DE69611053T2 - Reflektierende räumliche Lichtmodulatoranordnung - Google Patents
Reflektierende räumliche LichtmodulatoranordnungInfo
- Publication number
- DE69611053T2 DE69611053T2 DE69611053T DE69611053T DE69611053T2 DE 69611053 T2 DE69611053 T2 DE 69611053T2 DE 69611053 T DE69611053 T DE 69611053T DE 69611053 T DE69611053 T DE 69611053T DE 69611053 T2 DE69611053 T2 DE 69611053T2
- Authority
- DE
- Germany
- Prior art keywords
- light modulator
- spatial light
- reflective spatial
- modulator arrangement
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43137095A | 1995-04-28 | 1995-04-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69611053D1 DE69611053D1 (de) | 2001-01-04 |
DE69611053T2 true DE69611053T2 (de) | 2001-05-10 |
Family
ID=23711646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69611053T Expired - Lifetime DE69611053T2 (de) | 1995-04-28 | 1996-04-09 | Reflektierende räumliche Lichtmodulatoranordnung |
Country Status (7)
Country | Link |
---|---|
US (2) | US5706067A (de) |
EP (1) | EP0740188B1 (de) |
JP (1) | JP3349332B2 (de) |
KR (1) | KR100262907B1 (de) |
CA (1) | CA2172751C (de) |
DE (1) | DE69611053T2 (de) |
TW (1) | TW293182B (de) |
Families Citing this family (81)
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JP3349332B2 (ja) * | 1995-04-28 | 2002-11-25 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 反射式空間光変調素子配列及びその形成方法 |
DE69614337T2 (de) * | 1995-10-15 | 2002-06-13 | Victor Company Of Japan | Anzeigevorrichtung von Reflexionstyp |
JP3191085B2 (ja) * | 1996-01-29 | 2001-07-23 | 株式会社日立製作所 | 反射型液晶表示素子および液晶表示装置 |
EP0886802B1 (de) | 1996-03-15 | 2001-11-21 | Retinal Display Cayman Ltd. | Verfahren und vorrichtung zur betrachtung eines bildes |
JP3188411B2 (ja) * | 1996-10-18 | 2001-07-16 | キヤノン株式会社 | 反射型液晶装置用画素電極基板、該画素電極基板を用いた液晶装置及び該液晶装置を用いた表示装置 |
US6831623B2 (en) * | 1996-10-22 | 2004-12-14 | Seiko Epson Corporation | Liquid crystal panel substrate, liquid crystal panel, and electronic equipment and projection type display device both using the same |
EP1967899B1 (de) | 1996-10-22 | 2013-01-23 | Seiko Epson Corporation | Reflektierende Flüssigkristalltafel |
US7872728B1 (en) | 1996-10-22 | 2011-01-18 | Seiko Epson Corporation | Liquid crystal panel substrate, liquid crystal panel, and electronic device and projection display device using the same |
US6927826B2 (en) * | 1997-03-26 | 2005-08-09 | Semiconductor Energy Labaratory Co., Ltd. | Display device |
JP4302194B2 (ja) * | 1997-04-25 | 2009-07-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6124912A (en) * | 1997-06-09 | 2000-09-26 | National Semiconductor Corporation | Reflectance enhancing thin film stack in which pairs of dielectric layers are on a reflector and liquid crystal is on the dielectric layers |
CN101477991B (zh) * | 1997-06-17 | 2010-12-22 | 精工爱普生株式会社 | 电光器件基片、电光器件、电子器件和投影显示设备 |
JP3767154B2 (ja) | 1997-06-17 | 2006-04-19 | セイコーエプソン株式会社 | 電気光学装置用基板、電気光学装置、電子機器及び投写型表示装置 |
JP3390633B2 (ja) | 1997-07-14 | 2003-03-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6011605A (en) * | 1997-08-04 | 2000-01-04 | Matsushita Electric Industrial Co., Ltd. | Liquid crystal display with a metallic reflecting electrode having a two layer film of Ti and Al alloy |
JP3919900B2 (ja) * | 1997-09-19 | 2007-05-30 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
US7202497B2 (en) * | 1997-11-27 | 2007-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP4014710B2 (ja) | 1997-11-28 | 2007-11-28 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
