JP2003225606A - Paste applicator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-sized paste applicator by which the extension of a coating time is suppressed and an expensive clean room is effectively utilized. <P>SOLUTION: The paste applicator is constituted so that a substrate holding mechanism for holding a substrate on which a paste pattern is to be formed is held to be moved only in one direction and 2 sets of head supporting mechanisms each provided with a coating head for applying the paste on the substrate and structured to move the coating head individually in the right angle direction to the movement direction of the substrate are provided. One of the head supporting mechanisms is fixed to a frame and another one is movable in the movement direction of substrate and is structured so as not to be moved in the movement direction of the substrate while the coating head forms the paste pattern on the substrate. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improving the processing speed of a paste applicator for applying and drawing a paste pattern in a straight line, a curved line, or a dot pattern on the surface of a large-sized substrate.

[0002]

2. Description of the Related Art As a conventional paste applicator, as disclosed in Japanese Patent Application Laid-Open No. 11-262712, a glass substrate is placed on a table movable in the XYθ directions, and the paste is applied to the main surface of the glass substrate. The paste filled in the paste storage cylinder while ejecting the paste filled in the paste container onto the substrate while changing the relative positional relationship between the substrate and the nozzle. It is configured to apply a coating.

[0003]

In the above-mentioned conventional paste applicator, the glass substrate to be applied has a small size and is provided with only one application nozzle. By the way, LC
In the manufacturing process of D, the glass substrate to which the paste is applied in recent years is in the direction of drawing a plurality of pesto patterns on one glass substrate using a large one, and the drive control for that is complicated and the application time is also long. It tends to increase. Furthermore, since the XYθ table and the device are about four times the substrate area, it is difficult to downsize the device when applying it to a large substrate.

As described above, an object of the present invention is to solve such problems, to suppress an increase in coating time, and to provide a small paste coating machine which can effectively utilize an expensive clean room.

[0005]

In order to achieve the above object, the present invention provides a substrate holding mechanism for holding a substrate on which a paste pattern is formed, which is movably held only in one direction, so that the paste is placed on the substrate. Two head support mechanisms are provided, each having a coating head for coating and capable of individually moving the coating head in a direction perpendicular to the moving direction of the substrate.
One head support mechanism is fixed to the pedestal, and the other head support mechanism is movable in the moving direction of the substrate. The other head supporting mechanism is configured so as not to move in the substrate moving direction while the paste pattern is being drawn on the substrate.

Further, in order to correct the inclination of the substrate in the plane direction, a drive mechanism is provided for each coating head so as to be movable in the moving direction of the substrate.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is a perspective view showing an embodiment of a paste applicator according to the present invention. FIG. 2 is a diagram showing a detailed configuration of the coating head unit. A feature of the present invention is that, as shown in FIG. 1, one X and Y axis moving mechanism provided with one coating head is conventionally provided, and two X axis moving mechanisms 2a and 2b are provided on a gantry 1. A plurality of coating head units 50 are provided in each of the moving mechanisms. Further, the X-axis moving mechanism 2a on one side is fixed to a fixed base, and the X-axis moving mechanism 2b on the other side is configured to be movable in the Y-axis direction.

First, as shown in FIG. 2, the coating head portion 5
0 is configured as follows. First, the paste application mechanism section includes a paste storage cylinder (syringe) 13, a nozzle support tool 14, and a nozzle 20 (see FIG. 3). The paste application mechanism portion (the portion of the paste storage cylinder 13) is detachably provided on the fixed base 91, and the fixed base 91 is fixed to the Z-axis moving table 9. The Z-axis moving table 9 is moved in the Z-axis direction by the servo motor 10 which is a drive source. Furthermore, the Z-axis moving table 9
Is fixed to the Z-axis moving table support bracket 8 via a supporting member 81 and attached to the X-axis moving mechanism 2a.

Further, on the fixed base 91, a distance meter 16 for measuring the distance between the nozzle tip (ejection port) and the substrate, a relative position of the nozzle with respect to the substrate, and for recognizing the formed paste pattern. A lens barrel having an illuminatable light source and an image recognition camera 15 (hereinafter referred to as a camera) are attached.

The coating head or coating head section 50 is
As described above, from the paste storage cylinder 13 to the support bracket 8
Part of. In this embodiment, six sets of the coating head units 50 are provided, but they are represented by adding subscripts a to f respectively.

