JP2002525676A - 自制形マイクロメカニカル素子を備える二重基板反射性空間光変調器 - Google Patents
自制形マイクロメカニカル素子を備える二重基板反射性空間光変調器Info
- Publication number
- JP2002525676A JP2002525676A JP2000571299A JP2000571299A JP2002525676A JP 2002525676 A JP2002525676 A JP 2002525676A JP 2000571299 A JP2000571299 A JP 2000571299A JP 2000571299 A JP2000571299 A JP 2000571299A JP 2002525676 A JP2002525676 A JP 2002525676A
- Authority
- JP
- Japan
- Prior art keywords
- spatial light
- light modulator
- mirror
- layer
- transmissive substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 136
- 238000000034 method Methods 0.000 claims description 67
- 230000008569 process Effects 0.000 claims description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 26
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- 229910052581 Si3N4 Inorganic materials 0.000 claims description 23
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 22
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000000670 limiting effect Effects 0.000 claims description 5
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- 230000005670 electromagnetic radiation Effects 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 126
- 235000012239 silicon dioxide Nutrition 0.000 description 24
- 239000011241 protective layer Substances 0.000 description 19
- 238000013461 design Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 230000006870 function Effects 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 12
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 11
- 239000000377 silicon dioxide Substances 0.000 description 10
- 230000008901 benefit Effects 0.000 description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 230000002829 reductive effect Effects 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
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- 230000000903 blocking effect Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
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- WBPYTXDJUQJLPQ-VMXQISHHSA-N tylosin Chemical compound O([C@@H]1[C@@H](C)O[C@H]([C@@H]([C@H]1N(C)C)O)O[C@@H]1[C@@H](C)[C@H](O)CC(=O)O[C@@H]([C@H](/C=C(\C)/C=C/C(=O)[C@H](C)C[C@@H]1CC=O)CO[C@H]1[C@@H]([C@H](OC)[C@H](O)[C@@H](C)O1)OC)CC)[C@H]1C[C@@](C)(O)[C@@H](O)[C@H](C)O1 WBPYTXDJUQJLPQ-VMXQISHHSA-N 0.000 description 3
- 235000019375 tylosin Nutrition 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
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- 230000010354 integration Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
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- 238000000926 separation method Methods 0.000 description 2
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- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241000511976 Hoya Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000000352 supercritical drying Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1998/020161 WO2000017695A1 (en) | 1998-09-24 | 1998-09-24 | A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002525676A true JP2002525676A (ja) | 2002-08-13 |
| JP2002525676A5 JP2002525676A5 (OSRAM) | 2006-01-05 |
Family
ID=22267939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000571299A Pending JP2002525676A (ja) | 1998-09-24 | 1998-09-24 | 自制形マイクロメカニカル素子を備える二重基板反射性空間光変調器 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1116063B1 (OSRAM) |
| JP (1) | JP2002525676A (OSRAM) |
| KR (1) | KR100635589B1 (OSRAM) |
| CN (1) | CN1232858C (OSRAM) |
| AU (1) | AU9583798A (OSRAM) |
| DE (1) | DE69834847T2 (OSRAM) |
| WO (1) | WO2000017695A1 (OSRAM) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005316043A (ja) * | 2004-04-28 | 2005-11-10 | Yokohama Tlo Co Ltd | マイクロミラー素子及びその製造方法 |
| JP2006091849A (ja) * | 2004-09-27 | 2006-04-06 | Idc Llc | Ｍｅｍｓデバイスを実装するための方法及びシステム |
| JP2007510954A (ja) * | 2003-11-01 | 2007-04-26 | フサオ イシイ | 電気力学的マイクロミラー素子およびその製造方法 |
| JP2007511790A (ja) * | 2003-11-01 | 2007-05-10 | フサオ イシイ | 真空にパッケージされたマイクロミラー配列素子およびその製造方法 |
| JP2007514183A (ja) * | 2003-11-01 | 2007-05-31 | フサオ イシイ | 高性能マイクロミラー配列素子および高性能マイクロミラー配列素子の製造方法 |
| US7277217B1 (en) | 2006-03-01 | 2007-10-02 | Ricoh Company, Ltd. | Optical deflecting device, optical deflecting device manufacturing method, and optical projecting device |
| JP2007293331A (ja) * | 2006-04-06 | 2007-11-08 | Asml Netherlands Bv | 非線形バネによる大変形ｍｅｍｓミラーを用いる露光装置及びデバイス製造方法 |
| US7480090B2 (en) | 2005-10-20 | 2009-01-20 | Ricoh Company, Ltd. | Optical deflecting device, optical deflecting device array, method for driving the optical deflecting device and image projection display apparatus using the device |
