JP2002528905A5 - - Google Patents
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- Publication number
- JP2002528905A5 JP2002528905A5 JP2000578676A JP2000578676A JP2002528905A5 JP 2002528905 A5 JP2002528905 A5 JP 2002528905A5 JP 2000578676 A JP2000578676 A JP 2000578676A JP 2000578676 A JP2000578676 A JP 2000578676A JP 2002528905 A5 JP2002528905 A5 JP 2002528905A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IL12677198A IL126771A0 (en) | 1998-10-26 | 1998-10-26 | Improved optical systems |
| IL126771 | 1998-10-26 | ||
| PCT/IL1999/000565 WO2000025153A2 (en) | 1998-10-26 | 1999-10-26 | Simultaneously achieving circular symmetry and diminishing effects of optical defects and deviations during real time use of optical devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002528905A JP2002528905A (ja) | 2002-09-03 |
| JP2002528905A5 true JP2002528905A5 (enExample) | 2006-01-05 |
Family
ID=11072073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000578676A Pending JP2002528905A (ja) | 1998-10-26 | 1999-10-26 | 光学デバイスの実時間使用中に、円対称の実現と同時に、光学的欠陥および光学的偏差の影響の低減 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6807022B1 (enExample) |
| EP (1) | EP1208399A4 (enExample) |
| JP (1) | JP2002528905A (enExample) |
| KR (1) | KR100475658B1 (enExample) |
| AU (1) | AU6365399A (enExample) |
| HK (1) | HK1044821A1 (enExample) |
| IL (1) | IL126771A0 (enExample) |
| WO (1) | WO2000025153A2 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL126771A0 (en) * | 1998-10-26 | 1999-08-17 | Yanowitz Shimon | Improved optical systems |
| KR100574963B1 (ko) * | 2003-12-29 | 2006-04-28 | 삼성전자주식회사 | 파장가변 레이저 장치를 구비한 광학적 임계치수 측정장치및 그 측정장치를 이용한 임계치수 측정방법 |
| US7133225B1 (en) * | 2004-10-18 | 2006-11-07 | Carl Zeiss Smt Ag | Method of manufacturing an optical system |
| JP2007199406A (ja) * | 2006-01-26 | 2007-08-09 | Fujinon Corp | 屈曲光学ユニット |
| KR20120026102A (ko) * | 2009-05-22 | 2012-03-16 | 씨8 메디센서스, 인크. | 두 쌍의 동일한 요소를 구비한, 대형 시계, 고 개구수 복합 대물 렌즈 및 이러한 복합 렌즈를 포함하는 적외선 분광기 |
| KR101669214B1 (ko) | 2010-12-31 | 2016-10-25 | 삼성전자주식회사 | 바이모르프 액츄에이터를 채용한 렌즈 스캐닝 장치 |
| TWI432871B (zh) * | 2011-03-01 | 2014-04-01 | Altek Corp | 自動對焦鏡頭模組及其校準的方法 |
| WO2012157546A1 (ja) * | 2011-05-13 | 2012-11-22 | ローム株式会社 | プロジェクタ |
| US9760012B2 (en) * | 2011-08-04 | 2017-09-12 | Nikon Corporation | Illumination device |
| DE102011054087B4 (de) * | 2011-09-30 | 2018-08-30 | Carl Zeiss Microscopy Gmbh | Optische Bildstabilisierungsvorrichtung und optisches Beobachtungsgerät |
| US9219890B1 (en) * | 2012-08-22 | 2015-12-22 | The United States Of America As Represented By The Secretary Of The Navy | Optical surface analysis system and method |
| US10725287B2 (en) * | 2013-06-11 | 2020-07-28 | Nlight, Inc. | Image rotation compensation for multiple beam material processing |
| US10121236B2 (en) * | 2016-10-26 | 2018-11-06 | Himax Technologies Limited | Automatic alignment apparatus and associated method |
| JP6959073B2 (ja) * | 2017-08-30 | 2021-11-02 | 株式会社ディスコ | レーザー加工装置 |
| CN113544830A (zh) * | 2019-03-08 | 2021-10-22 | 科磊股份有限公司 | 偏移测量的动态改善 |
| US11551980B2 (en) * | 2019-03-08 | 2023-01-10 | Kla-Tencor Corporation | Dynamic amelioration of misregistration measurement |
| US12320629B2 (en) * | 2020-06-01 | 2025-06-03 | Lg Electronics Inc. | Thin film characteristic measuring apparatus |
| KR102524991B1 (ko) * | 2021-04-19 | 2023-04-28 | (주)이즈미디어 | 영상 프레임과 함께 주변 장치의 상태 정보를 저장하는 프레임 그래버 시스템 및 이를 이용한 카메라모듈 검사 방법, 컴퓨터 프로그램 및 컴퓨터 판독가능 기록 매체 |
| US12406891B2 (en) * | 2021-09-30 | 2025-09-02 | International Business Machines Corporation | Characterization of asymmetric material deposition for metrology |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2352179A (en) | 1944-06-27 | Lens centering device | ||
| GB1147521A (en) * | 1966-07-11 | 1969-04-02 | British Scient Instr Res Ass | Lens centring apparatus |
| US3432218A (en) * | 1966-09-30 | 1969-03-11 | Goodyear Aerospace Corp | High speed mechanical variable amplitude nutating mechanism |