The X-axis moving mechanism 2a includes Z-axis moving tables 9a-9 for each of the plurality of coating heads 50a-50c.
c is provided and also has a function of adjusting the interval between them.

As shown in FIG. 1, fixed bases 3c and 3d are mounted on a base 1, and a plurality of coating heads 5 are mounted on the bases 3c and 3d in the X-axis direction.
There is provided a first coating head supporting mechanism including a first X-axis moving mechanism 2a movably attached to 0a to 50c. Furthermore, Y-axis moving mechanisms 3a and 3b for moving in the Y-axis direction on the same gantry 1, and linear motors 4a and 4b which are drive mechanisms for moving in the Y-axis direction on the Y-axis moving mechanisms 3a and 3b. And a second X-axis moving mechanism 2b in which a plurality of coating heads are attached so as to be movable in the X-axis direction. Y-axis moving mechanism 3
Linear motion guides and magnets for linear motors are provided on a and 3b. First and second X-axis moving mechanisms 2a, 2
The coating heads 50a to 50f provided in b are arranged along the linear guides provided in the first and second X-axis moving mechanisms 2a and 2b so that the spacing between the coating heads in the X-axis direction can be adjusted. The linear motor 8-m provided on each support bracket 8 is driven to move. Linear motors 4a, 4 on the Y-axis moving mechanisms 3a, 3b
By driving b, the second X-axis moving mechanism 2b is moved to adjust the distance in the Y-axis direction from the first X-axis moving mechanism 2a.

Further, a Y-axis moving table 6 for moving the substrate holding mechanism 5 for holding the substrate 7 to which the paste is applied in the Y-axis direction is provided on the gantry 1. In this embodiment, the substrate is loaded from the Y-axis direction, which is the moving direction of the Y-axis moving table 6. Further, the substrate holding mechanism 6 is configured so that it can move in the Y-axis direction but cannot move in the X-direction and the θ-direction as described above.

A sub-control unit 17b connected to the main control unit 17a by a cable 17e, a hard disk 17c and a floppy disk 17d, which are external storage devices, are provided at the bottom of the gantry 1.
Is provided. Further, a monitor 17f and a keyboard 17g are provided outside the device or on the outer periphery of the device. Data for various processes performed by the main controller 17a is input from the keyboard 17g. Images captured by the cameras 15a to 15f and the processing status of the main control unit 17a are displayed on the monitor 17f. Data input from the keyboard 17g is stored and stored in a storage medium such as a hard disk 17c or a floppy disk 17d, which is an external storage device.

As described above, since a plurality of coating heads are provided and the coating heads are operated in cooperation with each other, a plurality of paste patterns can be simultaneously formed on a large substrate, so that the manufacturing time can be shortened. It will be possible. In addition, by fixing one of the X-axis moving mechanisms to the fixed base and the other of the X-axis moving mechanisms so as to be movable in the Y-axis direction, the position adjustment of the coating head in the Y-axis direction is simplified and the drive source is reduced. By doing so, the device configuration is simplified.

Next, FIG. 7 shows another embodiment of the coating head portion 50 of the present invention. This embodiment differs from FIG. 2 in that a Y-axis correction mechanism of a coating head unit for moving the paste coating mechanism unit in the Y-axis direction is provided between the support bracket 8 and the Z-axis table 9. is there . The Y-axis correction mechanism of the coating head unit is attached to the movable base 30-B2 in which the Z-axis table 9 is formed in a Z shape. A fixed base 30-B1 formed in a Z shape so as to face the movable base 30-B2 is attached to the support bracket 8. The movable base 30-B2 is a linear motion guide 30-G.
1, 30-G2 to move on the fixed base 30-B1.

A Y-axis adjusting motor 30-m is mounted on a motor installation table provided on the fixed base 30-B1. The rotating shaft of the Y-axis adjusting motor 30-m is connected to the shaft 30-S by a coupling 30-Cp. The end of the shaft 30-S is fixed to the fixed base 30.
-Fixed to a bearing 30-R provided below B1. A cam portion 30- provided in the middle of the shaft 30-S
It is provided so that C contacts the movable base 30-B2. Therefore, by rotating the Y-axis adjusting motor 30-m, the cam portion 30-C rotates and the movable base 30-B2 moves in the Y-axis direction by the amount of eccentricity of the cam portion.

