DE69834847T2 - Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen - Google Patents
Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen Download PDFInfo
- Publication number
- DE69834847T2 DE69834847T2 DE69834847T DE69834847T DE69834847T2 DE 69834847 T2 DE69834847 T2 DE 69834847T2 DE 69834847 T DE69834847 T DE 69834847T DE 69834847 T DE69834847 T DE 69834847T DE 69834847 T2 DE69834847 T2 DE 69834847T2
- Authority
- DE
- Germany
- Prior art keywords
- light modulator
- spatial light
- mirror
- modulator according
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1998/020161 WO2000017695A1 (en) | 1998-09-24 | 1998-09-24 | A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69834847D1 DE69834847D1 (de) | 2006-07-20 |
| DE69834847T2 true DE69834847T2 (de) | 2007-02-15 |
Family
ID=22267939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69834847T Expired - Lifetime DE69834847T2 (de) | 1998-09-24 | 1998-09-24 | Reflektierender räumlicher lichtmodulator mit doppelsubstrat und selbstbeschränkenden mikromechanischen elementen |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1116063B1 (OSRAM) |
| JP (1) | JP2002525676A (OSRAM) |
| KR (1) | KR100635589B1 (OSRAM) |
| CN (1) | CN1232858C (OSRAM) |
| AU (1) | AU9583798A (OSRAM) |
| DE (1) | DE69834847T2 (OSRAM) |
| WO (1) | WO2000017695A1 (OSRAM) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6611377B1 (en) | 2000-07-10 | 2003-08-26 | Intel Corporation | Micromechanical diffraction phase grating |
| US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
| US6903860B2 (en) * | 2003-11-01 | 2005-06-07 | Fusao Ishii | Vacuum packaged micromirror arrays and methods of manufacturing the same |
| US20050094241A1 (en) * | 2003-11-01 | 2005-05-05 | Fusao Ishii | Electromechanical micromirror devices and methods of manufacturing the same |
| US6862127B1 (en) * | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
| TW593127B (en) | 2003-08-18 | 2004-06-21 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
| CN100549493C (zh) * | 2003-12-10 | 2009-10-14 | 硅光机器公司 | 二维空间光调制器 |
| JP4651302B2 (ja) * | 2004-04-28 | 2011-03-16 | よこはまティーエルオー株式会社 | マイクロミラー素子の製造方法 |
| US7573547B2 (en) | 2004-09-27 | 2009-08-11 | Idc, Llc | System and method for protecting micro-structure of display array using spacers in gap within display device |
| US7184202B2 (en) | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
| EP1858796B1 (en) * | 2005-02-23 | 2011-01-19 | Pixtronix Inc. | Methods and apparatus for actuating displays |
| US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
| US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
| US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
| CN101576656B (zh) * | 2005-02-23 | 2012-05-30 | 皮克斯特罗尼克斯公司 | 显示方法和装置 |
| US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
| US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
| JP4743630B2 (ja) | 2005-10-20 | 2011-08-10 | 株式会社リコー | 光偏向装置、光偏向装置アレイおよび画像投影表示装置 |
| US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| JP2007233065A (ja) | 2006-03-01 | 2007-09-13 | Ricoh Co Ltd | 光偏向装置とその製造方法並びに光投影装置 |
| US7528933B2 (en) * | 2006-04-06 | 2009-05-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement |
| US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| JP2013519121A (ja) | 2010-02-02 | 2013-05-23 | ピクストロニックス・インコーポレーテッド | 低温封孔流体充填ディスプレイ装置を製造するための方法 |
| KR20120139854A (ko) | 2010-02-02 | 2012-12-27 | 픽스트로닉스 인코포레이티드 | 디스플레이 장치를 제어하기 위한 회로 |
| CN102236224B (zh) * | 2010-04-30 | 2014-01-15 | 北京京东方光电科技有限公司 | 显示面板及制造方法和显示器 |
| US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
| US9580304B2 (en) * | 2015-05-07 | 2017-02-28 | Texas Instruments Incorporated | Low-stress low-hydrogen LPCVD silicon nitride |
| TWI638419B (zh) * | 2016-04-18 | 2018-10-11 | 村田製作所股份有限公司 | 一種掃描鏡設備與其製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
| CH633902A5 (fr) * | 1980-03-11 | 1982-12-31 | Centre Electron Horloger | Dispositif de modulation de lumiere. |
| FR2710161B1 (fr) * | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
| US5454906A (en) * | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
| US5784190A (en) * | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
| US5808780A (en) * | 1997-06-09 | 1998-09-15 | Texas Instruments Incorporated | Non-contacting micromechanical optical switch |
-
1998
- 1998-09-24 KR KR1020017003698A patent/KR100635589B1/ko not_active Expired - Lifetime
- 1998-09-24 JP JP2000571299A patent/JP2002525676A/ja active Pending
- 1998-09-24 AU AU95837/98A patent/AU9583798A/en not_active Abandoned
- 1998-09-24 DE DE69834847T patent/DE69834847T2/de not_active Expired - Lifetime
- 1998-09-24 CN CNB988142236A patent/CN1232858C/zh not_active Expired - Fee Related
- 1998-09-24 EP EP98949533A patent/EP1116063B1/en not_active Expired - Lifetime
- 1998-09-24 WO PCT/US1998/020161 patent/WO2000017695A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1116063B1 (en) | 2006-06-07 |
| WO2000017695A1 (en) | 2000-03-30 |
| CN1309782A (zh) | 2001-08-22 |
| EP1116063A4 (en) | 2003-08-20 |
| CN1232858C (zh) | 2005-12-21 |
| JP2002525676A (ja) | 2002-08-13 |
| DE69834847D1 (de) | 2006-07-20 |
| KR20010106484A (ko) | 2001-11-29 |
| KR100635589B1 (ko) | 2006-10-18 |
| EP1116063A1 (en) | 2001-07-18 |
| AU9583798A (en) | 2000-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8332 | No legal effect for de | ||
| 8370 | Indication of lapse of patent is to be deleted | ||
| 8364 | No opposition during term of opposition |