JP2003266005A - Method and apparatus for applying paste - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems that conventional paste application methods carried out by determining a distance to a substrate cause up and down vibration in the corner parts of a paste pattern and that the paste application can not follow the vibration depending on the application speed to decrease the application precision of the paste. <P>SOLUTION: Trial application movement along a paste pattern to be formed by coating is previously carried out, a vibration mode exceeding an allowable value of the distance alteration to a substrate and the occurrence position (section) are recorded, and in a section where no vibration occurs, the distance between a nozzle and the substrate is controlled based on the determination results of a distance meter, and in the section where the vibration exceeding the allowable value, the distance between the nozzle and the substrate is controlled based on the pattern in the reverse phase of the recorded vibration mode. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste applicator for applying a paste onto a substrate, and more particularly to a paste applicator with an improved coating speed and a coating method.

[0002]

2. Description of the Related Art As a conventional paste applicator, Japanese Patent No. 2
As described in Japanese Patent No. 740588, while ejecting the paste filled in the paste storage cylinder from the nozzle onto the substrate, while controlling the distance between the nozzle and the substrate to be kept constant while controlling the gap between the substrate and the nozzle, The relative movement speed, that is, the speed at which the paste pattern is applied (hereinafter referred to as the application speed) is increased.

[0003]

By the way, in the paste applicator, if the coating speed is increased, there is no problem in the straight part of the paste pattern. However, in the curved part with a small radius of curvature, when the coating direction changes at a right angle, that is,
For example, from the X-axis direction to the Y-axis direction or from the Y-axis direction to X
When the coating direction changes in the axial direction, vibration occurs in the moving part. For example, when the moving part is the nozzle and the fixed part is the substrate suction plate on which the substrate is placed (that is, when the nozzle is moving with respect to the substrate), when the moving direction of the nozzle changes, the nozzle moves The vertical (Z-axis) direction and the horizontal (X, Y-axis) direction vibration are generated, and the vertical direction vibration is particularly large. Even when the fixed part is the nozzle and the moving part is the substrate suction plate (that is, the substrate is moving), when the moving direction of the substrate suction plate changes, the substrate suction plate, and thus the The same vibration is generated on the substrate placed and fixed on the substrate, and the vibration in the vertical direction is particularly large.

Such vibrations are large at the peripheral portion of the substrate, especially at the corners. For this reason, the distance between the nozzle and the substrate fluctuates, and the coating accuracy decreases.

That is, since the relative positional distance between the nozzle and the substrate fluctuates in a short time, the amount of paste applied per unit time changes, and there is a problem that a paste pattern having a desired shape cannot be formed. Moreover, the higher the coating speed, the greater the variation in the relative position between the nozzle and the substrate. Therefore, it is impossible to increase the coating speed, and it is not possible to improve the productivity.

Particularly when the Z-axis height is controlled so that the relative positional distance between the nozzle and the substrate is constant as in the prior art, the vibration is tracked at a level that does not impair the coating accuracy, and It is difficult to maintain the distance from the substrate.

The object of the present invention is to keep the distance between the nozzle and the substrate constant by following the generated vibration even when the coating is performed at a high coating speed or the coating pattern changes at a small rate. An object of the present invention is to provide a paste applying machine and a paste applying method.

[0008]

In order to achieve the above object, the paste applying method according to the present invention performs a simulated applying operation without applying a paste along a paste pattern to be applied in advance, and at that time, a rangefinder is used. Measure the generated vibration,
Of the measured vibration, record the vibration mode and vibration generation position that exceed the allowable value, and when actually applying the paste, in the section where no vibration has occurred in the paste pattern, based on the measurement result of the rangefinder. The control is performed in the controlled measurement control mode, and in the section where the vibration exceeding the allowable value occurs, the control is performed in the vibration follow-up mode in which the control is performed in the opposite phase to the recorded vibration mode.

The paste applicator according to the present invention has a measurement control mode in which the distance between the substrate and the nozzle is kept constant when the paste is applied, so that the paste is applied in accordance with the measurement result by the distance meter, and the vibration exceeds the allowable value. It is equipped with two control modes, namely, a vibration mode prerecorded in a memory and a vibration follow-up mode in which it is controlled in the opposite phase mode in the vibration section where the control mode is switched according to the paste application position. It was configured to do.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a perspective view of an embodiment of the paste applicator of the present invention. In the figure, 1 is a mount, 2
a, 2b are substrate transfer conveyors, 3 is a support base, 4 is a substrate suction plate, 5 is a θ-axis movement table, 6a and 6b are X-axis movement tables, 7 is a Y-axis movement table, and 8a and 8b are Y-axis movement tables. Driving servo motor for moving the X axis direction, 9 is a Z axis moving table, 10 is a driving servo motor for moving the Z axis table in the Y axis direction, 11 is a ball screw, and 12 is a Z axis table. Servo motor for moving the support plate provided in the Z-axis direction (up and down), 13 is a paste storage cylinder (syringe), 14 is a distance meter, 15 is a support plate, 16a and 16b are image recognition cameras, and 17 is control Department,
Reference numeral 18 is a monitor, 19 is a keyboard, 20 is a personal computer main body equipped with an external storage device, and 21 is a cable.

In FIG. 1, on the gantry 1, there are provided two substrate conveyors 2a and 2b having a conveyor function for horizontally conveying the substrate in the X-axis direction (from the back to the front in the figure). . The board transfer conveyors 2a and 2b are entirely Z-shaped.
It also has an elevating function that allows it to elevate in the axial direction. In addition, a support base 3 is provided on the pedestal 1 at a position sandwiched by the substrate transfer conveyors 2a and 2b. A substrate suction plate 4 is placed on the support base 3 via a θ-axis moving table 5. The θ-axis moving table 5 can rotate the substrate suction plate 4 in the θ direction around the Z-axis by a servo motor 24 not shown in the figure.

Further, on the gantry 1, X-axis moving tables 6a and 6b are provided outside the substrate transfer conveyors 2a and 2b and parallel to the X-axis. A Y-axis moving table 7 is provided so as to extend between the X-axis moving tables 6a and 6b. The Y-axis moving table 7 includes servo motors 8a and 8b provided on the X-axis moving tables 6a and 6b.
It is moved horizontally in the X-axis direction by forward rotation and reverse rotation (forward / reverse rotation). On the Y-axis moving table 7, a Z-axis moving table 9 that moves in the Y-axis direction by the forward and reverse rotation of the ball screw 11 driven by the servo motor 10 is provided.
The Z-axis moving table 9 is provided with a support plate 15 that fixedly supports the paste storage cylinder 13 and the distance meter 14, and the servo motor 12 provided on the Z-axis moving table 9 causes the support plate 15 to move. 9 is moved along a linear guide (not shown) extending in the Z-axis direction. The paste container 13 is detachably attached to the support plate 15. In addition, image recognition cameras 16a and 16b are provided on the gantry 1 so as to face upward so as to align a substrate (not shown).

Further, inside the mount 1, a servo motor 8 is provided.
Control unit 17 for controlling a, 8b, 10, 12, 24, etc.
Is provided. The control unit 17 is also connected to a monitor 18, a keyboard 19, and a personal computer body 20 via a cable 21. Data for various processes in the control unit 17 is input from the keyboard 19,
Images captured by the image recognition cameras 16a and 16b and the control unit 1
The processing status of No. 7 is displayed on the monitor 18.

Data input from the keyboard 19 is stored in an external storage medium such as a floppy disk by a storage device provided in the personal computer body 20.

FIG. 2 is an enlarged perspective view showing a portion of the paste storage cylinder 13 and the distance meter 14 shown in FIG. The opening of the nozzle 13a extended from the paste storage cylinder 13 is provided to face the substrate 22, and the paste pattern 23 is drawn on the substrate by pressing the paste storage cylinder. In this figure, parts corresponding to those in FIG. 1 are designated by the same reference numerals.

In the figure, the range finder 14 has a triangular notch at the lower end, and a light emitting element and a plurality of light receiving elements are provided at the notch. The nozzle 13a is a rangefinder 1
It is located at the bottom of the notch 4. Rangefinder 14
Is the substrate 22 made of glass from the tip of the nozzle 13a.
The distance to the surface (top surface) of is measured by non-contact triangulation. That is, a light emitting element is provided on one side of the triangular cutout, and the laser beam L emitted from this light emitting element is provided.
Is reflected at the measurement point S on the substrate 22 and is received by any one of the plurality of light receiving elements provided on the other slope of the cut portion. Therefore, the laser light L is not blocked by the paste storage cylinder 13 or the nozzle 13a.

Further, the measurement point S of the laser light L on the substrate 22 and the position directly below the nozzle 13a are deviated by a slight distance ΔX, ΔY on the substrate 22. Between the positions deviated by the slight distances ΔX and ΔY, the undulation (unevenness) of the surface of the substrate 22 is generated.
Since there is no difference between the measurement results of the distance meter 14 and the nozzle 13a
There is almost no difference between the distance from the tip of the substrate to the surface of the substrate 22. Therefore, by controlling the servomotor 12 based on the measurement result of the rangefinder 14,
The distance from the tip of the nozzle 13a to the surface of the substrate 22 can be kept constant in accordance with the undulation of the surface of the substrate 2, and the width and thickness of the paste pattern 23 applied on the substrate 22 become uniform. .

