JP2003224239A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法Info
- Publication number
- JP2003224239A JP2003224239A JP2002020297A JP2002020297A JP2003224239A JP 2003224239 A JP2003224239 A JP 2003224239A JP 2002020297 A JP2002020297 A JP 2002020297A JP 2002020297 A JP2002020297 A JP 2002020297A JP 2003224239 A JP2003224239 A JP 2003224239A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- lead
- semiconductor device
- island
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 169
- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 239000011347 resin Substances 0.000 claims abstract description 212
- 229920005989 resin Polymers 0.000 claims abstract description 212
- 238000007789 sealing Methods 0.000 claims description 66
- 239000000725 suspension Substances 0.000 claims description 65
- 239000008393 encapsulating agent Substances 0.000 claims description 39
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 238000005520 cutting process Methods 0.000 claims description 14
- 238000005538 encapsulation Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 238000004080 punching Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910020836 Sn-Ag Inorganic materials 0.000 description 1
- 229910020830 Sn-Bi Inorganic materials 0.000 description 1
- 229910020888 Sn-Cu Inorganic materials 0.000 description 1
- 229910020988 Sn—Ag Inorganic materials 0.000 description 1
- 229910018728 Sn—Bi Inorganic materials 0.000 description 1
- 229910019204 Sn—Cu Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002020297A JP2003224239A (ja) | 2002-01-29 | 2002-01-29 | 半導体装置およびその製造方法 |
TW91135129A TW584949B (en) | 2002-01-29 | 2002-12-04 | Semiconductor device and manufacturing method thereof |
CNB031035620A CN1307718C (zh) | 2002-01-29 | 2003-01-29 | 半导体装置及其制造方法 |
KR20030005701A KR100679598B1 (ko) | 2002-01-29 | 2003-01-29 | 반도체 장치 및 그 제조 방법 |
US10/352,859 US6893903B2 (en) | 2002-01-29 | 2003-01-29 | Semiconductor device and method for manufacturing the same |
US10/872,454 US7119424B2 (en) | 2002-01-29 | 2004-06-22 | Semiconductor device and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002020297A JP2003224239A (ja) | 2002-01-29 | 2002-01-29 | 半導体装置およびその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005210905A Division JP4225990B2 (ja) | 2005-07-21 | 2005-07-21 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2003224239A true JP2003224239A (ja) | 2003-08-08 |
Family
ID=27606271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002020297A Pending JP2003224239A (ja) | 2002-01-29 | 2002-01-29 | 半導体装置およびその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US6893903B2 (zh) |
JP (1) | JP2003224239A (zh) |
KR (1) | KR100679598B1 (zh) |
CN (1) | CN1307718C (zh) |
TW (1) | TW584949B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006086273A (ja) * | 2004-09-15 | 2006-03-30 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置 |
JP2007194558A (ja) * | 2006-01-23 | 2007-08-02 | Towa Corp | 電子部品の樹脂封止成形方法と金型及びリードフレーム |
JP2009246395A (ja) * | 2009-07-27 | 2009-10-22 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2011091145A (ja) * | 2009-10-21 | 2011-05-06 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
JP2013232544A (ja) * | 2012-04-27 | 2013-11-14 | Lapis Semiconductor Co Ltd | 樹脂封止方法および半導体装置の製造方法 |
JP2014072830A (ja) * | 2012-10-01 | 2014-04-21 | Nikon Corp | 中空パッケージ用容器及びその製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US6856006B2 (en) * | 2002-03-28 | 2005-02-15 | Siliconix Taiwan Ltd | Encapsulation method and leadframe for leadless semiconductor packages |
