JP2002541444A5 - - Google Patents

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Publication number
JP2002541444A5
JP2002541444A5 JP2000609757A JP2000609757A JP2002541444A5 JP 2002541444 A5 JP2002541444 A5 JP 2002541444A5 JP 2000609757 A JP2000609757 A JP 2000609757A JP 2000609757 A JP2000609757 A JP 2000609757A JP 2002541444 A5 JP2002541444 A5 JP 2002541444A5
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JP
Japan
Prior art keywords
stylus holder
stylus
transducer
probe according
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000609757A
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English (en)
Japanese (ja)
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JP2002541444A (ja
JP4726303B2 (ja
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Publication date
Priority claimed from GBGB9907643.2A external-priority patent/GB9907643D0/en
Application filed filed Critical
Publication of JP2002541444A publication Critical patent/JP2002541444A/ja
Publication of JP2002541444A5 publication Critical patent/JP2002541444A5/ja
Application granted granted Critical
Publication of JP4726303B2 publication Critical patent/JP4726303B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000609757A 1999-04-06 2000-04-06 ダイアフラムおよびモジュールを備えた測定プローブ Expired - Lifetime JP4726303B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9907643.2A GB9907643D0 (en) 1999-04-06 1999-04-06 Measuring probe
GB9907643.2 1999-04-06
PCT/GB2000/001309 WO2000060307A1 (en) 1999-04-06 2000-04-06 Measuring probe with diaphragms and modules

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007101061A Division JP5210536B2 (ja) 1999-04-06 2007-04-06 測定プローブ

Publications (3)

Publication Number Publication Date
JP2002541444A JP2002541444A (ja) 2002-12-03
JP2002541444A5 true JP2002541444A5 (enExample) 2007-06-14
JP4726303B2 JP4726303B2 (ja) 2011-07-20

Family

ID=10850899

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000609757A Expired - Lifetime JP4726303B2 (ja) 1999-04-06 2000-04-06 ダイアフラムおよびモジュールを備えた測定プローブ
JP2007101061A Expired - Lifetime JP5210536B2 (ja) 1999-04-06 2007-04-06 測定プローブ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2007101061A Expired - Lifetime JP5210536B2 (ja) 1999-04-06 2007-04-06 測定プローブ

Country Status (6)

Country Link
US (2) US6430833B1 (enExample)
EP (2) EP1086352B1 (enExample)
JP (2) JP4726303B2 (enExample)
DE (1) DE60015465T2 (enExample)
GB (1) GB9907643D0 (enExample)
WO (1) WO2000060307A1 (enExample)

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GB9907643D0 (en) * 1999-04-06 1999-05-26 Renishaw Plc Measuring probe
WO2001096809A1 (en) 2000-06-16 2001-12-20 Renishaw Plc Force sensing probe
GB0102324D0 (en) 2001-01-30 2001-03-14 Renishaw Plc Capacitance type displacement responsive device and a suspension system for a displacement responsive device
DE10122200A1 (de) † 2001-05-08 2002-11-14 Zeiss Carl Tastkopf für ein Koordinatenmeßgerät. Koordinatenmeßgerät, Kalibrierkörper für ein Koordinatenmeßgerät und Verfahren zum Kalibrieren eines Koordinatenmeßgerätes
GB0201845D0 (en) 2002-01-26 2002-03-13 Renishaw Plc Analogue probe
US20040125382A1 (en) * 2002-12-30 2004-07-01 Banks Anton G. Optically triggered probe
WO2004068068A1 (de) * 2003-01-31 2004-08-12 Carl Zeiss Industrielle Messtechnik Gmbh Tastkopf für ein koordinatenmessgerät
US6772527B1 (en) 2003-04-09 2004-08-10 Renishaw Plc Modular measurement device
US7281920B2 (en) * 2005-03-28 2007-10-16 Komag, Inc. Die set utilizing compliant gasket
JP4663378B2 (ja) * 2005-04-01 2011-04-06 パナソニック株式会社 形状測定装置及び方法
GB0508395D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Method for scanning the surface of a workpiece
GB0508388D0 (en) 2005-04-26 2005-06-01 Renishaw Plc Surface sensing device with optical sensor
DE102005036126A1 (de) * 2005-07-26 2007-02-01 Carl Zeiss Industrielle Messtechnik Gmbh Sensormodul für einen Tastkopf eines taktilen Koordinatenmessgerätes
GB0608998D0 (en) * 2006-05-08 2006-06-14 Renishaw Plc Contact sensing probe
JP5276803B2 (ja) * 2007-06-11 2013-08-28 パナソニック株式会社 形状測定方法
EP2028439A1 (en) * 2007-07-26 2009-02-25 Renishaw plc Deactivatable measurement apparatus
TWI417515B (zh) * 2007-08-03 2013-12-01 Hon Hai Prec Ind Co Ltd 高度儀
DE102008038134A1 (de) 2007-09-13 2009-04-16 Hexagon Metrology Gmbh Tastkopf
JP5221211B2 (ja) * 2008-06-02 2013-06-26 パナソニック株式会社 形状測定装置
JP5209440B2 (ja) * 2008-10-30 2013-06-12 独立行政法人理化学研究所 形状測定プローブ
JP2010160002A (ja) * 2009-01-07 2010-07-22 Mitsutoyo Corp 変位センサ、及び測定機
EP2665988B1 (en) 2011-01-19 2015-08-12 Renishaw Plc. Analogue measurement probe for a machine tool apparatus
JP6063233B2 (ja) * 2012-12-05 2017-01-18 株式会社ミツトヨ 測定子支持機構及びプローブ
JP6049785B2 (ja) 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
JP6039718B2 (ja) * 2015-03-05 2016-12-07 株式会社ミツトヨ 測定プローブ
JP6049786B2 (ja) 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
US9803972B2 (en) 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US10101141B2 (en) 2016-12-07 2018-10-16 Mitutoyo Corporation Trigger counter for measurement device with count values stored in flash memory
US11428589B2 (en) * 2017-10-16 2022-08-30 Saf-Holland, Inc. Displacement sensor utilizing ronchi grating interference
KR102522627B1 (ko) * 2020-09-17 2023-04-17 주식회사 제이시스메디칼 초음파 발생부의 집속 깊이의 변경이 가능한 초음파 의료 장치
CN112757631B (zh) * 2020-12-21 2022-11-11 深圳市创想三维科技股份有限公司 一种3d打印机的自动调平装置及3d打印机
WO2022175653A1 (en) * 2021-02-17 2022-08-25 Renishaw Plc Metrology apparatus and corresponding operating method
CN113937593B (zh) * 2021-09-23 2025-09-05 吾拾微电子(苏州)有限公司 一种探针卡针脚修复整形装置

