DE60015465T2 - Messarm mit membranen (modulen) - Google Patents

Messarm mit membranen (modulen) Download PDF

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Publication number
DE60015465T2
DE60015465T2 DE60015465T DE60015465T DE60015465T2 DE 60015465 T2 DE60015465 T2 DE 60015465T2 DE 60015465 T DE60015465 T DE 60015465T DE 60015465 T DE60015465 T DE 60015465T DE 60015465 T2 DE60015465 T2 DE 60015465T2
Authority
DE
Germany
Prior art keywords
probe
holder
plane
stylus
probe according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60015465T
Other languages
German (de)
English (en)
Other versions
DE60015465D1 (de
Inventor
Andrew Geoffrey Butter
David Roberts Mcmurtry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE60015465D1 publication Critical patent/DE60015465D1/de
Application granted granted Critical
Publication of DE60015465T2 publication Critical patent/DE60015465T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/03—Photoelectric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE60015465T 1999-04-06 2000-04-06 Messarm mit membranen (modulen) Expired - Lifetime DE60015465T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9907643.2A GB9907643D0 (en) 1999-04-06 1999-04-06 Measuring probe
GB9907643 1999-04-06
PCT/GB2000/001309 WO2000060307A1 (en) 1999-04-06 2000-04-06 Measuring probe with diaphragms and modules

Publications (2)

Publication Number Publication Date
DE60015465D1 DE60015465D1 (de) 2004-12-09
DE60015465T2 true DE60015465T2 (de) 2005-03-24

Family

ID=10850899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60015465T Expired - Lifetime DE60015465T2 (de) 1999-04-06 2000-04-06 Messarm mit membranen (modulen)

Country Status (6)

Country Link
US (2) US6430833B1 (enExample)
EP (2) EP1086352B1 (enExample)
JP (2) JP4726303B2 (enExample)
DE (1) DE60015465T2 (enExample)
GB (1) GB9907643D0 (enExample)
WO (1) WO2000060307A1 (enExample)

