JP2003149418A5 - - Google Patents

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Publication number
JP2003149418A5
JP2003149418A5 JP2002206914A JP2002206914A JP2003149418A5 JP 2003149418 A5 JP2003149418 A5 JP 2003149418A5 JP 2002206914 A JP2002206914 A JP 2002206914A JP 2002206914 A JP2002206914 A JP 2002206914A JP 2003149418 A5 JP2003149418 A5 JP 2003149418A5
Authority
JP
Japan
Prior art keywords
beam splitter
holes
coating
transmittance
metal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002206914A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003149418A (ja
Filing date
Publication date
Priority claimed from DE10136507A external-priority patent/DE10136507A1/de
Application filed filed Critical
Publication of JP2003149418A publication Critical patent/JP2003149418A/ja
Publication of JP2003149418A5 publication Critical patent/JP2003149418A5/ja
Pending legal-status Critical Current

Links

JP2002206914A 2001-07-17 2002-07-16 幾何ビームスプリッタおよびその作製方法 Pending JP2003149418A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10136507.1 2001-07-17
DE10136507A DE10136507A1 (de) 2001-07-17 2001-07-17 Geometrischer Strahlteiler und Verfahren zu seiner Herstellung

Publications (2)

Publication Number Publication Date
JP2003149418A JP2003149418A (ja) 2003-05-21
JP2003149418A5 true JP2003149418A5 (enExample) 2005-10-20

Family

ID=7693229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002206914A Pending JP2003149418A (ja) 2001-07-17 2002-07-16 幾何ビームスプリッタおよびその作製方法

Country Status (4)

Country Link
US (1) US6809871B2 (enExample)
EP (1) EP1278094B1 (enExample)
JP (1) JP2003149418A (enExample)
DE (2) DE10136507A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10136507A1 (de) * 2001-07-17 2003-04-03 Zeiss Carl Geometrischer Strahlteiler und Verfahren zu seiner Herstellung
GB0413243D0 (en) * 2004-06-14 2004-07-14 Imp College Innovations Ltd Transmissive element
DE102004060721B4 (de) * 2004-12-17 2008-07-10 Carl Zeiss Smt Ag Verfahren zur Auswahl von optischen Materialien
US7600527B2 (en) 2005-04-01 2009-10-13 Fike Corporation Reverse acting rupture disc with laser-defined electropolished line of weakness and method of forming the line of weakness
US20070002777A1 (en) * 2005-05-31 2007-01-04 Glowpoint, Inc. Video-communication interface
US20070012665A1 (en) * 2005-07-12 2007-01-18 Hewlett-Packard Development Company Lp Laser ablation
DE102006030757A1 (de) * 2005-07-18 2007-02-01 Carl Zeiss Smt Ag Polarisationsoptimiertes Beleuchtungssystem
US8270086B1 (en) 2006-12-04 2012-09-18 Bae Systems Oasys Llc Uni-directional beam splitter coating
JP2008175929A (ja) * 2007-01-17 2008-07-31 Nikon Corp 反射鏡の製造方法及び光学機器
DE102011080052A1 (de) 2011-07-28 2013-01-31 Carl Zeiss Smt Gmbh Spiegel, optisches System mit Spiegel und Verfahren zur Herstellung eines Spiegels
DE102011086345A1 (de) 2011-11-15 2013-05-16 Carl Zeiss Smt Gmbh Spiegel
DE102012216502A1 (de) * 2012-09-17 2014-03-20 Carl Zeiss Smt Gmbh Spiegel
US9851177B2 (en) * 2013-10-04 2017-12-26 Bae Systems Information And Electronic Systems Integration Inc. Coating for light security
US10976562B2 (en) 2017-10-10 2021-04-13 Kla Corporation Nano-structured non-polarizing beamsplitter
WO2019145005A1 (en) * 2018-01-23 2019-08-01 Danmarks Tekniske Universitet An apparatus for carrying out raman spectroscopy
JP7145620B2 (ja) * 2018-02-27 2022-10-03 株式会社オーク製作所 投影露光装置
JP7162430B2 (ja) * 2018-02-27 2022-10-28 株式会社オーク製作所 投影露光装置
US11662513B2 (en) 2019-01-09 2023-05-30 Meta Platforms Technologies, Llc Non-uniform sub-pupil reflectors and methods in optical waveguides for AR, HMD and HUD applications
JP7209104B2 (ja) * 2019-02-25 2023-01-19 サイマー リミテッド ライアビリティ カンパニー 深紫外線光源のための光学素子

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US1253138A (en) * 1915-02-16 1918-01-08 Brewster Film Corp Light-splitting device for color photography.
JPS60181704A (ja) 1984-02-29 1985-09-17 Canon Inc 真空紫外用反射ミラー
JPS63107082A (ja) * 1986-06-20 1988-05-12 Mitsubishi Electric Corp レ−ザ出力制御装置
JPS63192010A (ja) 1987-02-04 1988-08-09 Washino Kikai Kk レ−ザ光分割装置
JP2629693B2 (ja) 1987-02-26 1997-07-09 松下電器産業株式会社 エキシマレーザ用ミラー
DE3802998A1 (de) 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitridschicht auf einer oberflaeche
DE3803014A1 (de) 1988-02-02 1989-08-10 Basf Ag Verfahren zur herstellung einer duennen roentgenamorphen aluminiumnitrid- oder aluminiumsiliciumnitrid-schicht auf einer oberflaeche
US4989936A (en) 1989-12-21 1991-02-05 At&T Bell Laboratories Fabrication of optical components utilizing a laser
DE4022745A1 (de) 1990-07-18 1992-01-23 Hans Lang Gmbh & Co Kg Ing Verfahren zum anbringen von konfigurationen, wie schriften, bildern o. dgl., auf der rueckseite eines spiegels
US5302259A (en) * 1991-04-30 1994-04-12 Reginald Birngruber Method and apparatus for altering the properties in light absorbing material
US5367143A (en) * 1992-12-30 1994-11-22 International Business Machines Corporation Apparatus and method for multi-beam drilling
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
DE4437896C1 (de) 1994-10-22 1996-05-15 Leica Lasertechnik Scan-Vorrichtung für konfokale Mikroskope
CN1130602C (zh) 1996-02-23 2003-12-10 Asm石版印刷公司 光学系统的照明单元和用于重复地将掩模图案成像在基片上的装置
US5850309A (en) 1996-03-27 1998-12-15 Nikon Corporation Mirror for high-intensity ultraviolet light beam
JPH11311704A (ja) 1998-02-26 1999-11-09 Nikon Corp 紫外光用ミラー
DE10136507A1 (de) * 2001-07-17 2003-04-03 Zeiss Carl Geometrischer Strahlteiler und Verfahren zu seiner Herstellung
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske

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