DE69834847D1 - Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen - Google Patents

Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen

Info

Publication number
DE69834847D1
DE69834847D1 DE69834847T DE69834847T DE69834847D1 DE 69834847 D1 DE69834847 D1 DE 69834847D1 DE 69834847 T DE69834847 T DE 69834847T DE 69834847 T DE69834847 T DE 69834847T DE 69834847 D1 DE69834847 D1 DE 69834847D1
Authority
DE
Germany
Prior art keywords
restricting
self
light modulator
spatial light
reflective spatial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69834847T
Other languages
English (en)
Other versions
DE69834847T2 (de
Inventor
Gerrit Huiber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of DE69834847D1 publication Critical patent/DE69834847D1/de
Application granted granted Critical
Publication of DE69834847T2 publication Critical patent/DE69834847T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE69834847T 1998-09-24 1998-09-24 Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen Expired - Lifetime DE69834847T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/020161 WO2000017695A1 (en) 1998-09-24 1998-09-24 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

Publications (2)

Publication Number Publication Date
DE69834847D1 true DE69834847D1 (de) 2006-07-20
DE69834847T2 DE69834847T2 (de) 2007-02-15

Family

ID=22267939

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69834847T Expired - Lifetime DE69834847T2 (de) 1998-09-24 1998-09-24 Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen

Country Status (7)

Country Link
EP (1) EP1116063B1 (de)
JP (1) JP2002525676A (de)
KR (1) KR100635589B1 (de)
CN (1) CN1232858C (de)
AU (1) AU9583798A (de)
DE (1) DE69834847T2 (de)
WO (1) WO2000017695A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6611377B1 (en) * 2000-07-10 2003-08-26 Intel Corporation Micromechanical diffraction phase grating
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US6862127B1 (en) * 2003-11-01 2005-03-01 Fusao Ishii High performance micromirror arrays and methods of manufacturing the same
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
JP4651302B2 (ja) * 2004-04-28 2011-03-16 よこはまティーエルオー株式会社 マイクロミラー素子の製造方法
US7184202B2 (en) * 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
CA2795329C (en) * 2005-02-23 2015-04-07 Pixtronix, Inc. Methods and apparatus for actuating displays
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9087486B2 (en) 2005-02-23 2015-07-21 Pixtronix, Inc. Circuits for controlling display apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
CN101128766B (zh) * 2005-02-23 2011-01-12 皮克斯特罗尼克斯公司 显示装置及其制造方法
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
JP4743630B2 (ja) 2005-10-20 2011-08-10 株式会社リコー 光偏向装置、光偏向装置アレイおよび画像投影表示装置
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
JP2007233065A (ja) 2006-03-01 2007-09-13 Ricoh Co Ltd 光偏向装置とその製造方法並びに光投影装置
US7528933B2 (en) * 2006-04-06 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
WO2011097252A2 (en) 2010-02-02 2011-08-11 Pixtronix, Inc. Methods for manufacturing cold seal fluid-filled display apparatus
CN102236224B (zh) * 2010-04-30 2014-01-15 北京京东方光电科技有限公司 显示面板及制造方法和显示器
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9580304B2 (en) * 2015-05-07 2017-02-28 Texas Instruments Incorporated Low-stress low-hydrogen LPCVD silicon nitride
TWI638419B (zh) * 2016-04-18 2018-10-11 村田製作所股份有限公司 一種掃描鏡設備與其製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
CH633902A5 (fr) * 1980-03-11 1982-12-31 Centre Electron Horloger Dispositif de modulation de lumiere.
FR2710161B1 (fr) * 1993-09-13 1995-11-24 Suisse Electronique Microtech Réseau miniature d'obturateurs de lumière.
US5454906A (en) * 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5784190A (en) * 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
US5768009A (en) * 1997-04-18 1998-06-16 E-Beam Light valve target comprising electrostatically-repelled micro-mirrors
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch

Also Published As

Publication number Publication date
CN1309782A (zh) 2001-08-22
KR20010106484A (ko) 2001-11-29
EP1116063A1 (de) 2001-07-18
CN1232858C (zh) 2005-12-21
WO2000017695A1 (en) 2000-03-30
AU9583798A (en) 2000-04-10
KR100635589B1 (ko) 2006-10-18
EP1116063A4 (de) 2003-08-20
DE69834847T2 (de) 2007-02-15
EP1116063B1 (de) 2006-06-07
JP2002525676A (ja) 2002-08-13

Similar Documents

Publication Publication Date Title
DE69834847D1 (de) Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen
DE69942957D1 (de) Räumlicher Lichtmodulator
DE69611053T2 (de) Reflektierende räumliche Lichtmodulatoranordnung
DE69831197D1 (de) Räumlicher Lichtmodulator und sein Herstellungsverfahren
DE69629875D1 (de) Räumlicher Lichtmodulator und gerichtete Anzeigevorrichtung
DE69826210D1 (de) Lichtmodulierendes element und projektionsanzeige
DE69425926D1 (de) Räumlicher Lichtmodulator und richtungsabhängiger Anzeigesystem
DE60007654D1 (de) Polarisatorkonstruktionen und anzeigevorrichtungen mit einmaligen farbeffekten
DE60025569D1 (de) Laserdrucker mit räumlichem Lichtmodulator
DE69528554D1 (de) Verbesserte räumliche Lichtmodulatoren
DK0871155T3 (da) Reflekterende displayindretning
DE69925604D1 (de) Reflektierende anzeigevorrichtung
DE69838060D1 (de) Optisches beleuchtungssystem und projektionsartige anzeige
DE69424604D1 (de) Räumliche Lichtmodulation
DE69822807D1 (de) Uv mikroskop mit farbumsetzung
DE69802667T2 (de) Reflektieve anzeigevorrichtung
GB9825152D0 (en) Spatial light modulator and display
DE69830435D1 (de) Räumlischer LichtModulator und Anzeige
DE69821476D1 (de) Optischer modulator
DE69830132D1 (de) Ausgedehnte und transparente Beleuchtungseinrichtung
GB9716112D0 (en) Spatial light modulator and display
DE69425840D1 (de) Mikromechanischer Lichtmodulator und Drucksystem mit optischer Überlappung
DE69836061D1 (de) Optisches Element mit mehreren Reflexionsflächen
DE69927736D1 (de) Räumliche Lichtmodulationsvorrichtung und Farbanzeigegerät
DE69814274D1 (de) Flüssigkristall Zusammensetzung und Flüssigkristall-Lichtverschluss

Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition