JP2003226596A5 - - Google Patents
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- Publication number
- JP2003226596A5 JP2003226596A5 JP2002368524A JP2002368524A JP2003226596A5 JP 2003226596 A5 JP2003226596 A5 JP 2003226596A5 JP 2002368524 A JP2002368524 A JP 2002368524A JP 2002368524 A JP2002368524 A JP 2002368524A JP 2003226596 A5 JP2003226596 A5 JP 2003226596A5
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- crucible
- pieces
- single crystal
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 description 44
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 32
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 19
- 239000002994 raw material Substances 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000003491 array Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 230000008018 melting Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/042684 | 2002-01-11 | ||
| US10/042,684 US6605149B2 (en) | 2002-01-11 | 2002-01-11 | Method of stacking polycrystalline silicon in process for single crystal production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003226596A JP2003226596A (ja) | 2003-08-12 |
| JP2003226596A5 true JP2003226596A5 (https=) | 2006-02-16 |
Family
ID=21923222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002368524A Pending JP2003226596A (ja) | 2002-01-11 | 2002-12-19 | 単結晶シリコンインゴットの形成方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6605149B2 (https=) |
| JP (1) | JP2003226596A (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004033388A1 (en) * | 2002-10-10 | 2004-04-22 | Hrd Corp | An additive to render gypsum board moisture resistant |
| EP1577954A1 (de) * | 2004-03-09 | 2005-09-21 | RWE SCHOTT Solar GmbH | Verfahren zur Förderung von Feststoffpartikeln |
| US7141114B2 (en) | 2004-06-30 | 2006-11-28 | Rec Silicon Inc | Process for producing a crystalline silicon ingot |
| NO324710B1 (no) * | 2004-12-29 | 2007-12-03 | Elkem Solar As | Fremgangsmate for fylling av digel med silisium av solcellekvalitet |
| JP2007112651A (ja) * | 2005-10-19 | 2007-05-10 | Toshiba Ceramics Co Ltd | シリコン単結晶原料の溶解方法 |
| JP5136278B2 (ja) * | 2008-08-18 | 2013-02-06 | 株式会社Sumco | シリコン単結晶の製造方法 |
| US8603292B2 (en) * | 2009-10-28 | 2013-12-10 | Lam Research Corporation | Quartz window for a degas chamber |
| JP2012140285A (ja) * | 2010-12-28 | 2012-07-26 | Siltronic Japan Corp | シリコン単結晶インゴットの製造方法 |
| US20120260845A1 (en) | 2011-04-14 | 2012-10-18 | Rec Silicon Inc | Polysilicon system |
| WO2014037965A1 (en) * | 2012-09-05 | 2014-03-13 | MEMC ELECTRONIC METERIALS S.p.A. | Method of loading a charge of polysilicon into a crucible |
| JP6451333B2 (ja) * | 2015-01-14 | 2019-01-16 | 株式会社Sumco | シリコン単結晶の製造方法 |
| JP6049796B2 (ja) * | 2015-04-15 | 2016-12-21 | 住友化学株式会社 | サファイア単結晶製造用αアルミナ焼結体 |
| CN108004589A (zh) * | 2018-01-12 | 2018-05-08 | 无锡惠郡科技有限公司 | 一种八边形多晶硅铸锭的制造方法及其制造设备 |
| CN113026088A (zh) * | 2019-12-24 | 2021-06-25 | 苏州阿特斯阳光电力科技有限公司 | 晶体硅锭的制备方法 |
| CN115070973A (zh) * | 2022-07-11 | 2022-09-20 | 济南科盛电子有限公司 | 一种单晶硅片的生产工艺 |
| KR102781512B1 (ko) * | 2023-11-01 | 2025-03-12 | 한국세라믹기술원 | 블록 형태의 펠릿을 이용한 단결정 성장 방법 및 이를 위한 단결정 성장용 펠릿 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4073666A (en) * | 1976-09-09 | 1978-02-14 | Airco, Inc. | Method for making an insulated superconductor and article produced thereby |
| US4955357A (en) * | 1988-01-22 | 1990-09-11 | Hi-Silicon Co., Ltd. | Method and apparatus for cutting polycrystalline silicon rods |
| JPH0450191A (ja) * | 1990-06-20 | 1992-02-19 | Kawasaki Steel Corp | 単結晶用原料の装入方法 |
| JP3018424B2 (ja) * | 1990-07-30 | 2000-03-13 | 株式会社デンソー | 内燃機関用コイルの中心鉄心の製造方法 |
| JPH05740U (ja) * | 1991-06-26 | 1993-01-08 | 川崎炉材株式会社 | 高炉炉底用大型煉瓦とその積み構造 |
| JP2531415B2 (ja) * | 1992-03-24 | 1996-09-04 | 住友金属工業株式会社 | 結晶成長方法 |
| US5588993A (en) | 1995-07-25 | 1996-12-31 | Memc Electronic Materials, Inc. | Method for preparing molten silicon melt from polycrystalline silicon charge |
| JP3707750B2 (ja) * | 1996-05-30 | 2005-10-19 | 株式会社ニコン | フッ化カルシウム結晶の製造方法 |
| JP3189764B2 (ja) * | 1997-09-29 | 2001-07-16 | 住友金属工業株式会社 | シリコン単結晶原料の溶解方法 |
| US5919303A (en) | 1997-10-16 | 1999-07-06 | Memc Electronic Materials, Inc. | Process for preparing a silicon melt from a polysilicon charge |
| US6284040B1 (en) * | 1999-01-13 | 2001-09-04 | Memc Electronic Materials, Inc. | Process of stacking and melting polycrystalline silicon for high quality single crystal production |
-
2002
- 2002-01-11 US US10/042,684 patent/US6605149B2/en not_active Expired - Fee Related
- 2002-12-19 JP JP2002368524A patent/JP2003226596A/ja active Pending
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