JP2003055036A5 - - Google Patents

Info

Publication number

JP2003055036A5

JP2003055036A5 JP2001252542A JP2001252542A JP2003055036A5 JP 2003055036 A5 JP2003055036 A5 JP 2003055036A5 JP 2001252542 A JP2001252542 A JP 2001252542A JP 2001252542 A JP2001252542 A JP 2001252542A JP 2003055036 A5 JP2003055036 A5 JP 2003055036A5

Authority

JP

Japan

Prior art keywords

weight

hollow structure

inorganic

inorganic particles

particles

Prior art date

2001-08-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010954 inorganic particle Substances 0.000 description 31
• 239000002245 particle Substances 0.000 description 19
• 229910010272 inorganic material Inorganic materials 0.000 description 18
• 239000011147 inorganic material Substances 0.000 description 18
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
• 239000000203 mixture Substances 0.000 description 15
• 239000000919 ceramic Substances 0.000 description 14
• 239000000843 powder Substances 0.000 description 12
• 239000000377 silicon dioxide Substances 0.000 description 7
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
• 239000011521 glass Substances 0.000 description 6
• 239000003999 initiator Substances 0.000 description 6
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
• 229910052681 coesite Inorganic materials 0.000 description 5
• 229910052906 cristobalite Inorganic materials 0.000 description 5
• 239000000463 material Substances 0.000 description 5
• 229920000642 polymer Polymers 0.000 description 5
• 229910052682 stishovite Inorganic materials 0.000 description 5
• 229910052905 tridymite Inorganic materials 0.000 description 5
• 229940125904 compound 1 Drugs 0.000 description 4
• 229910052593 corundum Inorganic materials 0.000 description 3
• 239000000395 magnesium oxide Substances 0.000 description 3
• 239000011812 mixed powder Substances 0.000 description 3
• 235000012239 silicon dioxide Nutrition 0.000 description 3
• 229910001845 yogo sapphire Inorganic materials 0.000 description 3
• LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 238000000206 photolithography Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 2
• 239000000758 substrate Substances 0.000 description 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 229920006243 acrylic copolymer Polymers 0.000 description 1
• 229910052783 alkali metal Inorganic materials 0.000 description 1
• 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
• 150000001340 alkali metals Chemical class 0.000 description 1
• 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
• 150000001342 alkaline earth metals Chemical class 0.000 description 1
• 229910052661 anorthite Inorganic materials 0.000 description 1
• 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
• 229910001597 celsian Inorganic materials 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 229940125782 compound 2 Drugs 0.000 description 1
• 229940126214 compound 3 Drugs 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000010304 firing Methods 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 230000003287 optical effect Effects 0.000 description 1
• 229910052596 spinel Inorganic materials 0.000 description 1
• 239000011029 spinel Substances 0.000 description 1
• 238000004381 surface treatment Methods 0.000 description 1