JP2003234061A - データ記憶素子に適用するための改善された電子放出素子および製造方法 - Google Patents
データ記憶素子に適用するための改善された電子放出素子および製造方法Info
- Publication number
- JP2003234061A JP2003234061A JP2002376852A JP2002376852A JP2003234061A JP 2003234061 A JP2003234061 A JP 2003234061A JP 2002376852 A JP2002376852 A JP 2002376852A JP 2002376852 A JP2002376852 A JP 2002376852A JP 2003234061 A JP2003234061 A JP 2003234061A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- electrode
- electron
- layer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title description 10
- 238000013500 data storage Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims abstract description 64
- 230000004888 barrier function Effects 0.000 claims abstract description 18
- 238000000605 extraction Methods 0.000 claims description 28
- 238000003860 storage Methods 0.000 abstract description 43
- 229910052751 metal Inorganic materials 0.000 abstract description 40
- 239000002184 metal Substances 0.000 abstract description 40
- 230000005684 electric field Effects 0.000 abstract description 23
- 238000005516 engineering process Methods 0.000 abstract description 11
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 19
- 238000010894 electron beam technology Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- -1 Si O 2 Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 241001279686 Allium moly Species 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 101000650817 Homo sapiens Semaphorin-4D Proteins 0.000 description 1
- 241001600434 Plectroglyphidodon lacrymatus Species 0.000 description 1
- 102100027744 Semaphorin-4D Human genes 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- HJGMWXTVGKLUAQ-UHFFFAOYSA-N oxygen(2-);scandium(3+) Chemical class [O-2].[O-2].[O-2].[Sc+3].[Sc+3] HJGMWXTVGKLUAQ-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1409—Heads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/042927 | 2002-01-09 | ||
| US10/042,927 US6806630B2 (en) | 2002-01-09 | 2002-01-09 | Electron emitter device for data storage applications and method of manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003234061A true JP2003234061A (ja) | 2003-08-22 |
| JP2003234061A5 JP2003234061A5 (https=) | 2005-07-21 |
Family
ID=21924485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002376852A Pending JP2003234061A (ja) | 2002-01-09 | 2002-12-26 | データ記憶素子に適用するための改善された電子放出素子および製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US6806630B2 (https=) |
| EP (1) | EP1328002A1 (https=) |
| JP (1) | JP2003234061A (https=) |
| CN (1) | CN100414624C (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009211969A (ja) * | 2008-03-05 | 2009-09-17 | Tohoku Univ | 陰極体及びそれを用いた面発光型蛍光発光装置 |
| JP2023533674A (ja) * | 2020-07-16 | 2023-08-04 | エーエスエムエル ネザーランズ ビー.ブイ. | 荷電粒子を放出するための放出器 |
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| US20020138301A1 (en) * | 2001-03-22 | 2002-09-26 | Thanos Karras | Integration of a portal into an application service provider data archive and/or web based viewer |
| US7474002B2 (en) * | 2001-10-30 | 2009-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having dielectric film having aperture portion |
| US20050132549A1 (en) * | 2001-11-16 | 2005-06-23 | Wong-Cheng Shih | Method for making metal capacitors with low leakage currents for mixed-signal devices |
| US7101770B2 (en) | 2002-01-30 | 2006-09-05 | Micron Technology, Inc. | Capacitive techniques to reduce noise in high speed interconnections |
| US7235457B2 (en) * | 2002-03-13 | 2007-06-26 | Micron Technology, Inc. | High permeability layered films to reduce noise in high speed interconnects |
| US6835619B2 (en) * | 2002-08-08 | 2004-12-28 | Micron Technology, Inc. | Method of forming a memory transistor comprising a Schottky contact |
| US7068582B2 (en) * | 2002-09-30 | 2006-06-27 | The Regents Of The University Of California | Read head for ultra-high-density information storage media and method for making the same |
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| US7790226B2 (en) * | 2003-10-27 | 2010-09-07 | California Institute Of Technology | Pyrolyzed thin film carbon |
| US20050243592A1 (en) * | 2004-04-16 | 2005-11-03 | Rust Thomas F | High density data storage device having eraseable bit cells |
| US20050243660A1 (en) * | 2004-04-16 | 2005-11-03 | Rust Thomas F | Methods for erasing bit cells in a high density data storage device |
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| KR100575002B1 (ko) | 2004-12-16 | 2006-05-02 | 삼성전자주식회사 | 공통 게이트를 구비하는 상보형 금속 산화물 반도체 박막트랜지스터, 이를 포함하는 논리소자 및 그 트랜지스터의제조 방법 |
| TWI324024B (en) * | 2005-01-14 | 2010-04-21 | Hon Hai Prec Ind Co Ltd | Field emission type light source |
| US7367119B2 (en) | 2005-06-24 | 2008-05-06 | Nanochip, Inc. | Method for forming a reinforced tip for a probe storage device |
| US20070041237A1 (en) * | 2005-07-08 | 2007-02-22 | Nanochip, Inc. | Media for writing highly resolved domains |
| US7463573B2 (en) | 2005-06-24 | 2008-12-09 | Nanochip, Inc. | Patterned media for a high density data storage device |
| US20070008866A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | Methods for writing and reading in a polarity-dependent memory switch media |
| US20070008867A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | High density data storage devices with a lubricant layer comprised of a field of polymer chains |
| US20070008865A1 (en) * | 2005-07-08 | 2007-01-11 | Nanochip, Inc. | High density data storage devices with polarity-dependent memory switching media |
| US7309630B2 (en) | 2005-07-08 | 2007-12-18 | Nanochip, Inc. | Method for forming patterned media for a high density data storage device |
| CN1941263B (zh) * | 2005-09-29 | 2011-12-14 | 清华大学 | 场发射显示器 |
| JP2007266083A (ja) * | 2006-03-27 | 2007-10-11 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| US20080001075A1 (en) * | 2006-06-15 | 2008-01-03 | Nanochip, Inc. | Memory stage for a probe storage device |
| US7887668B2 (en) * | 2006-08-30 | 2011-02-15 | Dow Global Technologies Inc. | Amine organoborane polymerizable compostion and uses therefor |
| US8101130B2 (en) * | 2006-09-15 | 2012-01-24 | Applied Nanotech Holdings, Inc. | Gas ionization source |
| US20080175033A1 (en) * | 2007-01-19 | 2008-07-24 | Nanochip, Inc. | Method and system for improving domain stability in a ferroelectric media |
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| JP2008282607A (ja) * | 2007-05-09 | 2008-11-20 | Canon Inc | 電子放出素子、電子源、画像表示装置、および、電子放出素子の製造方法 |
| US20090294028A1 (en) * | 2008-06-03 | 2009-12-03 | Nanochip, Inc. | Process for fabricating high density storage device with high-temperature media |
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| CN102157316B (zh) * | 2011-03-09 | 2013-04-24 | 北京工业大学 | 具有增强电子发射性能的薄膜场发射阴极及其制备方法 |
| WO2013187970A2 (en) * | 2012-05-14 | 2013-12-19 | The General Hospital Corporation | Method for coded-source phase contrast x-ray imaging |
| US11454820B2 (en) | 2019-10-17 | 2022-09-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multifunctional collimator for contact image sensors |
| CN115424909B (zh) * | 2022-08-02 | 2025-07-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | 场发射器件及其制作方法 |
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| FR2793602B1 (fr) | 1999-05-12 | 2001-08-03 | Univ Claude Bernard Lyon | Procede et dispositif pour extraire des electrons dans le vide et cathodes d'emission pour un tel dispositif |
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2002
- 2002-01-09 US US10/042,927 patent/US6806630B2/en not_active Expired - Fee Related
- 2002-12-26 JP JP2002376852A patent/JP2003234061A/ja active Pending
-
2003
- 2003-01-09 EP EP03250114A patent/EP1328002A1/en not_active Withdrawn
- 2003-01-09 CN CNB031010792A patent/CN100414624C/zh not_active Expired - Fee Related
- 2003-10-30 US US10/697,170 patent/US6864624B2/en not_active Expired - Fee Related
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2004
- 2004-09-01 US US10/932,695 patent/US7585687B2/en not_active Expired - Fee Related
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009211969A (ja) * | 2008-03-05 | 2009-09-17 | Tohoku Univ | 陰極体及びそれを用いた面発光型蛍光発光装置 |
| JP2023533674A (ja) * | 2020-07-16 | 2023-08-04 | エーエスエムエル ネザーランズ ビー.ブイ. | 荷電粒子を放出するための放出器 |
| JP7625017B2 (ja) | 2020-07-16 | 2025-01-31 | エーエスエムエル ネザーランズ ビー.ブイ. | 荷電粒子を放出するための放出器 |
Also Published As
| Publication number | Publication date |
|---|---|
| US6864624B2 (en) | 2005-03-08 |
| US20030128494A1 (en) | 2003-07-10 |
| US20040095868A1 (en) | 2004-05-20 |
| US6806630B2 (en) | 2004-10-19 |
| CN1433010A (zh) | 2003-07-30 |
| US7585687B2 (en) | 2009-09-08 |
| US20050029920A1 (en) | 2005-02-10 |
| CN100414624C (zh) | 2008-08-27 |
| EP1328002A1 (en) | 2003-07-16 |
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