FIG. 3 is a block diagram showing the configuration of the control unit 17 shown in FIG. 1, the control of the air pressure of the paste storage cylinder 13, and the control of the substrate 22.

In the figure, the control unit 17 includes a microcomputer 17a, a motor controller 17b, an image processing device 17i, and an external interface 17h connected to a data communication bus 17g.
The driver of each axis is connected to. Here, each axis dry means X1 and X2 axis drivers 17c1 and 17c2.
And a Y-axis driver 17d, a θ-axis driver 17e, and a Z-axis driver 17f. These axis drivers are respectively provided with drive motors 8a, 8b, 10, 24, 12 and encoders 25, 26, 27, 28, 2 provided on the respective motors.
9 is connected. Image recognition cameras 16a and 16b and a monitor 18 are connected to the image processing device 17i. Further, the external interface 17h is connected to the keyboard 19, the personal computer main body 20, the range finder 14, and the positive pressure regulator 30a, the negative pressure regulator 31a, and the valve unit that constitute the pneumatic control system.

The control unit 17 further includes a drive control system for the substrate transfer conveyors 2a and 2b, but the illustration thereof is omitted here.

Further, although not shown, the microcomputer 17a includes a main arithmetic unit, a ROM storing a processing program for performing paste painting described later, a processing result in the main arithmetic unit, an external interface 17h, and a motor controller. R that stores the input data from 17b
It has an input / output unit for exchanging data with the AM, the external interface 17h, and the motor controller 17b. Each servo motor 8a, 8b, 10, 12, 24
Are provided with encoders 25 to 29 that detect the amount of rotation, and the detection results are sent to the motor controller 17b via the X, Y, Z, and θ axis drivers 17c1 to 17f.
Return to to control the position.

The servomotors 8a, 8b and 10 are preliminarily input from the keyboard 19 and the microcomputer 17a.
The positive and negative rotations based on the data stored in the RAM of the nozzles 13a (see FIG. 1) are applied to the substrate 22 vacuum-sucked on the substrate suction plate 4 (FIG. 1) by the negative pressure distributed from the negative pressure source 131. 2) moves an arbitrary distance in the X and Y axis directions via the Z axis moving table 9 (FIG. 1). During the movement, the microcomputer 17a moves the valve unit 32
By controlling the above, a slight air pressure is applied from the positive pressure source 30 to the paste storage cylinder 13 via the positive pressure regulator 30a and the valve unit 32, and a desired amount of paste is discharged from the discharge port at the tip of the nozzle 13a. Is ejected and a paste pattern is drawn on the substrate 22. While the Z-axis moving table 9 is moving horizontally in the X and Y directions, the rangefinder 1
4 measures the distance between the nozzle 13a and the substrate 22, and the servo motor 12 is used so that this distance is always kept constant.
Are controlled by the Z-axis driver 17f.

Further, in the standby state where the paste is not applied, the microcomputer 17a operates the valve unit 3
By controlling 2, the negative pressure source 31 communicates with the paste storage cylinder 13 via the negative pressure regulator 31a and the valve unit 32, and the paste dripping from the discharge port of the nozzle 13a is pulled back into the paste storage cylinder 13. As a result, it is possible to prevent the liquid from dripping from the discharge port. An image recognition camera (not shown) monitors the discharge port of the nozzle 13a, and only when liquid dripping occurs,
The negative pressure source 31 may be communicated with the paste storage cylinder 13.

FIG. 4 is a flowchart showing a series of operations of the embodiment shown in FIG.

In the figure, first, when the power supply of the paste applicator of this embodiment is turned on (step 100),
The initial setting is executed (step 200). In this initial setting process, in FIG.
By driving b and 10, the Z-axis movement table 9 is moved in the X and Y directions to be positioned at a predetermined reference position,
The position at which the paste discharge port of the nozzle 13a (FIG. 2) starts discharging the paste (that is, the paste application start point)
Is set to a predetermined origin position so as to be positioned at.
Further, data for each of one or more paste patterns (hereinafter, referred to as paste pattern data) to be applied to a substrate (hereinafter, referred to as actual substrate) which is a target for drawing a paste pattern
Position data of the actual substrate, the relative speed between the actual substrate and the nozzle when the paste is actually applied to the actual substrate (hereinafter referred to as the coating speed), and the height from the substrate surface to the nozzle discharge port (hereinafter , Coating height) and pressure applied to the paste storage cylinder 13 (hereinafter referred to as coating pressure) that determines the amount of paste discharged from the nozzles, position data indicating the paste discharge end position, and coating. Initialize the measurement position data of the paste pattern.

