JP2003114626A - 発光装置及びその作製方法 - Google Patents

発光装置及びその作製方法

Info

Publication number
JP2003114626A
JP2003114626A JP2002175119A JP2002175119A JP2003114626A JP 2003114626 A JP2003114626 A JP 2003114626A JP 2002175119 A JP2002175119 A JP 2002175119A JP 2002175119 A JP2002175119 A JP 2002175119A JP 2003114626 A JP2003114626 A JP 2003114626A
Authority
JP
Japan
Prior art keywords
film
insulating film
light emitting
interlayer insulating
atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002175119A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003114626A5 (enExample
Inventor
Toru Takayama
徹 高山
Hirokazu Yamagata
裕和 山形
Akihiko Takara
昭彦 高良
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2002175119A priority Critical patent/JP2003114626A/ja
Publication of JP2003114626A publication Critical patent/JP2003114626A/ja
Publication of JP2003114626A5 publication Critical patent/JP2003114626A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Formation Of Insulating Films (AREA)
  • Thin Film Transistor (AREA)
JP2002175119A 2001-06-18 2002-06-14 発光装置及びその作製方法 Pending JP2003114626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002175119A JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-184067 2001-06-18
JP2001184067 2001-06-18
JP2002175119A JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005221022A Division JP2006012856A (ja) 2001-06-18 2005-07-29 発光装置及びその作製方法

Publications (2)

Publication Number Publication Date
JP2003114626A true JP2003114626A (ja) 2003-04-18
JP2003114626A5 JP2003114626A5 (enExample) 2004-08-26

Family

ID=26617142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002175119A Pending JP2003114626A (ja) 2001-06-18 2002-06-14 発光装置及びその作製方法

Country Status (1)

Country Link
JP (1) JP2003114626A (enExample)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005071693A (ja) * 2003-08-21 2005-03-17 Semiconductor Energy Lab Co Ltd 発光装置およびその作製方法、および立体表示装置
JP2005129415A (ja) * 2003-10-24 2005-05-19 Semiconductor Energy Lab Co Ltd 表示装置及び表示装置の作製方法
JP2005150097A (ja) * 2003-10-20 2005-06-09 Semiconductor Energy Lab Co Ltd 発光装置及び発光装置の作製方法
JP2005150094A (ja) * 2003-10-21 2005-06-09 Semiconductor Energy Lab Co Ltd 発光装置
JP2005235753A (ja) * 2004-01-19 2005-09-02 Hitachi Displays Ltd 有機エレクトロルミネッセンス表示装置とその製造方法
JP2007115808A (ja) * 2005-10-19 2007-05-10 Toppan Printing Co Ltd トランジスタ
JP2007188808A (ja) * 2006-01-16 2007-07-26 Seiko Epson Corp 発光装置、発光装置の製造方法および電子機器
WO2009054159A1 (ja) * 2007-10-23 2009-04-30 Sharp Kabushiki Kaisha 表示装置及び表示装置の製造方法
US7638939B2 (en) 2006-01-13 2009-12-29 Seiko Epson Corporation Light-emitting device and electronic apparatus
KR20100035312A (ko) * 2008-09-26 2010-04-05 주식회사 코오롱 유기전계발광소자 및 그 제조방법
JP2010199093A (ja) * 2003-10-21 2010-09-09 Semiconductor Energy Lab Co Ltd 発光装置
US7796101B2 (en) 2006-03-14 2010-09-14 Seiko Epson Corporation Electroluminescent device, method for manufacturing electroluminescent device, and electronic apparatus
US7850501B2 (en) 2003-10-20 2010-12-14 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing light-emitting device
US8012529B2 (en) 2003-08-29 2011-09-06 Semiconductor Energy Laboratory Co., Ltd. Light emitting element and manufacturing method thereof
JP2012190042A (ja) * 2004-01-26 2012-10-04 Semiconductor Energy Lab Co Ltd 発光装置
CN110731126A (zh) * 2017-06-13 2020-01-24 堺显示器制品株式会社 有机el设备及其制造方法
JP2020024930A (ja) * 2018-03-28 2020-02-13 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置及びその製造方法
JPWO2019202738A1 (ja) * 2018-04-20 2020-09-24 堺ディスプレイプロダクト株式会社 有機ｅｌデバイスおよびその製造方法