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GB9907643D0 (en) * 1999-04-06 1999-05-26 Renishaw Plc Measuring probe
WO2001096809A1 (en) 2000-06-16 2001-12-20 Renishaw Plc Force sensing probe
GB0102324D0 (en) * 2001-01-30 2001-03-14 Renishaw Plc Capacitance type displacement responsive device and a suspension system for a displacement responsive device
DE10122200A1 (de) † 2001-05-08 2002-11-14 Zeiss Carl Tastkopf für ein Koordinatenmeßgerät. Koordinatenmeßgerät, Kalibrierkörper für ein Koordinatenmeßgerät und Verfahren zum Kalibrieren eines Koordinatenmeßgerätes
GB0201845D0 (en) 2002-01-26 2002-03-13 Renishaw Plc Analogue probe
US20040125382A1 (en) * 2002-12-30 2004-07-01 Banks Anton G. Optically triggered probe
WO2004068068A1 (de) * 2003-01-31 2004-08-12 Carl Zeiss Industrielle Messtechnik Gmbh Tastkopf für ein koordinatenmessgerät
US6772527B1 (en) 2003-04-09 2004-08-10 Renishaw Plc Modular measurement device
US7281920B2 (en) * 2005-03-28 2007-10-16 Komag, Inc. Die set utilizing compliant gasket
JP4663378B2 (ja) * 2005-04-01 2011-04-06 パナソニック株式会社 形状測定装置及び方法
GB0508395D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Method for scanning the surface of a workpiece
GB0508388D0 (en) 2005-04-26 2005-06-01 Renishaw Plc Surface sensing device with optical sensor
DE102005036126A1 (de) * 2005-07-26 2007-02-01 Carl Zeiss Industrielle Messtechnik Gmbh Sensormodul für einen Tastkopf eines taktilen Koordinatenmessgerätes
GB0608998D0 (en) * 2006-05-08 2006-06-14 Renishaw Plc Contact sensing probe
JP5276803B2 (ja) * 2007-06-11 2013-08-28 パナソニック株式会社 形状測定方法
EP2028439A1 (en) * 2007-07-26 2009-02-25 Renishaw plc Deactivatable measurement apparatus
TWI417515B (zh) * 2007-08-03 2013-12-01 Hon Hai Prec Ind Co Ltd 高度儀
DE102008038134A1 (de) 2007-09-13 2009-04-16 Hexagon Metrology Gmbh Tastkopf
JP5221211B2 (ja) * 2008-06-02 2013-06-26 パナソニック株式会社 形状測定装置
JP5209440B2 (ja) * 2008-10-30 2013-06-12 独立行政法人理化学研究所 形状測定プローブ
JP2010160002A (ja) * 2009-01-07 2010-07-22 Mitsutoyo Corp 変位センサ、及び測定機
US9454145B2 (en) 2011-01-19 2016-09-27 Renishaw Plc Analogue measurement probe for a machine tool apparatus and method of operation
JP6063233B2 (ja) * 2012-12-05 2017-01-18 株式会社ミツトヨ 測定子支持機構及びプローブ
JP6049786B2 (ja) 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
JP6049785B2 (ja) * 2015-03-05 2016-12-21 株式会社ミツトヨ 測定プローブ
JP6039718B2 (ja) * 2015-03-05 2016-12-07 株式会社ミツトヨ 測定プローブ
US9803972B2 (en) 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
US10101141B2 (en) 2016-12-07 2018-10-16 Mitutoyo Corporation Trigger counter for measurement device with count values stored in flash memory
US11428589B2 (en) * 2017-10-16 2022-08-30 Saf-Holland, Inc. Displacement sensor utilizing ronchi grating interference
KR102522627B1 (ko) * 2020-09-17 2023-04-17 주식회사 제이시스메디칼 초음파 발생부의 집속 깊이의 변경이 가능한 초음파 의료 장치
CN112757631B (zh) * 2020-12-21 2022-11-11 深圳市创想三维科技股份有限公司 一种3d打印机的自动调平装置及3d打印机
US20240159508A1 (en) * 2021-02-17 2024-05-16 Renishaw Plc Metrology apparatus
CN113937593B (zh) * 2021-09-23 2025-09-05 吾拾微电子(苏州)有限公司 一种探针卡针脚修复整形装置

