JP3880369B2 - 膜厚測定方法および膜厚測定装置 - Google Patents

膜厚測定方法および膜厚測定装置 Download PDF

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Publication number
JP3880369B2
JP3880369B2 JP2001330060A JP2001330060A JP3880369B2 JP 3880369 B2 JP3880369 B2 JP 3880369B2 JP 2001330060 A JP2001330060 A JP 2001330060A JP 2001330060 A JP2001330060 A JP 2001330060A JP 3880369 B2 JP3880369 B2 JP 3880369B2
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Japan
Prior art keywords
film thickness
frequency
interference
dielectric film
fundamental frequency
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Japanese (ja)
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JP2003130614A5 (enExample
JP2003130614A (ja
Inventor
泰康 久保
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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JP2001330060A 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置 Expired - Fee Related JP3880369B2 (ja)

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JP2001330060A JP3880369B2 (ja) 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置

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JP2001330060A JP3880369B2 (ja) 2001-10-29 2001-10-29 膜厚測定方法および膜厚測定装置

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JP2003130614A JP2003130614A (ja) 2003-05-08
JP2003130614A5 JP2003130614A5 (enExample) 2004-12-24
JP3880369B2 true JP3880369B2 (ja) 2007-02-14

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5490462B2 (ja) * 2009-08-17 2014-05-14 横河電機株式会社 膜厚測定装置
JP5694743B2 (ja) * 2010-11-25 2015-04-01 株式会社ディスコ 研削装置
JP5756733B2 (ja) * 2011-10-20 2015-07-29 倉敷紡績株式会社 干渉式膜厚計

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