US6891256B2 (en) * | 2001-10-22 | 2005-05-10 | Fairchild Semiconductor Corporation | Thin, thermally enhanced flip chip in a leaded molded package |
JP3805338B2 (ja) * | 2003-11-07 | 2006-08-02 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US7642638B2 (en) * | 2006-12-22 | 2010-01-05 | United Test And Assembly Center Ltd. | Inverted lead frame in substrate |
WO2010056212A2 (en) * | 2008-11-17 | 2010-05-20 | Pyxis Systems Integration Pte Ltd | Method for encapsulating semiconductor dies |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5293065A (en) * | 1992-08-27 | 1994-03-08 | Texas Instruments, Incorporated | Lead frame having an outlet with a larger cross sectional area than the inlet |
JPH06209054A (ja) * | 1993-01-08 | 1994-07-26 | Mitsubishi Electric Corp | 半導体装置 |
US5559366A (en) * | 1994-08-04 | 1996-09-24 | Micron Technology, Inc. | Lead finger tread for a semiconductor lead package system |
US6388338B1 (en) * | 1995-04-28 | 2002-05-14 | Stmicroelectronics | Plastic package for an integrated electronic semiconductor device |
JPH08181160A (ja) | 1994-12-26 | 1996-07-12 | Fujitsu Ltd | 半導体装置の製造方法 |
US6072239A (en) * | 1995-11-08 | 2000-06-06 | Fujitsu Limited | Device having resin package with projections |
CA2180807C (en) * | 1996-07-09 | 2002-11-05 | Lynda Boutin | Integrated circuit chip package and encapsulation process |
JP2907186B2 (ja) * | 1997-05-19 | 1999-06-21 | 日本電気株式会社 | 半導体装置、その製造方法 |
JP2915892B2 (ja) * | 1997-06-27 | 1999-07-05 | 松下電子工業株式会社 | 樹脂封止型半導体装置およびその製造方法 |
KR100350046B1 (ko) * | 1999-04-14 | 2002-08-24 | 앰코 테크놀로지 코리아 주식회사 | 리드프레임 및 이를 이용한 방열판이 부착된 반도체패키지 |
JP2000332162A (ja) * | 1999-05-18 | 2000-11-30 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置 |
JP2001035961A (ja) * | 1999-07-21 | 2001-02-09 | Sony Corp | 半導体装置及びその製造方法 |
JP2001068613A (ja) * | 1999-08-27 | 2001-03-16 | Sony Corp | 半導体装置及びその製造方法 |
JP2001085574A (ja) * | 1999-09-09 | 2001-03-30 | Aoi Electronics Co Ltd | 樹脂封止半導体装置及びモールド装置 |
JP3733114B2 (ja) * | 2000-07-25 | 2006-01-11 | 株式会社メヂアナ電子 | プラスチックパッケージベース及びエアキャビティ型パッケージ |
JP3660861B2 (ja) * | 2000-08-18 | 2005-06-15 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
-
2002
- 2002-01-29 JP JP2002020297A patent/JP2003224239A/ja active Pending
- 2002-12-04 TW TW91135129A patent/TW584949B/zh not_active IP Right Cessation
-
2003
- 2003-01-29 US US10/352,859 patent/US6893903B2/en not_active Expired - Lifetime
- 2003-01-29 KR KR20030005701A patent/KR100679598B1/ko not_active IP Right Cessation
- 2003-01-29 CN CNB031035620A patent/CN1307718C/zh not_active Expired - Fee Related
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006086273A (ja) * | 2004-09-15 | 2006-03-30 | Dainippon Printing Co Ltd | 樹脂封止型半導体装置 |
JP2007194558A (ja) * | 2006-01-23 | 2007-08-02 | Towa Corp | 電子部品の樹脂封止成形方法と金型及びリードフレーム |
JP2009246395A (ja) * | 2009-07-27 | 2009-10-22 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2011091145A (ja) * | 2009-10-21 | 2011-05-06 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
JP2013232544A (ja) * | 2012-04-27 | 2013-11-14 | Lapis Semiconductor Co Ltd | 樹脂封止方法および半導体装置の製造方法 |
JP2014072830A (ja) * | 2012-10-01 | 2014-04-21 | Nikon Corp | 中空パッケージ用容器及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US7119424B2 (en) | 2006-10-10 |
CN1307718C (zh) | 2007-03-28 |
US20030143779A1 (en) | 2003-07-31 |
CN1435882A (zh) | 2003-08-13 |
KR100679598B1 (ko) | 2007-02-08 |
TW200302559A (en) | 2003-08-01 |
KR20030065385A (ko) | 2003-08-06 |
US6893903B2 (en) | 2005-05-17 |
US20040222513A1 (en) | 2004-11-11 |
TW584949B (en) | 2004-04-21 |
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