Input of such data is performed from the keyboard 19 (FIG. 1), and the input data is stored in the RAM built in the microcomputer 17a (FIG. 3).

This initialization processing step (step 200)
When the process is completed, next, in FIG. 1, a dummy substrate (not shown) used for determining whether or not the paste pattern having a desired shape can be accurately applied is placed on the substrate suction plate 4 and suction-held. (Step 300). In this dummy substrate mounting step, the dummy substrate is transferred to the substrate transfer conveyor 2
It is conveyed to the upper side of the substrate suction plate 4 in the X axis direction by a and 2b. Then, by lowering these substrate transfer conveyors 2a, 2b by an elevating means (not shown),
It is placed on the substrate suction plate 4.

Next, the vibrations that occur when the coating direction changes, such as the corners of the paste pattern during the paste coating operation, are measured. The displacement and phase of the relative distance between the nozzle and the dummy substrate surface due to the generated vibration (amplitude and cycle including direction; these are hereinafter referred to as vibration modes) are used as parameters for determining the amount and direction of subsequent vibration follow-up. In order to do so, the dummy substrate is used to perform a simulated operation (moving the nozzle or the like at the actual application speed along the drawing pattern without applying the paste) (paste simulated application operation), Memorize the measurement results. As described above, the purpose of the paste simulation coating operation is to confirm the vibration generation position of the movable part when applying and drawing the paste pattern on the actual substrate, measure the vibration mode generated at that position, and The following data is obtained for the mode. The above-mentioned coating speed, coating height, and coating pressure set in the above-mentioned initial setting processing step (step 200) are those when the straight line portion of the paste pattern determined by experience or the like is applied.

In this paste simulation application operation, the vibration mode is measured from the change in the distance between the nozzle 13a and the substrate 22 (FIG. 2), and the distance meter 14 is used as a vibration measurement sensor for this purpose. Further, it is clear from experiments by the inventors that the vibration mode has different amplitudes and the like depending on the paste application position, the application direction, the application speed, and the like. Therefore, the paste patterns used for the paste simulation application operation are n pieces (where n is usually 2
The above-mentioned integer) paste patterns, and as described above, the paste pattern data is the keyboard 19
Microcomputer 17a input from (FIG. 1)
In the RAM of FIG. 3 (hereinafter, simply referred to as a memory), for example, 1, 2, ...
It is stored with a number n attached.

FIG. 5 shows an example of paste pattern data described in this embodiment.

The application of the paste pattern shown in FIG.
This means that the route is traced in the order of C → D → E → F, where A is the starting point, B is the first corner, C is the second corner, D is the third corner, and E is the fourth corner. F is called the end point. In this example, one paste pattern per substrate,
That is, an example in which the number of paste patterns n = 1 is shown.

In starting the paste pattern simulated coating operation, first, the range finder 14 used as a vibration measuring sensor is positioned at a predetermined height on the dummy substrate (step 400). Then, from the paste pattern data stored in the memory, the data of the paste pattern used for the simulated coating operation is selected, and the simulated coating operation is executed according to the pattern of that number. Initially, the paste pattern data of number 1 is selected (step 500).

Therefore, first, the microcomputer 17
A (FIG. 3) immediately controls the servomotors 8a, 8b and 10 by using the selected paste pattern data of No. 1. That is, the simulated coating operation is started by moving the nozzle 13a along the paste pattern defined by the paste pattern data of No. 1 at a preset coating speed (step 600). In this case, the paste is not discharged from the nozzle 13a as described above. Further, the servo motor 12 for vertically moving the support plate to which the nozzles and the distance meter 14 are fixed is not controlled, and the initially set state is maintained.

With the start of this simulated coating operation, the rangefinder 1
The change in the distance between the nozzle 13a and the substrate 22 is sequentially measured by the method No. 4. This measurement data is stored in the memory as a vertical distance measurement result in association with the position data represented by the paste pattern data (step 700).

FIG. 6 shows this distance measurement processing step (step 7).
00) is a flowchart showing the details. In the figure, the distance between the nozzle 13a and the substrate 22 is sequentially measured by the distance meter 14 (step 710), the measurement result is used as distance data, and the X and Y coordinates of the nozzle at that time are also measured from the motor controller 17b. The data is read (step 720), and the measurement result is stored as a position data in the memory in association with each other (step 730). The process of measuring / storing such distance data and position data is continued until the paste pattern of No. 1 performing the simulated coating operation is completed (step 740).