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US4187614A (en) 1978-08-04 1980-02-12 Mitsubishi Jukogyo Kabushiki Kaisha Tracer head
US4443946A (en) * 1980-07-01 1984-04-24 Renishaw Electrical Limited Probe for measuring workpieces
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DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
JPH0617766B2 (ja) * 1984-08-23 1994-03-09 株式会社ミツトヨ タッチ信号プロ−ブ
US4625417A (en) * 1985-06-17 1986-12-02 Gte Valeron Corporation Probe with stylus pressure adjustment
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DE3834117A1 (de) * 1988-10-07 1990-04-12 Zeiss Carl Fa Koordinatenmessgeraet mit einem optischen tastkopf
US5088208A (en) 1988-10-11 1992-02-18 Renishaw Plc Measurement probe for position determining apparatus
US4896543A (en) * 1988-11-15 1990-01-30 Sri International, Inc. Three-axis force measurement stylus
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US5209131A (en) 1989-11-03 1993-05-11 Rank Taylor Hobson Metrology
US5010773A (en) * 1990-01-24 1991-04-30 Wisconsin Alumni Research Foundation Sensor tip for a robotic gripper and method of manufacture
GB9001682D0 (en) * 1990-01-25 1990-03-28 Renishaw Plc Position sensing probe
GB9004117D0 (en) * 1990-02-23 1990-04-18 Renishaw Plc Touch probe
US5491904A (en) * 1990-02-23 1996-02-20 Mcmurtry; David R. Touch probe
US5339535A (en) * 1990-02-23 1994-08-23 Renishaw Metrology Limited Touch probe
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
DE69201985T2 (de) 1991-02-25 1995-08-24 Renishaw Metrology Ltd Kontaktprobe.
GB9111382D0 (en) * 1991-05-25 1991-07-17 Renishaw Metrology Ltd Improvements in measuring probes
EP0517653B1 (de) * 1991-06-07 1997-03-05 Saphirwerk Industrieprodukte AG Tastmesskopf
GB9116044D0 (en) * 1991-07-24 1991-09-11 Nat Res Dev Probes
GB9117974D0 (en) * 1991-08-20 1991-10-09 Renishaw Metrology Ltd Non-contact trigger probe
JPH0792373B2 (ja) * 1991-09-25 1995-10-09 株式会社ミツトヨ タッチ信号プローブ
EP0566719B1 (en) * 1991-11-09 1997-02-19 Renishaw Metrology Limited Touch probe
DE4217641C2 (de) * 1992-05-28 1997-07-17 Wolfgang Madlener Tastkopf zum dreidimensionalen Antasten von Werkstücken
EP0605140B2 (en) * 1992-12-24 2002-10-09 Renishaw plc Touch probe and signal processing circuit therefor
DE4325743C1 (de) * 1993-07-31 1994-09-08 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Tastkopf
GB9423176D0 (en) * 1994-11-17 1995-01-04 Renishaw Plc Touch probe
IT1299955B1 (it) * 1998-04-06 2000-04-04 Marposs Spa Testa per il controllo di dimensioni lineari di pezzi.
US6430828B1 (en) * 1998-04-17 2002-08-13 Electronic Measuring Devices, Inc. Coordinate positioning apparatus with indexable stylus, components thereof, and method of using it
GB9907643D0 (en) * 1999-04-06 1999-05-26 Renishaw Plc Measuring probe
WO2001096809A1 (en) * 2000-06-16 2001-12-20 Renishaw Plc Force sensing probe

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