JP2003131388A5 - - Google Patents

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Publication number
JP2003131388A5
JP2003131388A5 JP2001323403A JP2001323403A JP2003131388A5 JP 2003131388 A5 JP2003131388 A5 JP 2003131388A5 JP 2001323403 A JP2001323403 A JP 2001323403A JP 2001323403 A JP2001323403 A JP 2001323403A JP 2003131388 A5 JP2003131388 A5 JP 2003131388A5
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JP
Japan
Prior art keywords
mask
air
suction path
holding device
path
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Application number
JP2001323403A
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English (en)
Japanese (ja)
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JP2003131388A (ja
JP4390413B2 (ja
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Application filed filed Critical
Priority to JP2001323403A priority Critical patent/JP4390413B2/ja
Priority claimed from JP2001323403A external-priority patent/JP4390413B2/ja
Publication of JP2003131388A publication Critical patent/JP2003131388A/ja
Publication of JP2003131388A5 publication Critical patent/JP2003131388A5/ja
Application granted granted Critical
Publication of JP4390413B2 publication Critical patent/JP4390413B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001323403A 2001-10-22 2001-10-22 マスクのたわみ補正機能を備えたマスク保持装置 Expired - Fee Related JP4390413B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001323403A JP4390413B2 (ja) 2001-10-22 2001-10-22 マスクのたわみ補正機能を備えたマスク保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001323403A JP4390413B2 (ja) 2001-10-22 2001-10-22 マスクのたわみ補正機能を備えたマスク保持装置

Publications (3)

Publication Number Publication Date
JP2003131388A JP2003131388A (ja) 2003-05-09
JP2003131388A5 true JP2003131388A5 (enExample) 2005-06-30
JP4390413B2 JP4390413B2 (ja) 2009-12-24

Family

ID=19140295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001323403A Expired - Fee Related JP4390413B2 (ja) 2001-10-22 2001-10-22 マスクのたわみ補正機能を備えたマスク保持装置

Country Status (1)

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JP (1) JP4390413B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100693161B1 (ko) * 2005-05-02 2007-03-13 엘지전자 주식회사 노광기의 마스크 홀더장치
JP2008015272A (ja) 2006-07-06 2008-01-24 Fujitsu Hitachi Plasma Display Ltd パターニング用ガラスマスク及びその製造方法
JP4794471B2 (ja) * 2007-02-05 2011-10-19 株式会社日立ハイテクノロジーズ 露光装置、及び露光装置の負圧室の天板を交換する方法
JP2008276040A (ja) * 2007-05-02 2008-11-13 Ushio Inc マスクステージ
JP4879112B2 (ja) * 2007-07-31 2012-02-22 株式会社日立ハイテクノロジーズ 露光装置
KR101015751B1 (ko) * 2008-04-03 2011-02-22 천호식 액정기판 노광장치의 노광용 마스크기구
JP5190034B2 (ja) * 2009-07-03 2013-04-24 株式会社日立ハイテクノロジーズ 露光装置
JP6142214B2 (ja) * 2011-08-10 2017-06-07 株式会社ブイ・テクノロジー 近接露光装置及び近接露光方法
KR101589618B1 (ko) 2014-09-18 2016-01-29 주식회사 필옵틱스 노광장치의 워크 테이블과 이를 이용한 마스크 처짐량 교정 방법
KR101721189B1 (ko) 2014-09-18 2017-03-31 주식회사 필옵틱스 광각 보정 장치와 이를 사용하는 노광 장치 및 광각 보정 방법
KR101652985B1 (ko) 2014-09-18 2016-09-02 주식회사 필옵틱스 노광장치와 이것의 워크 테이블

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