As described above, the position of each coating head portion can be finely adjusted in the Y-axis direction, so that the deviation amount in the rotation direction of the substrate can be absorbed by the adjustment of the head portion.

FIG. 3 shows an enlarged view of the coating state. FIG. 3 is an enlarged perspective view showing the paste accommodating cylinder 13 and the nozzle 20 and the distance meter 16 in FIG. 1, and the same reference numerals are given to the portions corresponding to FIG.

The distance meter 16 measures the distance from the tip of the nozzle 20 to the surface (upper surface) of the substrate 7 made of glass by non-contact triangulation. That is, the range finder 16 is provided with a light emitting element in the housing on one side and a light receiving element in the housing on the other side, which is cut out in a substantially triangular shape. The laser light L emitted from this light emitting element is reflected at the measurement point S on the substrate 7 and is received by the light receiving element.

Further, the measurement point S of the laser beam on the substrate 7 and the position directly below the nozzle 20 are displaced by a slight distance on the substrate 7. However, since there is no difference in the unevenness of the surface of the substrate 7 with this slight distance deviation, the distance between the measurement result of the distance meter 16 and the distance from the tip of the nozzle 20 to the surface (upper surface) of the substrate 7 is increased. There is almost no difference.

Therefore, by controlling based on the measurement result of the distance meter 16, the distance from the tip of the nozzle 20 to the surface (upper surface) of the substrate 7 according to the unevenness (waviness) of the surface of the substrate 7 ( Interval) can be kept constant.

In this way, the distance (interval) from the tip of the nozzle 20 to the surface (upper surface) of the substrate 7 is kept constant, and the amount of paste discharged from the nozzle 20 per unit time is constant. By being maintained, the width and thickness of the paste pattern applied and drawn on the substrate 7 become uniform.

Next, the configuration of the control system of this apparatus is shown in FIGS.
Will be explained. Fig. 4 shows a block diagram of the overall configuration of the control system of this device. FIG. 5 shows a block diagram of the sub-control unit of this device. The coating head unit 50 will be described in the second embodiment described above. That is, in the first embodiment, the motor of the Y-axis correction mechanism of the coating head unit shown in FIG. 4 is not provided.

In FIG. 4, the main controller 17a and the sub controller 17b are connected by a signal line 17e.
The main controller 17a is a microcomputer 17a-a.
The motor controller 17a-b, the external interface 17a-d, and the image processing unit 17a-e are connected to the data bus 17a-c. In addition, the motor controllers 17a-b have respective motor drivers 17a-f ...
j is connected.

The motor driver 17a-f has a first X
A linear motor 8a provided for each of the support brackets 8a to 8c of each Z-axis moving table provided in the axis moving mechanism.
-M to 8c-m are connected to linear motors 8d-m to 8f-m provided for each of the support brackets 8d to 8f provided in the second X-axis moving mechanism. Further, the motor driver 17a-g includes a 3a of the Y-axis moving mechanism.
The linear motor 4a provided above is connected, and the linear motor 4b provided above 3b of the Y-axis moving mechanism is connected to the motor drivers 17a-h. In addition, the motor driver 17a-i includes a servo motor 6 provided on a Y-axis moving table 6 that moves the substrate holding mechanism 5 in the Y-axis direction.
m is connected. Further, the motor driver 17a-
Motors 30a-m to 30f of the Y-axis correction mechanism provided in the coating head portion shown in FIG. 7 are connected to j.

The image processing units 17a-e include fixed bases 91.
The image recognition cameras 15a to 15f provided in the are connected. Further, the external interfaces 17a-d include a hard disk 17c, a floppy disk controller 17d, a monitor 17f, a keyboard 17g, and negative pressure regulators 22a to 22a, in addition to the sub controller 17b described above.
22f, positive pressure regulators 23a to 23f, and valve units 24a to 24f are connected.

The piping for controlling the air pressure is the negative pressure source 22.
v and the positive pressure source 23P to the negative pressure regulators 22a to 22
f, the positive pressure regulators 23a to 23f, and the valve units 24a to 24f, the paste storage cylinders 13a to 13f.
It is connected to 13f.