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US4110611A (en) * 1975-12-17 1978-08-29 Candid Logic, Inc. Optical position transducer
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GB1593682A (en) * 1977-01-20 1981-07-22 Rolls Royce Probe for use in mearusing apparatus
US4187614A (en) 1978-08-04 1980-02-12 Mitsubishi Jukogyo Kabushiki Kaisha Tracer head
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DE3229992C2 (de) * 1982-08-12 1986-02-06 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
JPH0617766B2 (ja) * 1984-08-23 1994-03-09 株式会社ミツトヨ タッチ信号プロ−ブ
US4625417A (en) * 1985-06-17 1986-12-02 Gte Valeron Corporation Probe with stylus pressure adjustment
US4734994A (en) * 1986-12-22 1988-04-05 Gte Valeron Corporation Probe having a plurality of hinged plates
US4752166A (en) * 1987-01-02 1988-06-21 Manuflex Corp. Probing device
US5154002A (en) * 1987-02-26 1992-10-13 Klaus Ulbrich Probe, motion guiding device, position sensing apparatus, and position sensing method
GB8728500D0 (en) * 1987-12-05 1988-01-13 Renishaw Plc Position sensing probe
CH674485A5 (enExample) * 1988-03-11 1990-06-15 Saphirwerk Ind Prod
GB8815984D0 (en) * 1988-07-05 1988-08-10 Univ Brunel Probes
DE3824548A1 (de) * 1988-07-20 1990-01-25 Zeiss Carl Fa Verfahren und einrichtung fuer den betrieb eines tastkopfes vom schaltenden typ
DE3834117A1 (de) * 1988-10-07 1990-04-12 Zeiss Carl Fa Koordinatenmessgeraet mit einem optischen tastkopf
DE68914148T2 (de) 1988-10-11 1994-07-07 Renishaw Plc Messsonde mit Lagern, deren Rollelemente zentralisiert sind.
US4896543A (en) * 1988-11-15 1990-01-30 Sri International, Inc. Three-axis force measurement stylus
JPH0789045B2 (ja) * 1988-12-15 1995-09-27 富山県 三次元変位量測定器
US5209131A (en) 1989-11-03 1993-05-11 Rank Taylor Hobson Metrology
US5010773A (en) * 1990-01-24 1991-04-30 Wisconsin Alumni Research Foundation Sensor tip for a robotic gripper and method of manufacture
GB9001682D0 (en) * 1990-01-25 1990-03-28 Renishaw Plc Position sensing probe
US5339535A (en) * 1990-02-23 1994-08-23 Renishaw Metrology Limited Touch probe
US5491904A (en) * 1990-02-23 1996-02-20 Mcmurtry; David R. Touch probe
GB9004117D0 (en) * 1990-02-23 1990-04-18 Renishaw Plc Touch probe
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
EP0501710B1 (en) 1991-02-25 1995-04-12 Renishaw Metrology Limited Touch probe
GB9111382D0 (en) 1991-05-25 1991-07-17 Renishaw Metrology Ltd Improvements in measuring probes
DE59208088D1 (de) * 1991-06-07 1997-04-10 Saphirwerk Ind Prod Tastmesskopf
GB9116044D0 (en) * 1991-07-24 1991-09-11 Nat Res Dev Probes
GB9117974D0 (en) 1991-08-20 1991-10-09 Renishaw Metrology Ltd Non-contact trigger probe
JPH0792373B2 (ja) * 1991-09-25 1995-10-09 株式会社ミツトヨ タッチ信号プローブ
JP3279317B2 (ja) * 1991-11-09 2002-04-30 レニショウ メタロジィ リミテッド 接触プローブ
DE4217641C2 (de) * 1992-05-28 1997-07-17 Wolfgang Madlener Tastkopf zum dreidimensionalen Antasten von Werkstücken
DE69323289T3 (de) * 1992-12-24 2003-04-24 Renishaw Plc, Wotton-Under-Edge Tastsonde und Signalverarbeitungsschaltung dafür
DE4325743C1 (de) * 1993-07-31 1994-09-08 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Tastkopf
GB9423176D0 (en) 1994-11-17 1995-01-04 Renishaw Plc Touch probe
IT1299955B1 (it) * 1998-04-06 2000-04-04 Marposs Spa Testa per il controllo di dimensioni lineari di pezzi.
US6430828B1 (en) * 1998-04-17 2002-08-13 Electronic Measuring Devices, Inc. Coordinate positioning apparatus with indexable stylus, components thereof, and method of using it
GB9907643D0 (en) * 1999-04-06 1999-05-26 Renishaw Plc Measuring probe
WO2001096809A1 (en) * 2000-06-16 2001-12-20 Renishaw Plc Force sensing probe

Also Published As

Publication number Publication date
DE60015465D1 (de) 2004-12-09
US6430833B1 (en) 2002-08-13
EP1086352B1 (en) 2004-11-03
EP1505362A1 (en) 2005-02-09
EP1505362B1 (en) 2015-11-18
JP4726303B2 (ja) 2011-07-20
WO2000060307A1 (en) 2000-10-12
US7146741B2 (en) 2006-12-12
JP2002541444A (ja) 2002-12-03
EP1086352A1 (en) 2001-03-28
JP2007183294A (ja) 2007-07-19
GB9907643D0 (en) 1999-05-26
JP5210536B2 (ja) 2013-06-12
US20020174556A1 (en) 2002-11-28

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8364 No opposition during term of opposition