| JP2018515926A (ja) * | 2015-05-07 | 2018-06-14 | 日本テキサス・インスツルメンツ株式会社 | 低応力低水素ｌｐｃｖｄシリコン窒化物 |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6611377B1 (en) | 2000-07-10 | 2003-08-26 | Intel Corporation | Micromechanical diffraction phase grating |
| US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
| TW593127B (en) | 2003-08-18 | 2004-06-21 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
| CN100549493C (zh) * | 2003-12-10 | 2009-10-14 | 硅光机器公司 | 二维空间光调制器 |
| US7573547B2 (en) | 2004-09-27 | 2009-08-11 | Idc, Llc | System and method for protecting micro-structure of display array using spacers in gap within display device |
| US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| BRPI0607880A2 (pt) * | 2005-02-23 | 2009-10-20 | Pixtronix Inc | aparelho de visualização e método de formação de uma imagem em um aparelho de visualização |
| US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
| US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
| US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
| US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
| CN101576656B (zh) * | 2005-02-23 | 2012-05-30 | 皮克斯特罗尼克斯公司 | 显示方法和装置 |
| US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| KR20120132680A (ko) | 2010-02-02 | 2012-12-07 | 픽스트로닉스 인코포레이티드 | 저온 실 유체 충전된 디스플레이 장치의 제조 방법 |
| WO2011097258A1 (en) | 2010-02-02 | 2011-08-11 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| CN102236224B (zh) * | 2010-04-30 | 2014-01-15 | 北京京东方光电科技有限公司 | 显示面板及制造方法和显示器 |
| US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
| TWI638419B (zh) * | 2016-04-18 | 2018-10-11 | 村田製作所股份有限公司 | 一種掃描鏡設備與其製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
| CH633902A5 (fr) * | 1980-03-11 | 1982-12-31 | Centre Electron Horloger | Dispositif de modulation de lumiere. |
| FR2710161B1 (fr) * | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
| US5454906A (en) * | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
| US5784190A (en) * | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
| US5808780A (en) * | 1997-06-09 | 1998-09-15 | Texas Instruments Incorporated | Non-contacting micromechanical optical switch |
-
1998
- 1998-09-24 AU AU95837/98A patent/AU9583798A/en not_active Abandoned
- 1998-09-24 DE DE69834847T patent/DE69834847T2/de not_active Expired - Lifetime
- 1998-09-24 CN CNB988142236A patent/CN1232858C/zh not_active Expired - Fee Related
- 1998-09-24 EP EP98949533A patent/EP1116063B1/en not_active Expired - Lifetime
- 1998-09-24 KR KR1020017003698A patent/KR100635589B1/ko not_active Expired - Lifetime
- 1998-09-24 WO PCT/US1998/020161 patent/WO2000017695A1/en not_active Ceased
- 1998-09-24 JP JP2000571299A patent/JP2002525676A/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007510954A (ja) * | 2003-11-01 | 2007-04-26 | フサオ イシイ | 電気力学的マイクロミラー素子およびその製造方法 |
| JP2007511790A (ja) * | 2003-11-01 | 2007-05-10 | フサオ イシイ | 真空にパッケージされたマイクロミラー配列素子およびその製造方法 |
| JP2007514183A (ja) * | 2003-11-01 | 2007-05-31 | フサオ イシイ | 高性能マイクロミラー配列素子および高性能マイクロミラー配列素子の製造方法 |
| JP2005316043A (ja) * | 2004-04-28 | 2005-11-10 | Yokohama Tlo Co Ltd | マイクロミラー素子及びその製造方法 |
| JP2006091849A (ja) * | 2004-09-27 | 2006-04-06 | Idc Llc | Ｍｅｍｓデバイスを実装するための方法及びシステム |
| JP2011018054A (ja) * | 2004-09-27 | 2011-01-27 | Qualcomm Mems Technologies Inc | Ｍｅｍｓデバイスを実装するための方法及びシステム |
| US7480090B2 (en) | 2005-10-20 | 2009-01-20 | Ricoh Company, Ltd. | Optical deflecting device, optical deflecting device array, method for driving the optical deflecting device and image projection display apparatus using the device |
| US7277217B1 (en) | 2006-03-01 | 2007-10-02 | Ricoh Company, Ltd. | Optical deflecting device, optical deflecting device manufacturing method, and optical projecting device |
| JP2007293331A (ja) * | 2006-04-06 | 2007-11-08 | Asml Netherlands Bv | 非線形バネによる大変形ｍｅｍｓミラーを用いる露光装置及びデバイス製造方法 |
| JP2018515926A (ja) * | 2015-05-07 | 2018-06-14 | 日本テキサス・インスツルメンツ株式会社 | 低応力低水素ｌｐｃｖｄシリコン窒化物 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1116063A1 (en) | 2001-07-18 |
| EP1116063A4 (en) | 2003-08-20 |
| WO2000017695A1 (en) | 2000-03-30 |
| DE69834847D1 (de) | 2006-07-20 |
| KR100635589B1 (ko) | 2006-10-18 |
| KR20010106484A (ko) | 2001-11-29 |
| CN1309782A (zh) | 2001-08-22 |
| DE69834847T2 (de) | 2007-02-15 |
| AU9583798A (en) | 2000-04-10 |
| CN1232858C (zh) | 2005-12-21 |
| EP1116063B1 (en) | 2006-06-07 |
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