JP2003130614A5 - - Google Patents

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Publication number
JP2003130614A5
JP2003130614A5 JP2001330060A JP2001330060A JP2003130614A5 JP 2003130614 A5 JP2003130614 A5 JP 2003130614A5 JP 2001330060 A JP2001330060 A JP 2001330060A JP 2001330060 A JP2001330060 A JP 2001330060A JP 2003130614 A5 JP2003130614 A5 JP 2003130614A5
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JP
Japan
Prior art keywords
film thickness
threshold
interference
measured
fundamental frequency
Prior art date
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Application number
JP2001330060A
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English (en)
Japanese (ja)
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JP2003130614A (ja
JP3880369B2 (ja
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Priority to JP2001330060A priority Critical patent/JP3880369B2/ja
Priority claimed from JP2001330060A external-priority patent/JP3880369B2/ja
Publication of JP2003130614A publication Critical patent/JP2003130614A/ja
Publication of JP2003130614A5 publication Critical patent/JP2003130614A5/ja
Application granted granted Critical
Publication of JP3880369B2 publication Critical patent/JP3880369B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001330060A 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置 Expired - Fee Related JP3880369B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001330060A JP3880369B2 (ja) 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001330060A JP3880369B2 (ja) 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置

Publications (3)

Publication Number Publication Date
JP2003130614A JP2003130614A (ja) 2003-05-08
JP2003130614A5 true JP2003130614A5 (enExample) 2004-12-24
JP3880369B2 JP3880369B2 (ja) 2007-02-14

Family

ID=19145851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001330060A Expired - Fee Related JP3880369B2 (ja) 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置

Country Status (1)

Country Link
JP (1) JP3880369B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5490462B2 (ja) * 2009-08-17 2014-05-14 横河電機株式会社 膜厚測定装置
JP5694743B2 (ja) * 2010-11-25 2015-04-01 株式会社ディスコ 研削装置
JP5756733B2 (ja) * 2011-10-20 2015-07-29 倉敷紡績株式会社 干渉式膜厚計

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