JP2002305148A - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法Info
- Publication number
- JP2002305148A JP2002305148A JP2002020463A JP2002020463A JP2002305148A JP 2002305148 A JP2002305148 A JP 2002305148A JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002305148 A JP2002305148 A JP 2002305148A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor film
- film
- light
- laser
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Liquid Crystal (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002020463A JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-19331 | 2001-01-29 | ||
JP2001019331 | 2001-01-29 | ||
JP2002020463A JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002305148A true JP2002305148A (ja) | 2002-10-18 |
JP2002305148A5 JP2002305148A5 (ko) | 2005-07-14 |
Family
ID=26608395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002020463A Withdrawn JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002305148A (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6858512B2 (en) * | 2000-03-30 | 2005-02-22 | Sanyo Electric Co., Ltd. | Semiconductor device and method of producing the same |
US6872638B2 (en) | 2001-02-23 | 2005-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
SG114530A1 (en) * | 2001-02-28 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
US7459379B2 (en) | 2004-03-26 | 2008-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2013252249A (ja) * | 2012-06-06 | 2013-12-19 | Konami Digital Entertainment Co Ltd | ゲーム機 |
-
2002
- 2002-01-29 JP JP2002020463A patent/JP2002305148A/ja not_active Withdrawn
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6858512B2 (en) * | 2000-03-30 | 2005-02-22 | Sanyo Electric Co., Ltd. | Semiconductor device and method of producing the same |
US6872638B2 (en) | 2001-02-23 | 2005-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
SG114529A1 (en) * | 2001-02-23 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
SG114530A1 (en) * | 2001-02-28 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
US7618904B2 (en) | 2001-02-28 | 2009-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
US7459379B2 (en) | 2004-03-26 | 2008-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2013252249A (ja) * | 2012-06-06 | 2013-12-19 | Konami Digital Entertainment Co Ltd | ゲーム機 |
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Legal Events
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A761 | Written withdrawal of application |
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