JP2002286574A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JP2002286574A
JP2002286574A JP2001089051A JP2001089051A JP2002286574A JP 2002286574 A JP2002286574 A JP 2002286574A JP 2001089051 A JP2001089051 A JP 2001089051A JP 2001089051 A JP2001089051 A JP 2001089051A JP 2002286574 A JP2002286574 A JP 2002286574A
Authority
JP
Japan
Prior art keywords
pressure
main body
sensor module
pressure sensor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001089051A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002286574A5 (https=
Inventor
Yukimasa Saito
幸正 齋藤
Mitsuyoshi Aizawa
満芳 相澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEM-TECH KENKYUSHO KK
Tokyo Electron Ltd
Original Assignee
TEM-TECH KENKYUSHO KK
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEM-TECH KENKYUSHO KK, Tokyo Electron Ltd filed Critical TEM-TECH KENKYUSHO KK
Priority to JP2001089051A priority Critical patent/JP2002286574A/ja
Publication of JP2002286574A publication Critical patent/JP2002286574A/ja
Publication of JP2002286574A5 publication Critical patent/JP2002286574A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2001089051A 2001-03-27 2001-03-27 圧力センサ Pending JP2002286574A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001089051A JP2002286574A (ja) 2001-03-27 2001-03-27 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001089051A JP2002286574A (ja) 2001-03-27 2001-03-27 圧力センサ

Publications (2)

Publication Number Publication Date
JP2002286574A true JP2002286574A (ja) 2002-10-03
JP2002286574A5 JP2002286574A5 (https=) 2004-09-02

Family

ID=18944041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001089051A Pending JP2002286574A (ja) 2001-03-27 2001-03-27 圧力センサ

Country Status (1)

Country Link
JP (1) JP2002286574A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007139453A (ja) * 2005-11-15 2007-06-07 Denso Corp 圧力センサ
KR101289096B1 (ko) 2011-11-14 2013-07-23 재단법인 포항산업과학연구원 고온 압력센서장치 및 그 제조방법
CN105547569A (zh) * 2015-12-30 2016-05-04 黄福春 一种高温绝压传感器
CN106679854A (zh) * 2016-11-29 2017-05-17 中国电子科技集团公司第四十八研究所 一种绝压压力传感器及其制备方法
JP2021162557A (ja) * 2020-04-03 2021-10-11 アズビル株式会社 圧力センサ素子および圧力センサ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007139453A (ja) * 2005-11-15 2007-06-07 Denso Corp 圧力センサ
KR101289096B1 (ko) 2011-11-14 2013-07-23 재단법인 포항산업과학연구원 고온 압력센서장치 및 그 제조방법
CN105547569A (zh) * 2015-12-30 2016-05-04 黄福春 一种高温绝压传感器
CN106679854A (zh) * 2016-11-29 2017-05-17 中国电子科技集团公司第四十八研究所 一种绝压压力传感器及其制备方法
CN106679854B (zh) * 2016-11-29 2020-02-07 中国电子科技集团公司第四十八研究所 一种绝压压力传感器及其制备方法
JP2021162557A (ja) * 2020-04-03 2021-10-11 アズビル株式会社 圧力センサ素子および圧力センサ
JP7736425B2 (ja) 2020-04-03 2025-09-09 アズビル株式会社 圧力センサ素子および圧力センサ

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