Further, although not shown, the microcomputer 17a-a has a main arithmetic unit, a ROM storing a processing program for performing coating drawing described later, processing results in the main arithmetic unit, and external interfaces 17a-d. And a RAM for storing input data from the motor controllers 17a-b, an input / output unit for exchanging data with the external interfaces 17a-d and the motor controllers 17a-b.

Each motor 8a-m to 8f-m, 4a, 4
Each of b and 6m has a built-in linear scale for detecting a position or an encoder for detecting a rotation amount, and the detection result is detected by the X-axis moving mechanism 2a or the Y-axis linear motors 4a, 4m.
b, and the substrate holding mechanism 5 is returned to the respective axis drivers 17a-f to 17a-j such as the Y-axis table 6 for moving in the Y-axis direction to perform position control.

FIG. 5 shows the configuration of the sub control unit. In the figure, the sub-control unit 17b is a microcomputer 17b.
-A, the motor controller 17b-b, and the external interfaces 17b-d are connected to the data buses 17b-c, respectively. In addition, the motor controller 17b-
The Z-axis driver 17b-e is connected to b. The sub-control unit 17b is connected with the rangefinders 16a to 16f and the main control unit 17a provided in each coating head unit to the external interfaces 17b-d, and the driving motors 10a to 10f for the Z-axis tables 9a to 9f are connected to the sub-control units 17b to d. Z-axis driver 17b-e
It is connected to the .

Although not shown in the microcomputer 17b-a, a main arithmetic unit and a ROM storing a processing program for controlling the height of the nozzles 20a-n to 20f-n at the time of coating and drawing, which will be described later, are mainly provided. A RAM that stores the processing result in the arithmetic unit and the input data from the external interface 17b-d and the motor controller 17b-b, the external interface 17b-d, and the motor controller 1
It has an input / output unit for exchanging data with 7b-b. The Z-axis motors 10a to 10f have built-in encoders that detect the amount of rotation, and the detection results are returned to the Z-axis drivers 17b-e to perform position control.

The motors 8a-m to 8f-m, 4a, 4 are controlled by the main control unit 17a and the sub-control unit 17b in cooperation with each other.
b, 6m, 10a to 10f are held and held by the substrate holding mechanism 5 (FIG. 1) by moving and rotating based on the data input from the keyboard 17g and stored in the RAM of the microcomputer 17a-a. Board 7
The nozzles 20a-n (FIG. 2) to 20f-n supported by the Z-axis moving tables 9a to 9f that move an arbitrary distance in the axial direction and vertically move the nozzle portion are connected to the X of the coating head. The moving mechanisms 2a and 2b move an arbitrary distance in the X-axis direction, and the paste storage cylinders 20a to 20 are moved during the movement.
The air pressure set to f is continuously applied to the nozzle 20a-
The paste is discharged from the discharge ports at the tip of n to 20f-n, and a desired paste pattern is drawn on the substrate 7.

While the nozzles 20a-n to 20f-n are moving horizontally in the X-axis direction, the rangefinders 16a to 16f move to the nozzle 20a-.
The nozzles 20a-n-20 are arranged so that the distance between n-20f-n and the substrate 7 is measured and the distance is constantly maintained.
f-n is controlled by the vertical movement of the Z-axis movement tables 9a to 9f.

Next, FIG. 6 shows a flowchart of the operation of the coating machine equipped with the coating head of the embodiment shown in FIG.
In FIG. 6, first, in step 100, the power is turned on. And first of all, the initial setting of the coating machine is performed.
(Step 101). In this initial setting step, in FIG. 1, the motor for moving each axis and the Z-axis moving table 9 are driven to move the substrate holding mechanism 5 in the Y-axis direction and position it at a predetermined reference position. In addition, the nozzle 2
0 is set to a predetermined origin position so that the paste discharge port becomes the position where the paste application starts (that is, the paste application start point). Further, data settings such as paste pattern data, substrate position data, and paste ejection end position data are set.

A keyboard 17g is used to input such data.
The data inputted from (FIG. 1) is stored in the RAM built in the microcomputer 17a-a (FIG. 4) as described above.

When the initial setting process (step 101) is completed, the intervals between the coating heads are set based on the input paste pattern PP data as shown in FIG. First, the linear motors 8a-m, 8b-m, 8c-m, or 8d- provided on the support bracket 8 attached to the X-axis moving mechanism 2a are spaced by a distance Xp in the X-axis direction.
m, 8e-m, and 8f-m are driven to initialize the mutual intervals by using the linear encoder LE provided in each motor (step 102). Next, the Y-axis moving mechanism 3a,
The linear motors 4a and 4b on 3b are driven to initialize the interval Yp of the coating head in the Y-axis direction (step 10).
3).