US6211934B1 (en) * | 1997-12-24 | 2001-04-03 | Honeywell Inc. | Method of and apparatuses for reducing infrared loading on display devices |
JP2918875B1 (ja) * | 1998-03-02 | 1999-07-12 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 反射型液晶素子、製造方法およびプロジェクション表示装置 |
US6051446A (en) * | 1998-04-09 | 2000-04-18 | National Semiconductor Corporation | Thin liquid crystal transducer pixel cell having self-aligned support pillars |
JPH11307782A (ja) | 1998-04-24 | 1999-11-05 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
US6452652B1 (en) | 1998-06-12 | 2002-09-17 | National Semiconductor Corporation | Light absorbing thin film stack in a light valve structure |
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DE102014226272A1 (de) * | 2014-12-17 | 2016-06-23 | Carl Zeiss Smt Gmbh | Spiegel-Einrichtung |
KR101654618B1 (ko) * | 2014-12-30 | 2016-09-06 | 동명대학교산학협력단 | 고해상도 삼각 포인트 어레이 구조 획득 방법 및 고해상도 삼각 포인트 어레이 리소그래피 방법 |
US11187891B1 (en) | 2017-06-12 | 2021-11-30 | Hrl Laboratories, Llc | Spatial light modulator using phase-change matertals with improved fill factor |
US10338425B1 (en) * | 2017-12-29 | 2019-07-02 | Huizhou China Star Optoelectronics Technology Co., Ltd. | Liquid crystal display device and its display panel |
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JP3608808B2 (ja) | 1992-10-08 | 2005-01-12 | 株式会社日立製作所 | 液晶ライトバルブ及び液晶表示パネル |
US5461501A (en) * | 1992-10-08 | 1995-10-24 | Hitachi, Ltd. | Liquid crystal substrate having 3 metal layers with slits offset to block light from reaching the substrate |
JP2924506B2 (ja) * | 1992-10-27 | 1999-07-26 | 日本電気株式会社 | アクティブマトリックス型液晶表示装置の画素構造 |
JPH08122761A (ja) | 1994-10-20 | 1996-05-17 | Fujitsu Ltd | 液晶表示素子とその製造方法 |
JP3085115B2 (ja) | 1994-12-13 | 2000-09-04 | 日本ビクター株式会社 | 液晶表示装置 |
US5652667A (en) | 1995-02-03 | 1997-07-29 | Victor Company Of Japan, Ltd. | Liquid crystal display apparatus |
JP2694126B2 (ja) * | 1995-02-06 | 1997-12-24 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 液晶表示装置及びその製造方法 |
JP3016007B2 (ja) | 1995-03-06 | 2000-03-06 | キヤノン株式会社 | 液晶表示装置 |
JP3349332B2 (ja) * | 1995-04-28 | 2002-11-25 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 反射式空間光変調素子配列及びその形成方法 |
JP3143591B2 (ja) * | 1995-09-14 | 2001-03-07 | キヤノン株式会社 | 表示装置 |
-
1996
- 1996-03-21 JP JP6450596A patent/JP3349332B2/ja not_active Expired - Lifetime
- 1996-03-27 TW TW085103679A patent/TW293182B/zh not_active IP Right Cessation
- 1996-03-27 CA CA002172751A patent/CA2172751C/en not_active Expired - Fee Related
- 1996-04-09 EP EP96105537A patent/EP0740188B1/de not_active Expired - Lifetime
- 1996-04-09 DE DE69611053T patent/DE69611053T2/de not_active Expired - Lifetime
- 1996-04-26 KR KR1019960013114A patent/KR100262907B1/ko not_active IP Right Cessation
-
1997
- 1997-02-21 US US08/803,210 patent/US5706067A/en not_active Expired - Lifetime
- 1997-12-18 US US08/999,663 patent/US7468766B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5706067A (en) | 1998-01-06 |
EP0740188A3 (de) | 1997-04-02 |
CA2172751C (en) | 2002-07-02 |
US7468766B1 (en) | 2008-12-23 |
JPH08304819A (ja) | 1996-11-22 |
JP3349332B2 (ja) | 2002-11-25 |
KR960038440A (ko) | 1996-11-21 |
DE69611053D1 (de) | 2001-01-04 |
EP0740188B1 (de) | 2000-11-29 |
CA2172751A1 (en) | 1996-10-29 |
KR100262907B1 (ko) | 2000-08-01 |
EP0740188A2 (de) | 1996-10-30 |
TW293182B (de) | 1996-12-11 |
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