JP2002305148A5 - - Google Patents
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- Publication number
- JP2002305148A5 JP2002305148A5 JP2002020463A JP2002020463A JP2002305148A5 JP 2002305148 A5 JP2002305148 A5 JP 2002305148A5 JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002020463 A JP2002020463 A JP 2002020463A JP 2002305148 A5 JP2002305148 A5 JP 2002305148A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor film
- light
- laser
- manufacturing
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004065 semiconductor Substances 0.000 claims 28
- 238000000034 method Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 5
- 230000001678 irradiating effect Effects 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 229910001507 metal halide Inorganic materials 0.000 claims 1
- 150000005309 metal halides Chemical class 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002020463A JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-19331 | 2001-01-29 | ||
| JP2001019331 | 2001-01-29 | ||
| JP2002020463A JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002305148A JP2002305148A (ja) | 2002-10-18 |
| JP2002305148A5 true JP2002305148A5 (ko) | 2005-07-14 |
Family
ID=26608395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002020463A Withdrawn JP2002305148A (ja) | 2001-01-29 | 2002-01-29 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002305148A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001284252A (ja) * | 2000-03-30 | 2001-10-12 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
| SG114529A1 (en) * | 2001-02-23 | 2005-09-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| SG143975A1 (en) | 2001-02-28 | 2008-07-29 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| KR101132266B1 (ko) | 2004-03-26 | 2012-04-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제조 방법 |
| JP5894504B2 (ja) * | 2012-06-06 | 2016-03-30 | 株式会社コナミデジタルエンタテインメント | ゲーム機 |
-
2002
- 2002-01-29 JP JP2002020463A patent/JP2002305148A/ja not_active Withdrawn
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