After that, the substrate 7 is attached to the substrate holding mechanism 5 (FIG. 1).
It is mounted on and held by suction or electrostatic attraction (step 104). The positioning marks of the board 7 mounted on the board holding mechanism 5 are used as image recognition cameras 15a to 15a.
An image is taken using the camera set from among f, and the barycentric position of the positioning mark is obtained by image processing, and XY of the substrate 7 is obtained.
Detects deviation in θ direction. Then, the Y-axis table 6 supporting the substrate holding mechanism 5 is moved in the Y-axis direction to move the Y-axis table 6 to the Y-axis direction.
Substrate preliminary positioning processing (step 105) for correcting the axial deviation is performed. Further, a servo motor 3 for moving in the Y-axis direction is provided for each coating head according to the deviation data.
0a-m to 30f-m (FIG. 3) are driven to move the coating head in the Y-axis direction, and the inclination in the θ direction is also corrected (step 106). Similarly, using the positioning marks on the substrate 7, the amount of deviation of each coating head in the X-axis direction is adjusted in substantially the same manner as when the intervals between the coating heads are adjusted (step 107). When the initial position correction of each coating head with respect to the installation state of the substrate 7 is completed, a paste pattern is drawn based on the given data (step 10).
8).

FIG. 8 shows an example of the paste pattern to be drawn. Further, FIG. 9 shows a drawing procedure of the paste pattern. Further, FIG. 10 shows an example of area division of the pace pattern. A plurality of paste patterns PP having the same shape are drawn on the substrate 7 as shown in FIG. In the present embodiment, in order to draw this paste pattern PP, as shown in FIG.
As shown in 0, the substrate 7 is divided into two areas in the Y-axis direction and six areas in the X-axis direction, and each area is drawn with a paste using one coating head. I decided to do it. Therefore, it is necessary to adjust the interval in the X-axis direction of the coating head performed in step 102 or step 107 according to the drawing area.

First, as shown in FIG. 9, when each coating head starts coating the paste, the coating head is moved in the X-axis direction by a predetermined length. Next, while stopping the movement of the coating head in the X-axis direction, the paste is applied while driving the Y-axis table on the substrate side to move the substrate in the Y-axis direction. When a predetermined length is applied in the Y-axis direction, each linear motor 8a-m provided on the support bracket 8 attached to the X-axis moving mechanism 2a while stopping the Y-axis moving table moving the substrate, 8b-m, 8c-m and 8d-
m, 8e-m, 8f-m are driven to move the respective coating heads in the X-axis direction at substantially the same speed and the paste coating is continued. That is, each coating head moves the coating head when applying the paste in the X-axis direction, and moves the substrate in the Y-axis direction when applying the paste in the Y-axis direction. Draw.
When the drawing of one paste pattern is completed, 2 in FIG.
By moving the coating head as indicated by the dotted line, a desired paste pattern can be drawn in the area shared by the coating heads in FIG. When the drawing of the desired paste pattern is completed on the entire surface of the substrate, the servo motor 10 is driven to raise the nozzle 20a and the drawing process is completed.

In the above description, the case where the substrate is placed on the substrate holding mechanism with almost no inclination in the plane direction has been described, but when the substrate is installed with a certain inclination θ, When applying the paste, set the substrate to Y
It goes without saying that the influence of the inclination θ can be corrected by moving the coating head in the X-axis direction while moving in the axial direction.

Next, the substrate for which drawing has been completed is discharged (step 109). When the discharge of the substrate is completed, it is judged whether or not there is a substrate to be drawn next (step 110), and if there is another substrate, the process returns to the substrate mounting step 104, and if there is no substrate, the apparatus is stopped and the processing is performed. End (step 111)
.

In the above description, the substrate 7 is moved in the Y-axis direction and the coating head is moved in the X-axis direction, but it goes without saying that the movement directions can be interchanged to operate. In that case, the Y-axis correction mechanism of the coating head is the X-axis correction mechanism.

