JP2002305148A - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法

Info

Publication number
JP2002305148A
JP2002305148A JP2002020463A JP2002020463A JP2002305148A JP 2002305148 A JP2002305148 A JP 2002305148A JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002305148 A JP2002305148 A JP 2002305148A
Authority
JP
Japan
Prior art keywords
semiconductor film
film
light
laser
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002020463A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002305148A5 (ko
Inventor
Shunpei Yamazaki
舜平 山崎
Hideto Onuma
英人 大沼
Yoshie Takano
圭恵 高野
Toru Mitsuki
亨 三津木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2002020463A priority Critical patent/JP2002305148A/ja
Publication of JP2002305148A publication Critical patent/JP2002305148A/ja
Publication of JP2002305148A5 publication Critical patent/JP2002305148A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Recrystallisation Techniques (AREA)
  • Thin Film Transistor (AREA)
JP2002020463A 2001-01-29 2002-01-29 半導体装置の作製方法 Withdrawn JP2002305148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002020463A JP2002305148A (ja) 2001-01-29 2002-01-29 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-19331 2001-01-29
JP2001019331 2001-01-29
JP2002020463A JP2002305148A (ja) 2001-01-29 2002-01-29 半導体装置の作製方法

Publications (2)

Publication Number Publication Date
JP2002305148A true JP2002305148A (ja) 2002-10-18
JP2002305148A5 JP2002305148A5 (ko) 2005-07-14

Family

ID=26608395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002020463A Withdrawn JP2002305148A (ja) 2001-01-29 2002-01-29 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP2002305148A (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6858512B2 (en) * 2000-03-30 2005-02-22 Sanyo Electric Co., Ltd. Semiconductor device and method of producing the same
US6872638B2 (en) 2001-02-23 2005-03-29 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
SG114530A1 (en) * 2001-02-28 2005-09-28 Semiconductor Energy Lab Method of manufacturing a semiconductor device
US7459379B2 (en) 2004-03-26 2008-12-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2013252249A (ja) * 2012-06-06 2013-12-19 Konami Digital Entertainment Co Ltd ゲーム機

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6858512B2 (en) * 2000-03-30 2005-02-22 Sanyo Electric Co., Ltd. Semiconductor device and method of producing the same
US6872638B2 (en) 2001-02-23 2005-03-29 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
SG114529A1 (en) * 2001-02-23 2005-09-28 Semiconductor Energy Lab Method of manufacturing a semiconductor device
SG114530A1 (en) * 2001-02-28 2005-09-28 Semiconductor Energy Lab Method of manufacturing a semiconductor device
US7618904B2 (en) 2001-02-28 2009-11-17 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
US7459379B2 (en) 2004-03-26 2008-12-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2013252249A (ja) * 2012-06-06 2013-12-19 Konami Digital Entertainment Co Ltd ゲーム機

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