This distance measurement processing step (step 700)
When is finished, the range finder 14 is retracted upward (step 800). Then, based on the obtained distance data, a large distance change position outside the allowable range, that is, a paste application position where vibration outside the allowable range on the paste pattern occurs, is searched and determined (step 900).

FIG. 7 is a flow chart showing details of the search processing step (step 900) for a vibration generation pattern outside the permissible range.

In the figure, first, distance data is read and data conversion is performed (step 910).

This data conversion process will be described with reference to FIG. 8. FIG. 8 shows the distance data (waveform 1) obtained by distance measurement. The gentle undulation of this distance data indicates the undulation of the surface of the dummy substrate. Is due to
Since the servomotor 12 is not controlled, the rangefinder 14
Measures the change in the distance between the nozzle 13a and the substrate 22 due to this waviness. Further, the abrupt changes at the points B, C, D, and E of the distance data are due to the vibration of the distance meter 14 (hence, the nozzle 13a), and the application direction of the nozzle 13a, that is, the nozzle Occurs when the direction of movement changes. Note that points A, B, C, D, E, and F are points A to F shown in FIG.

In order to determine whether the vibrating portion shown in FIG. 8 is outside the preset allowable range, the increment / decrement value per unit time of the sampled data is obtained for the entire pattern operation, and the increment / decrement value is calculated. There is a method of determining whether is within the allowable range.

As for the determination method, other than that, during sampling of the distance data, the point immediately before the corner output from the motor controller 17b is incorporated in the sampling data as the corner data, and the change point thereof is searched and extracted. Any method will do as long as it is possible.

Step 920 in FIG. 7 is to determine whether or not there is a portion outside the above-mentioned permissible range in the converted distance data, and if outside the permissible range, the distance data and position data are determined. Is stored in a database (step 930). An example of the database is shown in FIG.
Shown in.

The pattern number column contains the numbers assigned to each of the plurality of paste patterns to be applied. In the point number column, the order of occurrence is entered for the vibration occurrence points determined to be outside the allowable range in step 920. In this example, the pattern number 1 indicates that a vibration occurrence point outside the 4-point allowable range is detected.

Hereinafter, the vibration mode and the point of occurrence will be described. Here, the vibration mode will be described.

The vibration mode is extracted from the distance data before and after the point outside the allowable range in step 920. The actual vibration waveform has a complex vibration waveform due to the correlation between the natural frequency of various machine components and the excitation force, but the intention of the present invention is to have a phase opposite to that of the vibration outside the permissible range. It is to keep the amount within the allowable range by moving the nozzle. Further, it has been clarified by a test that these vibration data can be approximated by a triangular wave as shown in FIG. 10 without the residual vibration continuing largely in a coating apparatus having high mechanical rigidity.

FIG. 10A shows that the vibration is in the direction in which the nozzle and the substrate approach each other, and λ is the magnitude of the vibration.
T indicates the time until the amplitude returns to the original position (+
One-sided amplitude). (B) is the vibration in the direction in which the nozzle and the substrate move away from each other (-one amplitude), (c) is the vibration in which the nozzle moves away from the nozzle and then returns to the original position (both amplitudes of +), and (d) shows the vibration after moving away from the nozzle It represents the return vibration (both negative amplitude). In addition,
Although vibrations such as (e) and (f) can also be confirmed, regarding these, (e) may be regarded as (a) and (f) may be regarded as (b), or approximate patterns may be stored in a database. .
If other characteristic vibration waveforms are detected, those waveforms may be stored in a database. Therefore, in the present embodiment, these representative approximate patterns are registered in the database in advance as a vibration model, and the approximate pattern is determined by a method such as pattern matching with the actually detected vibration waveform.

In the database of vibration mode pattern of FIG. 9, the number of the above-mentioned vibration model to which the actual vibration waveform is approximated is shown, and in the amplitude column and the time column, the actual vibration waveform is shown by the vibration model as shown in FIG. The amplitude λR and the vibration time TR when approximated are entered. Next, in the position data column, the XY coordinates (position data) of the paste pattern when the data outside the allowable range is detected are stored.

By executing these vibration searches to the end point of the pattern, a vibration database for one pattern is created (step 940).

When the simulated coating operation for the paste pattern data of number 1 is completed as described above (step 900), it is next determined whether or not there is an uncoated paste pattern (step 1000). If there is unapplied paste pattern data, the next number (number 2) of paste pattern data is selected, and the above-mentioned simulated application operation from step 400 is repeated. Below, number 3,
The simulated coating operation using the paste pattern data is performed in the order of 4, ..., And the vibration database corresponding to each pattern is created.

