JP2003100844A - 四辺形基板反転装置及び四辺形基板洗浄ユニット - Google Patents

四辺形基板反転装置及び四辺形基板洗浄ユニット

Info

Publication number
JP2003100844A
JP2003100844A JP2001296393A JP2001296393A JP2003100844A JP 2003100844 A JP2003100844 A JP 2003100844A JP 2001296393 A JP2001296393 A JP 2001296393A JP 2001296393 A JP2001296393 A JP 2001296393A JP 2003100844 A JP2003100844 A JP 2003100844A
Authority
JP
Japan
Prior art keywords
substrate
quadrilateral
axis
cleaning
reversing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001296393A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003100844A5 (OSRAM
Inventor
Hiroomi Torii
弘臣 鳥居
Hideo Aizawa
英夫 相澤
Hiroshi Kojima
浩 小島
Yuji Yagi
裕治 八木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2001296393A priority Critical patent/JP2003100844A/ja
Publication of JP2003100844A publication Critical patent/JP2003100844A/ja
Publication of JP2003100844A5 publication Critical patent/JP2003100844A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
JP2001296393A 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット Pending JP2003100844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001296393A JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001296393A JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Publications (2)

Publication Number Publication Date
JP2003100844A true JP2003100844A (ja) 2003-04-04
JP2003100844A5 JP2003100844A5 (OSRAM) 2005-01-06

Family

ID=19117644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001296393A Pending JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Country Status (1)

Country Link
JP (1) JP2003100844A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053154A (ja) * 2005-08-16 2007-03-01 Pre-Tech Co Ltd マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法
KR100814506B1 (ko) 2005-12-29 2008-03-18 주식회사 탑 엔지니어링 기판 턴 오버 장치
WO2010016505A1 (ja) * 2008-08-06 2010-02-11 株式会社 日立ハイテクノロジーズ 試料搬送機構
CN107185896A (zh) * 2016-10-28 2017-09-22 旭东机械(昆山)有限公司 板边清洗系统
JPWO2023106041A1 (OSRAM) * 2021-12-08 2023-06-15

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053154A (ja) * 2005-08-16 2007-03-01 Pre-Tech Co Ltd マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法
KR100814506B1 (ko) 2005-12-29 2008-03-18 주식회사 탑 엔지니어링 기판 턴 오버 장치
WO2010016505A1 (ja) * 2008-08-06 2010-02-11 株式会社 日立ハイテクノロジーズ 試料搬送機構
JP2010040804A (ja) * 2008-08-06 2010-02-18 Hitachi High-Technologies Corp 試料搬送機構
US8585112B2 (en) 2008-08-06 2013-11-19 Hitachi High-Technologies Corporation Sample conveying mechanism
CN107185896A (zh) * 2016-10-28 2017-09-22 旭东机械(昆山)有限公司 板边清洗系统
CN107185896B (zh) * 2016-10-28 2023-06-16 旭东机械(昆山)有限公司 板边清洗系统
JPWO2023106041A1 (OSRAM) * 2021-12-08 2023-06-15
WO2023106041A1 (ja) * 2021-12-08 2023-06-15 株式会社村田製作所 ハンドリング装置
JP7601260B2 (ja) 2021-12-08 2024-12-17 株式会社村田製作所 ハンドリング装置

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