JP2003017691A5 - - Google Patents

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Publication number
JP2003017691A5
JP2003017691A5 JP2001201280A JP2001201280A JP2003017691A5 JP 2003017691 A5 JP2003017691 A5 JP 2003017691A5 JP 2001201280 A JP2001201280 A JP 2001201280A JP 2001201280 A JP2001201280 A JP 2001201280A JP 2003017691 A5 JP2003017691 A5 JP 2003017691A5
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JP
Japan
Prior art keywords
element isolation
region
type element
substrate
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001201280A
Other languages
English (en)
Japanese (ja)
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JP2003017691A (ja
JP3798659B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2001201280A external-priority patent/JP3798659B2/ja
Priority to JP2001201280A priority Critical patent/JP3798659B2/ja
Priority to US10/132,520 priority patent/US6632723B2/en
Priority to EP02009262A priority patent/EP1253634A3/en
Priority to CNB021410828A priority patent/CN1230905C/zh
Priority to TW091108721A priority patent/TW544911B/zh
Priority to KR10-2002-0023055A priority patent/KR100525331B1/ko
Publication of JP2003017691A publication Critical patent/JP2003017691A/ja
Publication of JP2003017691A5 publication Critical patent/JP2003017691A5/ja
Publication of JP3798659B2 publication Critical patent/JP3798659B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001201280A 2001-04-26 2001-07-02 メモリ集積回路 Expired - Fee Related JP3798659B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2001201280A JP3798659B2 (ja) 2001-07-02 2001-07-02 メモリ集積回路
TW091108721A TW544911B (en) 2001-04-26 2002-04-26 Semiconductor device
EP02009262A EP1253634A3 (en) 2001-04-26 2002-04-26 Semiconductor device
CNB021410828A CN1230905C (zh) 2001-04-26 2002-04-26 半导体器件
US10/132,520 US6632723B2 (en) 2001-04-26 2002-04-26 Semiconductor device
KR10-2002-0023055A KR100525331B1 (ko) 2001-04-26 2002-04-26 반도체 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001201280A JP3798659B2 (ja) 2001-07-02 2001-07-02 メモリ集積回路

Publications (3)

Publication Number Publication Date
JP2003017691A JP2003017691A (ja) 2003-01-17
JP2003017691A5 true JP2003017691A5 (enrdf_load_stackoverflow) 2005-07-28
JP3798659B2 JP3798659B2 (ja) 2006-07-19

Family

ID=19038276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001201280A Expired - Fee Related JP3798659B2 (ja) 2001-04-26 2001-07-02 メモリ集積回路

Country Status (1)

Country Link
JP (1) JP3798659B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4044510B2 (ja) * 2003-10-30 2008-02-06 株式会社東芝 半導体集積回路装置
JP4058403B2 (ja) 2003-11-21 2008-03-12 株式会社東芝 半導体装置
KR100618698B1 (ko) * 2004-06-21 2006-09-08 주식회사 하이닉스반도체 반도체 소자 및 그의 제조방법
KR100702014B1 (ko) * 2005-05-03 2007-03-30 삼성전자주식회사 수직 채널 트랜지스터 구조를 갖는 단일 트랜지스터 플로팅바디 디램 소자들 및 그 제조방법들
JP4660324B2 (ja) * 2005-09-06 2011-03-30 株式会社東芝 Ｆｂｃメモリ装置
JP2007194259A (ja) * 2006-01-17 2007-08-02 Toshiba Corp 半導体装置及びその製造方法
KR100900232B1 (ko) 2007-05-22 2009-05-29 주식회사 하이닉스반도체 반도체 소자 및 그의 제조방법
JP2009117518A (ja) 2007-11-05 2009-05-28 Toshiba Corp 半導体記憶装置およびその製造方法

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