When the simulated coating operation is completed for all the paste pattern data up to the last number n (step 1000), the vibration follow-up data at each location on the paste pattern is set for each paste pattern data. become. As a result, the dummy substrate is discharged, assuming that the vibration generated in the nozzle 13a at the time of drawing and applying the paste on the actual substrate can be applied under the condition that the accuracy of the desired applied paste pattern is not affected (step 1100). Then, the production of an actual substrate (paste pattern coating and drawing) described below is performed.

First, the actual substrate is placed on the substrate suction plate 4 (FIG. 1) and held by suction (step 1200). In this substrate placing step, the actual substrates are transported to the upper side of the substrate suction plate 4 in the X-axis direction by the substrate transport conveyors 2a and 2b (FIG. 1), and the substrate transport conveyor 2 is moved by the elevating means (not shown).
The actual substrate is placed on the substrate suction plate 4 by lowering a and 2b.

Next, the substrate preliminary positioning process (step 1)
300). In this process, in FIG. 1, a positioning chuck (not shown) aligns the actual substrate in the X and Y directions. In addition, the positioning mark of the actual substrate placed on the substrate suction board 4 is displayed by the image recognition camera 16
a, 16b, the center of gravity of the positioning mark is obtained by image processing, the inclination of the actual substrate in the θ direction is detected, and the servo motor 24 (FIG. 3) is driven in accordance with this to detect the inclination. Correct tilt.

When the amount of paste remaining in the paste storage cylinder 13 becomes small and the paste may be interrupted during the paste pattern applying operation, the paste storage cylinder 13 is replaced with the nozzle 13a in advance. If the nozzle 13a is replaced, the mounting position may be displaced and the reproducibility may be impaired as compared with the case before the replacement. Therefore, in order to ensure reproducibility, a pesto is applied in a cross shape using a new replaced nozzle 13a to a portion on the actual substrate where the paste is not applied. afterwards,
The barycentric position of the intersection of this cross application pattern is obtained by image processing. Next, the distance between this barycentric position and the barycentric position of the positioning mark on the actual substrate is calculated, and this is calculated as the nozzle 1
3a paste ejection port positional deviation amount dx, dy (FIG. 2)
And stored in the RAM built in the microcomputer 17a. This is the substrate preliminary positioning process (step 1300) for the actual substrate. By using the positional deviation amounts dx and dy of the nozzle 13a, the positional deviation of the nozzle 13a is corrected when the paste pattern is applied and drawn later.

Next, paste pattern application processing is sequentially performed from the paste pattern data of number 1 (step 140).
0) is performed. (FIG. 12) In this process, in order to position the ejection port of the nozzle 13a at the coating start position, the Z-axis moving table 9 (FIG. 1) is moved to perform comparison / adjustment movement of the nozzle position. For this purpose, first, the positional deviation amounts dx and dy of the nozzle 13a obtained in the preceding substrate preliminary positioning processing (step 1300) and stored in the RAM of the microcomputer 17a are calculated as follows. It is determined whether the quantity is within the allowable range ΔX or ΔY. Within the allowable range (that is, ΔX ≧ dx and ΔY ≧ d
If y), leave it as is. Outside the permissible range (ie △
If X <dx or ΔY <dy, the Z-axis moving table 9 is moved based on the positional deviation amounts dx and dy to adjust the paste storage cylinder 13. Thereby, the nozzle 13a
The positional deviation between the paste ejection port and the desired position of the actual substrate is eliminated, and the nozzle 13a is positioned at the desired position in the XY directions (step 1401).

Next, the height of the nozzle 13a is set (step 1402). This set height is set to the set coating height previously input from the keyboard, and the distance from the discharge port of the nozzle 13a to the surface of the actual substrate is the thickness of the paste, that is, this coating height. To do.

After the above processing is completed, the servo motors 8a, 8b, 1 are then driven based on the paste pattern data stored in the RAM of the microcomputer 17a.
0 (FIG. 1) is driven. As a result, the paste discharge port of the nozzle 13a moves in the X and Y directions according to the paste pattern data while facing the actual substrate, and the paste discharge port is slightly moved from the positive pressure source 30 (FIG. 3) to the paste storage cylinder 13. Pneumatic pressure is applied to start discharging the paste from the paste discharge port of the nozzle 13a (step 1430).

At the same time as drawing the paste pattern, the microcomputer 17a inputs the measured data of the distance between the paste discharge port of the nozzle 13a and the surface of the actual substrate from the range finder 14 to make the surface of the actual substrate undulate. By measuring and driving the servo motor 12 according to the measured value, the set height of the nozzle 13a from the surface of the actual substrate is maintained constant, and the paste pattern is applied and drawn (step 1404). ). Note that, here, the movement along the paste pattern while keeping the distance between the substrate and the nozzle constant based on the measurement result using a distance meter is referred to as a measurement control mode.

