JP2003114626A5 - - Google Patents

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Publication number
JP2003114626A5
JP2003114626A5 JP2002175119A JP2002175119A JP2003114626A5 JP 2003114626 A5 JP2003114626 A5 JP 2003114626A5 JP 2002175119 A JP2002175119 A JP 2002175119A JP 2002175119 A JP2002175119 A JP 2002175119A JP 2003114626 A5 JP2003114626 A5 JP 2003114626A5
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JP
Japan
Prior art keywords
light
insulating film
interlayer insulating
atomic
emitting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002175119A
Other languages
English (en)
Japanese (ja)
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JP2003114626A (ja
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Publication date
Application filed filed Critical
Priority to JP2002175119A priority Critical patent/JP2003114626A/ja
Priority claimed from JP2002175119A external-priority patent/JP2003114626A/ja
Publication of JP2003114626A publication Critical patent/JP2003114626A/ja
Publication of JP2003114626A5 publication Critical patent/JP2003114626A5/ja
Pending legal-status Critical Current

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JP2002175119A 2001-06-18 2002-06-14 発光装置及びその作製方法 Pending JP2003114626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002175119A JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-184067 2001-06-18
JP2001184067 2001-06-18
JP2002175119A JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005221022A Division JP2006012856A (ja) 2001-06-18 2005-07-29 発光装置及びその作製方法

Publications (2)

Publication Number Publication Date
JP2003114626A JP2003114626A (ja) 2003-04-18
JP2003114626A5 true JP2003114626A5 (enExample) 2004-08-26

Family

ID=26617142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002175119A Pending JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Country Status (1)

Country Link
JP (1) JP2003114626A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4373159B2 (ja) * 2003-08-21 2009-11-25 株式会社半導体エネルギー研究所 発光装置
US7291967B2 (en) 2003-08-29 2007-11-06 Semiconductor Energy Laboratory Co., Ltd. Light emitting element including a barrier layer and a manufacturing method thereof
JP4704004B2 (ja) * 2003-10-20 2011-06-15 株式会社半導体エネルギー研究所 発光装置及び電子機器
US7205716B2 (en) 2003-10-20 2007-04-17 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US7902747B2 (en) 2003-10-21 2011-03-08 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having a thin insulating film made of nitrogen and silicon and an electrode made of conductive transparent oxide and silicon dioxide
JP4656906B2 (ja) * 2003-10-21 2011-03-23 株式会社半導体エネルギー研究所 発光装置
JP4785339B2 (ja) * 2003-10-24 2011-10-05 株式会社半導体エネルギー研究所 表示装置の作製方法
JP4564364B2 (ja) * 2004-01-19 2010-10-20 株式会社 日立ディスプレイズ 有機エレクトロルミネッセンス表示装置とその製造方法
US7274044B2 (en) * 2004-01-26 2007-09-25 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
JP2007115808A (ja) * 2005-10-19 2007-05-10 Toppan Printing Co Ltd トランジスタ
JP4582004B2 (ja) 2006-01-13 2010-11-17 セイコーエプソン株式会社 発光装置および電子機器
JP4655942B2 (ja) 2006-01-16 2011-03-23 セイコーエプソン株式会社 発光装置、発光装置の製造方法および電子機器
JP4809087B2 (ja) 2006-03-14 2011-11-02 セイコーエプソン株式会社 エレクトロルミネッセンス装置、電子機器、およびエレクトロルミネッセンス装置の製造方法
US20100237362A1 (en) * 2007-10-23 2010-09-23 Sharp Kabushiki Kaisha Display device and production method thereof
KR101649757B1 (ko) * 2008-09-26 2016-08-19 코오롱인더스트리 주식회사 유기전계발광소자 및 그 제조방법
CN114899346B (zh) * 2017-06-13 2025-07-29 堺显示器制品株式会社 有机el设备的制造方法及薄膜密封结构形成装置
JP6926169B2 (ja) * 2018-03-28 2021-08-25 堺ディスプレイプロダクト株式会社 有機el表示装置及びその製造方法
JP6867738B2 (ja) * 2018-04-20 2021-05-12 堺ディスプレイプロダクト株式会社 有機elデバイスの製造方法

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