| US3482102A (en) * | 1967-02-20 | 1969-12-02 | Conductron Corp | Coherent optical noise suppression by optical alignment of spatial filter |
| US3533700A (en) | 1968-03-12 | 1970-10-13 | Technidyne Inc | Optical alignment methods and means utilizing coordinated laser beams and laser beam coordinating means for same |
| US3620591A (en) * | 1969-07-22 | 1971-11-16 | Atlantic Richfield Co | Optical processing of data |
| US3762821A (en) | 1971-01-25 | 1973-10-02 | Bell Telephone Labor Inc | Lens assembly |
| US3782829A (en) * | 1972-06-28 | 1974-01-01 | Bell Telephone Labor Inc | Lens alignment apparatus and method |
| US4525041A (en) * | 1982-02-24 | 1985-06-25 | Precision Grinding Limited | Arrangement for use in positioning an optical image |
| US4504110A (en) * | 1983-05-19 | 1985-03-12 | Rockwell International Corporation | Converging beam linear optical scanner |
| US4695975A (en) * | 1984-10-23 | 1987-09-22 | Profit Technology, Inc. | Multi-image communications system |
| JPH0421830A (ja) * | 1990-05-16 | 1992-01-24 | Canon Inc | カメラ用画像振れ防止アダプタ装置 |
| US5233197A (en) | 1991-07-15 | 1993-08-03 | University Of Massachusetts Medical Center | High speed digital imaging microscope |
| EP0602732A3 (en) * | 1992-12-17 | 1995-09-27 | Philips Electronics Nv | Optical system with astigmatism compensation. |
| JP3208902B2 (ja) | 1993-03-11 | 2001-09-17 | ミノルタ株式会社 | レンズ系光軸調整装置及びレンズ系光軸調整方法 |
| JP3067966B2 (ja) * | 1993-12-06 | 2000-07-24 | 松下電器産業株式会社 | 画像部品を検索する装置及びその方法 |
| US5400133A (en) | 1994-03-04 | 1995-03-21 | Xerox Corporation | Alignment method and apparatus for optical imaging systems |
| US5610771A (en) * | 1994-08-01 | 1997-03-11 | Lockheed Missiles & Space Company, Inc. | Non-deviating prism with continuously variable dispersion |
| JPH08160484A (ja) * | 1994-12-05 | 1996-06-21 | Nikon Corp | 像振れ補正装置 |
| JPH08327895A (ja) | 1995-05-26 | 1996-12-13 | Nikon Corp | 投影光学装置 |
| JPH09105973A (ja) * | 1995-10-12 | 1997-04-22 | Sony Corp | 手振れ補正光学装置 |
| US5835208A (en) | 1997-05-27 | 1998-11-10 | Raytheon Company | Apparatus to measure wedge and centering error in optical elements |
| WO1999004686A1 (en) * | 1997-07-22 | 1999-02-04 | Milner John A | Apparatus and method for language translation between patient and caregiver, and for communication with speech deficient patients |
| US6091548A (en) * | 1997-10-01 | 2000-07-18 | Raytheon Company | Optical system with two-stage aberration correction |
| US6320705B1 (en) * | 1998-01-15 | 2001-11-20 | George Dube' | Adjustable optical wedge |
| US6129435A (en) * | 1998-04-09 | 2000-10-10 | Nike, Inc. | Decentered protective eyewear |
| US6975399B2 (en) * | 1998-08-28 | 2005-12-13 | Nikon Corporation | mark position detecting apparatus |
| IL126771A0 (en) * | 1998-10-26 | 1999-08-17 | Yanowitz Shimon | Improved optical systems |
| AU2001252882A1 (en) * | 2000-02-01 | 2001-08-14 | Soquel Technology, Inc. | Single channel m x n optical fiber switch |
| US20040042094A1 (en) * | 2000-12-28 | 2004-03-04 | Tomoyuki Matsuyama | Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice |
| DE10209938A1 (de) * | 2002-03-06 | 2003-09-25 | Leica Microsystems | Axial verschiebbare Justierfassung für optische Bauteile sowie Verfahren zu ihrer Herstellung |
-
1998
- 1998-10-26 IL IL12677198A patent/IL126771A0/xx unknown
-
1999
- 1999-10-26 KR KR10-2001-7005174A patent/KR100475658B1/ko not_active Expired - Fee Related
- 1999-10-26 JP JP2000578676A patent/JP2002528905A/ja active Pending
- 1999-10-26 HK HK02106404.5A patent/HK1044821A1/zh unknown
- 1999-10-26 US US09/830,076 patent/US6807022B1/en not_active Expired - Fee Related
- 1999-10-26 AU AU63653/99A patent/AU6365399A/en not_active Abandoned
- 1999-10-26 WO PCT/IL1999/000565 patent/WO2000025153A2/en not_active Ceased
- 1999-10-26 EP EP99951082A patent/EP1208399A4/en not_active Withdrawn
-
2004
- 2004-07-12 US US10/888,013 patent/US20050018289A1/en not_active Abandoned