Next, the microcomputer 17a reads the coating position coordinates from the motor controller 17b (step 1405). The data is compared with the position data, which is measured by using a dummy substrate and which is recorded in the memory and in which vibration exceeds the allowable value, to determine whether the coating position is the vibration position (step 1406).

When it is determined in step 1406 that the vibration is generated, the servo motor 1 of the Z-axis moving table 9 is immediately moved.
2 is switched from the measurement control mode based on the measurement result of the distance meter to the vibration follow-up mode in which the vibration pattern obtained by the simulated application operation is controlled in the vibration pattern of the opposite phase (step 1407).

For example, at point 1 from the database of FIG. 9, since the vibration mode can be approximated by the triangular wave of the pattern (a), data of the moving speed, acceleration and deceleration in the Z axis direction can be obtained from the data of the amplitude λ and the time T. Motor controller 17 to generate a desired movement profile.
The servo motor 12 is controlled by b.

Here, there is a delay time of the motor controller 17b, a delay time of the motor control, and the like, and the movement profile of the nozzle may deviate from the actual vibration waveform. Therefore, it is advisable to make advance / post-adjustment (vibration tracking mode control start to control end position) of the vibration generation position data in the database in consideration of these delay times.

If the vibration follow-up mode is limited to the allowable vibration generation position, there may be residual vibration that does not exceed the allowable range. Therefore, when restarting the nozzle height control, the residual vibration is regarded as the waviness of the substrate and the nozzle height is controlled.
Residual vibration may be amplified. Therefore, it is better not to restart the control in the measurement control mode until the position (XY coordinate position) where the residual vibration is settled (step 1408). In this way, it is advisable to set the control range in the vibration follow-up mode wider than the vibration pattern. When controlling by time, set it longer with consideration of the vibration establishment time.

In this way, although the paste pattern coating / drawing proceeds, the judgment as to whether the paste pattern coating / drawing operation is to be continued or finished is made by judging whether or not the coating point is the end of the paste pattern. To be done. If it is not the end, the process returns to the measuring process of the waviness of the surface of the actual substrate, and the above steps are repeated until the end of the application of the paste pattern is reached (step 140).
9).

The paste pattern application operation is performed for all of the set n paste pattern data, and when the end of the paste pattern according to the paste pattern data of the last number n is reached, the servo motor 1
2 is driven to raise the nozzle 13a, and this paste pattern application process is completed (step 1410).

Next, the substrate discharging process (step 1500)
Proceed to. In this processing step, in FIG. 1, the suction of the actual substrate onto the substrate suction plate 4 is released, and the substrate transfer conveyor 2
The substrates a and 2b are raised and the actual substrate 22 is placed thereon, and in that state, the substrates are conveyed out of the apparatus by the substrate conveyors 2a and 2b.

Then, it is judged whether or not all the above steps are completed (step 1600), and when a paste pattern is applied to a plurality of real substrates using the same paste pattern data, another real substrate is applied. The substrate mounting process (step 1200) is repeated. Then, when this series of processing is completed for all the actual substrates, all the operations are completed (step 1700).

In the above embodiment, the nozzle is the movable part and the substrate is the fixed part. However, the present invention is not limited to this, and the nozzle may be the fixed part and the substrate may be the moving part. .

As described above, in the present invention, in order to minimize the influence of the vibration in the Z-axis direction generated during the coating operation,
Perform a simulated coating operation for each coating pattern using a dummy substrate, and measure the position and magnitude of vibration that exceeds the reference value.
When you memorize and draw the paste pattern on the actual board,
By stopping the control by the signal from the distance meter at the stored vibration generation position and performing the operation in the opposite phase to the stored pattern, it is possible to draw a highly accurate paste pattern that is not affected by the vibration.

As described above, in this embodiment, the dummy coating operation is performed using the dummy substrate, and in order to determine the coating condition in the paste pattern data to be coated in advance, the unnecessary coating operation is performed on the actual substrate. Therefore, the yield can be improved.

In the paste drawing of the paste pattern on the actual substrate, since the distance between the nozzle and the substrate can be maintained without being affected by the vibration of the movable portion (nozzle portion or the actual substrate), the coating accuracy can be improved. Therefore, the amount of paste applied per unit time can be kept constant, and the paste pattern having a desired shape can be applied and formed with high accuracy.

Further, even in the case of a coating pattern in which it is impossible to increase the coating speed due to the influence of vibration, it is possible to increase the coating speed by using this vibration follow-up control. Therefore, the application time of the paste pattern can be shortened, and furthermore, the paste pattern can be applied and drawn well, and the productivity can be improved.

