JP2003133404A5 - - Google Patents

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Publication number
JP2003133404A5
JP2003133404A5 JP2002228459A JP2002228459A JP2003133404A5 JP 2003133404 A5 JP2003133404 A5 JP 2003133404A5 JP 2002228459 A JP2002228459 A JP 2002228459A JP 2002228459 A JP2002228459 A JP 2002228459A JP 2003133404 A5 JP2003133404 A5 JP 2003133404A5
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JP
Japan
Prior art keywords
electrostatic chuck
vacuum chamber
performance
measuring
applying
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Application number
JP2002228459A
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English (en)
Japanese (ja)
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JP4297659B2 (ja
JP2003133404A (ja
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Priority claimed from US09/924,038 external-priority patent/US6853953B2/en
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Publication of JP2003133404A publication Critical patent/JP2003133404A/ja
Publication of JP2003133404A5 publication Critical patent/JP2003133404A5/ja
Application granted granted Critical
Publication of JP4297659B2 publication Critical patent/JP4297659B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002228459A 2001-08-07 2002-08-06 静電チャックの性能を特徴付ける方法 Expired - Fee Related JP4297659B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US924038 2001-08-07
US09/924,038 US6853953B2 (en) 2001-08-07 2001-08-07 Method for characterizing the performance of an electrostatic chuck

Publications (3)

Publication Number Publication Date
JP2003133404A JP2003133404A (ja) 2003-05-09
JP2003133404A5 true JP2003133404A5 (enExample) 2005-10-27
JP4297659B2 JP4297659B2 (ja) 2009-07-15

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JP2002228459A Expired - Fee Related JP4297659B2 (ja) 2001-08-07 2002-08-06 静電チャックの性能を特徴付ける方法

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US (1) US6853953B2 (enExample)
JP (1) JP4297659B2 (enExample)

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