸化物ナノ構造体の製造方法 Withdrawn JP2003266400A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002363162A JP2003266400A (ja) 2002-12-13 2002-12-13 シリコン酸化物ナノ構造体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002363162A JP2003266400A (ja) 2002-12-13 2002-12-13 シリコン酸化物ナノ構造体の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002073113 Division 2002-03-15 2002-03-15

Publications (2)

Publication Number Publication Date
JP2003266400A true JP2003266400A (ja) 2003-09-24
JP2003266400A5 JP2003266400A5 (enExample) 2006-12-28

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ID=29208286

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Application Number Title Priority Date Filing Date
JP2002363162A Withdrawn JP2003266400A (ja) 2002-12-13 2002-12-13 シリコン酸化物ナノ構造体の製造方法

Country Status (1)

Country Link
JP (1) JP2003266400A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005068558A (ja) * 2003-08-07 2005-03-17 Canon Inc ナノ構造体及びその製造方法
JP2006297580A (ja) * 2005-03-25 2006-11-02 Canon Inc 構造体、その製造方法、及び該構造体を用いたデバイス
US7524370B1 (en) 2004-11-26 2009-04-28 Fujikura Ltd. Nanostructure and manufacturing method for same
KR101410826B1 (ko) * 2012-07-03 2014-06-23 한국전기연구원 나노구조와 미세구조가 혼재하는 초발수 표면

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139714A (ja) * 1987-11-26 1990-05-29 Hitachi Maxell Ltd 磁気記録媒体
JPH09157062A (ja) * 1995-11-29 1997-06-17 Agency Of Ind Science & Technol 多孔質セラミックス膜とその製造方法
JP2000327491A (ja) * 1999-05-11 2000-11-28 Hitachi Maxell Ltd 無機化合物薄膜、磁気記録媒体および磁気記録装置
JP2001138300A (ja) * 1999-08-30 2001-05-22 Canon Inc 細孔を有する構造体の製造方法、並びに該製造方法により製造される構造体及び該構造体を用いた構造体デバイス
WO2001071394A1 (fr) * 2000-03-21 2001-09-27 Asahi Glass Company, Limited Article antireflet et procédé de production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139714A (ja) * 1987-11-26 1990-05-29 Hitachi Maxell Ltd 磁気記録媒体
JPH09157062A (ja) * 1995-11-29 1997-06-17 Agency Of Ind Science & Technol 多孔質セラミックス膜とその製造方法
JP2000327491A (ja) * 1999-05-11 2000-11-28 Hitachi Maxell Ltd 無機化合物薄膜、磁気記録媒体および磁気記録装置
JP2001138300A (ja) * 1999-08-30 2001-05-22 Canon Inc 細孔を有する構造体の製造方法、並びに該製造方法により製造される構造体及び該構造体を用いた構造体デバイス
WO2001071394A1 (fr) * 2000-03-21 2001-09-27 Asahi Glass Company, Limited Article antireflet et procédé de production

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
N.E.SLUCHANKO, ET. AL., PHYSICAL REVIEW B, vol. Vol. 53(17), JPN4007012343, 1996, pages 11304 - 11306, ISSN: 0000867052 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005068558A (ja) * 2003-08-07 2005-03-17 Canon Inc ナノ構造体及びその製造方法
US7524370B1 (en) 2004-11-26 2009-04-28 Fujikura Ltd. Nanostructure and manufacturing method for same
US8163084B2 (en) 2004-11-26 2012-04-24 Fujikura Ltd. Nanostructure and manufacturing method for same
JP2006297580A (ja) * 2005-03-25 2006-11-02 Canon Inc 構造体、その製造方法、及び該構造体を用いたデバイス
KR101410826B1 (ko) * 2012-07-03 2014-06-23 한국전기연구원 나노구조와 미세구조가 혼재하는 초발수 표면

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