In the above description, the dummy coating operation is performed using the dummy substrate to measure the vibration for each paste pattern. However, the dummy coating operation is performed using the actual substrate instead of the dummy substrate. It goes without saying that it is okay. If a real substrate is used, a dummy substrate may be used if it is predicted that a large vibration may occur because the substrate may be damaged or the nozzles may come into contact with the substrate and cause damage. Better

[0073]

As described above, according to the present invention,
By quickly following the vibration of the movable part using the vibration follow-up data prepared in advance, it is possible to maintain the coating accuracy even when vibration occurs, and to obtain a paste pattern with a desired shape It enables coating drawing and greatly improves productivity.

[Brief description of drawings]

FIG. 1 is a perspective view of an embodiment of a paste applicator of the present invention.

FIG. 2 is an enlarged view of a nozzle portion of FIG.

FIG. 3 is a block diagram of a control system of the present invention.

FIG. 4 is a flowchart showing an example of the operation of the paste coating machine of the present invention.

FIG. 5 is a diagram showing an example of a paste pattern.

FIG. 6 is a flowchart of an example of measuring the distance between the substrate and the nozzle.

FIG. 7 is an operation flowchart of vibration determination using a dummy substrate.

FIG. 8 is a diagram showing a measurement result of a distance meter in a simulated coating operation.

FIG. 9 is a diagram showing a recording example of recording in a vibration mode memory.

FIG. 10 is a diagram showing an example of an approximate vibration pattern.

FIG. 11 is a diagram showing a result of measurement by a distance meter when vibration occurs and an approximate vibration model.

FIG. 12 is a flowchart of paste pattern application processing.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Stand, 2a, 2b ... Substrate transport conveyor, 3 ... Support stand, 4 ... Substrate suction plate, 5 ... θ axis moving table, 6a, 6
b ... X-axis movement table, 7 ... Y-axis movement table, 9 ... Z
Axial movement table, 15 ... Support plate, 17 ... Control unit, 12 ...
Z-axis drive servomotor, 13a ... Nozzle, 14 ... Distance meter.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Junichi Matsui             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Yuuki Yamada             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Yoshinori Tokuyasu             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries F-term (reference) 4D075 CA47 DA06 DC21 EA14                 4F041 AA02 AB01 BA05 BA22 BA34                       BA38                 4F042 AA02 AA06 AA07 AB00 BA08                       CB24 DD44 DF15 DF34

Claims (2)

[Claims] 1. A substrate is placed on a table so as to face a discharge port of the nozzle, and while measuring the distance between the nozzle and the substrate in a direction perpendicular to the main surface of the substrate, By controlling at a constant interval, while changing the relative positional relationship between the substrate and the nozzle on the main surface of the substrate while discharging the paste from the discharge port onto the substrate,
In a paste applying method of drawing a paste pattern on the surface of the substrate, the paste is drawn in a state in which control of a drive system for controlling a gap between the nozzle and the substrate is stopped before actually applying the paste on the substrate. Corresponding to the paste pattern, the nozzle is relatively moved in the direction of the main surface of the substrate, the vibration in the direction between the nozzle and the substrate at that time is measured, and the position data and vibration in which vibration of a magnitude greater than the allowable value occurs When the mode is recorded in the memory and the paste pattern is actually drawn, control is performed in the measurement control mode in which the distance between the substrate and the nozzle is measured and controlled when the vibration that exceeds the allowable value does not occur. The paste application method characterized in that the section in which the above-mentioned vibration is generated is controlled in a vibration follow-up mode which is controlled in a phase opposite to the recorded vibration mode. 2. A table on which a substrate on which a paste pattern is drawn is placed, a nozzle provided with an ejection port facing the substrate, a distance meter for measuring a distance between the ejection port and the substrate, and the nozzle. And a Z-axis drive mechanism that moves a support plate provided with a distance meter in a direction perpendicular to the main surface of the substrate, and a drive mechanism that changes a relative positional relationship between the substrate and the nozzle on the main surface of the substrate. In a paste applicator provided, set a plurality of paste patterns to be applied to the substrate,
After the Z-axis drive mechanism is initialized, the relative position of the nozzle on the principal surface of the substrate is changed without operating the Z-axis drive mechanism without discharging the paste along the set paste pattern, which is generated in the rangefinder. Measure the vibration, record the vibration mode and position of the vibration exceeding the allowable value from the measurement result, and control the nozzle height based on the measurement result of the distance meter when drawing with paste according to the paste pattern on the substrate A paste coating machine having a control system having a function of switching between a measurement control mode for controlling the vibration and a vibration following mode for controlling the vibration at the recorded vibration generating position in an opposite phase to the vibration mode.