As described above, in the present invention, when the paste pattern is drawn on the surface of the substrate, the drawing is performed in the Y-axis direction (one direction) by moving the substrate and in the X-axis direction (direction substantially perpendicular to the one direction).
The drawing was performed by moving the coating head. That is, the substrate holding mechanism is configured to be movable only in the Y-axis direction, and the coating head unit is configured to be movable in the X-axis direction. Further, by providing a Y-axis (one direction) correction mechanism for each coating head, the deviation of the substrate in the θ direction can be corrected by the Y-axis of each coating head.
It was possible to absorb by correcting the position in the direction. As a result, it is not necessary to secure a space for moving the substrate holding mechanism in the X direction and the θ direction, and accordingly, the apparatus can be downsized, and the structure of the substrate holding mechanism side can be simplified and the control can be facilitated. did .

[0045]

As described above, according to the present invention,
It is possible to provide a small paste applicator that facilitates control when the apparatus is in operation, can apply and draw a paste pattern or the like on a substrate at high speed and with high accuracy, and can effectively utilize an expensive clean room.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a paste applicator according to the present invention.

FIG. 2 is a perspective view showing the structure of the coating head unit of FIG.

FIG. 3 is a diagram showing a positional relationship between a nozzle and a substrate when a height sensor is used.

FIG. 4 is a configuration diagram of a main control system of the device of the present invention.

FIG. 5 is a configuration diagram of a sub control system of the device of the present invention.

FIG. 6 is a flowchart showing the overall operation of the coating apparatus of the present invention.

FIG. 7 is a diagram of another embodiment of the coating head used in the coating apparatus of the present invention.

FIG. 8 is a diagram showing an example of a paste pattern drawn on a substrate.

9 is a diagram illustrating a drawing procedure of the paste pattern of FIG.

FIG. 10 is a diagram showing a region for drawing a paste pattern of each coating head on the substrate surface.

[Explanation of symbols]

1 ... Stand 2a, 2b ... Coating head X-axis moving mechanism, 3
a, 3b ... Coating head spacing adjusting mechanism, 4a, 4b ... Spacing adjusting linear motor, 5 ... Substrate holding mechanism, 6 ... Table Y-axis direction moving mechanism, 7 ... Substrate, 8a-8f ... Z-axis moving table support Bracket, 9a to 9f ... Z-axis movement table, 10a to 10f ... Z-axis servomotor, 20a to 20
f ... Paste storage cylinder (syringe), 13a-n to 13f
-N ... coating nozzle, 15a to 15f ... lens barrel and image recognition camera provided with illuminatable light source, 16a to 16f ... distance meter, 17a ... main control unit, 17b ... sub control unit, 17f ... monitor, 17g ... Keyboard, 17c, 17d ... external storage device (hard disk, floppy disk), 17
e ... Communication cable, 22v ... Negative pressure source, 22a-22f ...
Negative pressure regulator, 23p ... Positive pressure source, 23a-23f ...
Positive pressure regulator, 24a to 24f ... Valve unit

Continued front page    (72) Inventor Junichi Matsui             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Ken Watanabe             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Hitoshi Manabe             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries F-term (reference) 4F041 AA05 AA16 AB02 BA22                 4F042 AA06 BA08 ED04

Claims (3)

[Claims] 1. A table on which a substrate is placed so as to face a discharge port of a nozzle, and a relative position between the substrate and the nozzle while discharging a paste filled in a paste container from the discharge port onto the substrate. In a paste applicator that applies a paste pattern of a desired shape while changing the relationship, a substrate moving mechanism that moves the substrate in one direction and a direction substantially perpendicular to the moving direction of the substrate moving mechanism in parallel with the substrate surface. Is provided with two sets of coating head supporting mechanisms each having a moving mechanism for individually moving a plurality of coating heads in cooperation with each other, and one of the coating head supporting mechanisms is configured to be movable in the moving direction of the substrate, The paste coating machine is characterized in that the other coating head supporting mechanism is fixed in the moving direction of the substrate. 2. The paste coating machine according to claim 1,
A paste applicator, wherein the coating head is provided with a correction mechanism for moving the nozzle in the same direction as the moving direction of the substrate. 3. The paste coating machine according to claim 1, wherein the coating head supporting mechanism configured to be movable in the moving direction of the substrate is used when the paste pattern is drawn on the substrate. A paste applicator characterized by being configured to drive and control so as not to move in a moving direction.