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005071693A (ja) * 2003-08-21 2005-03-17 Semiconductor Energy Lab Co Ltd 発光装置およびその作製方法、および立体表示装置
US8012529B2 (en) 2003-08-29 2011-09-06 Semiconductor Energy Laboratory Co., Ltd. Light emitting element and manufacturing method thereof
US7850501B2 (en) 2003-10-20 2010-12-14 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing light-emitting device
JP2005150097A (ja) * 2003-10-20 2005-06-09 Semiconductor Energy Lab Co Ltd 発光装置及び発光装置の作製方法
US9034675B2 (en) 2003-10-20 2015-05-19 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing light-emitting device
US8759131B2 (en) 2003-10-20 2014-06-24 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing light-emitting device
US8742660B2 (en) 2003-10-21 2014-06-03 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US8643030B2 (en) 2003-10-21 2014-02-04 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device
US7902747B2 (en) 2003-10-21 2011-03-08 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having a thin insulating film made of nitrogen and silicon and an electrode made of conductive transparent oxide and silicon dioxide
JP2010199093A (ja) * 2003-10-21 2010-09-09 Semiconductor Energy Lab Co Ltd 発光装置
JP2005150094A (ja) * 2003-10-21 2005-06-09 Semiconductor Energy Lab Co Ltd 発光装置
JP2005129415A (ja) * 2003-10-24 2005-05-19 Semiconductor Energy Lab Co Ltd 表示装置及び表示装置の作製方法
JP2005235753A (ja) * 2004-01-19 2005-09-02 Hitachi Displays Ltd 有機エレクトロルミネッセンス表示装置とその製造方法
JP2012190042A (ja) * 2004-01-26 2012-10-04 Semiconductor Energy Lab Co Ltd 発光装置
JP2007115808A (ja) * 2005-10-19 2007-05-10 Toppan Printing Co Ltd トランジスタ
US7638939B2 (en) 2006-01-13 2009-12-29 Seiko Epson Corporation Light-emitting device and electronic apparatus
US7982389B2 (en) 2006-01-16 2011-07-19 Seiko Epson Corporation Light-emitting device incorporating an inorganic insulating layer between a reflective layer and corresponding pixel electrode
US7508004B2 (en) 2006-01-16 2009-03-24 Seiko Epson Corporation Light-emitting device, method for manufacturing light-emitting device, and electronic apparatus
JP2007188808A (ja) * 2006-01-16 2007-07-26 Seiko Epson Corp 発光装置、発光装置の製造方法および電子機器
US7796101B2 (en) 2006-03-14 2010-09-14 Seiko Epson Corporation Electroluminescent device, method for manufacturing electroluminescent device, and electronic apparatus
US8059067B2 (en) 2006-03-14 2011-11-15 Seiko Epson Corporation Electroluminescent device, method for manufacturing electroluminescent device, and electronic apparatus
WO2009054159A1 (ja) * 2007-10-23 2009-04-30 Sharp Kabushiki Kaisha 表示装置及び表示装置の製造方法
KR20100035312A (ko) * 2008-09-26 2010-04-05 주식회사 코오롱 유기전계발광소자 및 그 제조방법
KR101649757B1 (ko) * 2008-09-26 2016-08-19 코오롱인더스트리 주식회사 유기전계발광소자 및 그 제조방법
CN110731126A (zh) * 2017-06-13 2020-01-24 堺显示器制品株式会社 有机el设备及其制造方法
CN114899346A (zh) * 2017-06-13 2022-08-12 堺显示器制品株式会社 有机el设备的制造方法及薄膜密封结构形成装置
CN114899346B (zh) * 2017-06-13 2025-07-29 堺显示器制品株式会社 有机el设备的制造方法及薄膜密封结构形成装置
JP2020024930A (ja) * 2018-03-28 2020-02-13 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置及びその製造方法
JPWO2019202738A1 (ja) * 2018-04-20 2020-09-24 堺ディスプレイプロダクト株式会社 有機ｅｌデバイスおよびその製造方法
JP2021114470A (ja) * 2018-04-20 2021-08-05 堺ディスプレイプロダクト株式会社 有機ｅｌデバイスの製造方法
JP7076027B2 (ja) 2018-04-20 2022-05-26 堺ディスプレイプロダクト株式会社 有機ｅｌデバイスの製造方法
US11950488B2 (en) 2018-04-20 2024-04-02 Sakai Display Products Corporation Organic electroluminescent device and method for producing same
JP2021182555A (ja) * 2019-10-11 2021-11-25 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置及びその製造方法
JP7139504B2 (ja) 2019-10-11 2022-09-20 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置及びその製造方法

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