JP2003222820A - 光源装置、および、これを備えた照明光学系ならびにプロジェクタ - Google Patents
光源装置、および、これを備えた照明光学系ならびにプロジェクタInfo
- Publication number
- JP2003222820A JP2003222820A JP2002021053A JP2002021053A JP2003222820A JP 2003222820 A JP2003222820 A JP 2003222820A JP 2002021053 A JP2002021053 A JP 2002021053A JP 2002021053 A JP2002021053 A JP 2002021053A JP 2003222820 A JP2003222820 A JP 2003222820A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- optical system
- source device
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 113
- 238000005286 illumination Methods 0.000 title claims abstract description 81
- 230000002093 peripheral effect Effects 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 239000008186 active pharmaceutical agent Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
Landscapes
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Projection Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002021053A JP2003222820A (ja) | 2002-01-30 | 2002-01-30 | 光源装置、および、これを備えた照明光学系ならびにプロジェクタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002021053A JP2003222820A (ja) | 2002-01-30 | 2002-01-30 | 光源装置、および、これを備えた照明光学系ならびにプロジェクタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003222820A true JP2003222820A (ja) | 2003-08-08 |
| JP2003222820A5 JP2003222820A5 (enExample) | 2005-08-11 |
Family
ID=27744393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002021053A Pending JP2003222820A (ja) | 2002-01-30 | 2002-01-30 | 光源装置、および、これを備えた照明光学系ならびにプロジェクタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003222820A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005036256A1 (ja) * | 2003-10-14 | 2005-04-21 | Seiko Epson Corporation | 照明装置及びプロジェクタ |
| JP2006184676A (ja) * | 2004-12-28 | 2006-07-13 | Seiko Epson Corp | プロジェクタ |
| US7252410B2 (en) | 2004-09-30 | 2007-08-07 | Seiko Epson Corporation | Projector |
| JP2023083855A (ja) * | 2021-12-06 | 2023-06-16 | キヤノン株式会社 | 光源装置、リソグラフィ装置、及び物品の製造方法 |
-
2002
- 2002-01-30 JP JP2002021053A patent/JP2003222820A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005036256A1 (ja) * | 2003-10-14 | 2005-04-21 | Seiko Epson Corporation | 照明装置及びプロジェクタ |
| US7252410B2 (en) | 2004-09-30 | 2007-08-07 | Seiko Epson Corporation | Projector |
| JP2006184676A (ja) * | 2004-12-28 | 2006-07-13 | Seiko Epson Corp | プロジェクタ |
| JP2023083855A (ja) * | 2021-12-06 | 2023-06-16 | キヤノン株式会社 | 光源装置、リソグラフィ装置、及び物品の製造方法 |
| JP7753075B2 (ja) | 2021-12-06 | 2025-10-14 | キヤノン株式会社 | 光源装置、リソグラフィ装置、及び物品の製造方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050120 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050120 |
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| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061220 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070410 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070703 |