AU9583798A - A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements - Google Patents

A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

Info

Publication number
AU9583798A
AU9583798A AU95837/98A AU9583798A AU9583798A AU 9583798 A AU9583798 A AU 9583798A AU 95837/98 A AU95837/98 A AU 95837/98A AU 9583798 A AU9583798 A AU 9583798A AU 9583798 A AU9583798 A AU 9583798A
Authority
AU
Australia
Prior art keywords
self
light modulator
spatial light
mechanical elements
reflective spatial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU95837/98A
Other languages
English (en)
Inventor
Andrew Gerrit Huibers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of AU9583798A publication Critical patent/AU9583798A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU95837/98A 1998-09-24 1998-09-24 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Abandoned AU9583798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/020161 WO2000017695A1 (en) 1998-09-24 1998-09-24 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

Publications (1)

Publication Number Publication Date
AU9583798A true AU9583798A (en) 2000-04-10

Family

ID=22267939

Family Applications (1)

Application Number Title Priority Date Filing Date
AU95837/98A Abandoned AU9583798A (en) 1998-09-24 1998-09-24 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

Country Status (7)

Country Link
EP (1) EP1116063B1 (OSRAM)
JP (1) JP2002525676A (OSRAM)
KR (1) KR100635589B1 (OSRAM)
CN (1) CN1232858C (OSRAM)
AU (1) AU9583798A (OSRAM)
DE (1) DE69834847T2 (OSRAM)
WO (1) WO2000017695A1 (OSRAM)

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US6611377B1 (en) 2000-07-10 2003-08-26 Intel Corporation Micromechanical diffraction phase grating
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
US6862127B1 (en) * 2003-11-01 2005-03-01 Fusao Ishii High performance micromirror arrays and methods of manufacturing the same
TW593127B (en) 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
CN100549493C (zh) * 2003-12-10 2009-10-14 硅光机器公司 二维空间光调制器
JP4651302B2 (ja) * 2004-04-28 2011-03-16 よこはまティーエルオー株式会社 マイクロミラー素子の製造方法
US7573547B2 (en) 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7184202B2 (en) 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
EP1858796B1 (en) * 2005-02-23 2011-01-19 Pixtronix Inc. Methods and apparatus for actuating displays
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
CN101576656B (zh) * 2005-02-23 2012-05-30 皮克斯特罗尼克斯公司 显示方法和装置
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
JP4743630B2 (ja) 2005-10-20 2011-08-10 株式会社リコー 光偏向装置、光偏向装置アレイおよび画像投影表示装置
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
JP2007233065A (ja) 2006-03-01 2007-09-13 Ricoh Co Ltd 光偏向装置とその製造方法並びに光投影装置
US7528933B2 (en) * 2006-04-06 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
JP2013519121A (ja) 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド 低温封孔流体充填ディスプレイ装置を製造するための方法
KR20120139854A (ko) 2010-02-02 2012-12-27 픽스트로닉스 인코포레이티드 디스플레이 장치를 제어하기 위한 회로
CN102236224B (zh) * 2010-04-30 2014-01-15 北京京东方光电科技有限公司 显示面板及制造方法和显示器
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9580304B2 (en) * 2015-05-07 2017-02-28 Texas Instruments Incorporated Low-stress low-hydrogen LPCVD silicon nitride
TWI638419B (zh) * 2016-04-18 2018-10-11 村田製作所股份有限公司 一種掃描鏡設備與其製造方法

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US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
CH633902A5 (fr) * 1980-03-11 1982-12-31 Centre Electron Horloger Dispositif de modulation de lumiere.
FR2710161B1 (fr) * 1993-09-13 1995-11-24 Suisse Electronique Microtech Réseau miniature d'obturateurs de lumière.
US5454906A (en) * 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5784190A (en) * 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
US5768009A (en) * 1997-04-18 1998-06-16 E-Beam Light valve target comprising electrostatically-repelled micro-mirrors
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch

Also Published As

Publication number Publication date
EP1116063B1 (en) 2006-06-07
WO2000017695A1 (en) 2000-03-30
CN1309782A (zh) 2001-08-22
EP1116063A4 (en) 2003-08-20
CN1232858C (zh) 2005-12-21
JP2002525676A (ja) 2002-08-13
DE69834847D1 (de) 2006-07-20
KR20010106484A (ko) 2001-11-29
DE69834847T2 (de) 2007-02-15
KR100635589B1 (ko) 2006-10-18
EP1116063A1 (en) 2001-07-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase