JP2002260595A5 - - Google Patents
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- Publication number
- JP2002260595A5 JP2002260595A5 JP2001334157A JP2001334157A JP2002260595A5 JP 2002260595 A5 JP2002260595 A5 JP 2002260595A5 JP 2001334157 A JP2001334157 A JP 2001334157A JP 2001334157 A JP2001334157 A JP 2001334157A JP 2002260595 A5 JP2002260595 A5 JP 2002260595A5
- Authority
- JP
- Japan
- Prior art keywords
- processing space
- microwave
- reflector
- ultraviolet
- plasma lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 13
- 239000013307 optical fiber Substances 0.000 claims 6
- 230000000903 blocking effect Effects 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/702519 | 2000-10-31 | ||
| US09/702,519 US6559460B1 (en) | 2000-10-31 | 2000-10-31 | Ultraviolet lamp system and methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002260595A JP2002260595A (ja) | 2002-09-13 |
| JP2002260595A5 true JP2002260595A5 (enExample) | 2005-06-30 |
Family
ID=24821534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001334157A Pending JP2002260595A (ja) | 2000-10-31 | 2001-10-31 | 紫外線ランプシステムおよび方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6559460B1 (enExample) |
| JP (1) | JP2002260595A (enExample) |
| CN (1) | CN1260013C (enExample) |
| DE (1) | DE10153204A1 (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020079796A1 (en) * | 2000-12-22 | 2002-06-27 | Okamitsu Jeffrey K. | Wavelength selective optical reflector with integral light trap |
| GB2375603B (en) * | 2001-05-17 | 2005-08-10 | Jenact Ltd | Control system for microwave powered ultraviolet light sources |
| US20100242299A1 (en) * | 2003-01-09 | 2010-09-30 | Con-Trol-Cure, Inc. | Uv curing system and process |
| US6933683B2 (en) * | 2003-02-27 | 2005-08-23 | Nordson Corporation | Microwave powered lamphead having external shutter |
| CN1449872B (zh) * | 2003-04-10 | 2010-05-12 | 上海复旦辰光科技有限公司 | 一种利用微波清洁材料表面的方法及其装置 |
| JP2005193088A (ja) * | 2003-12-26 | 2005-07-21 | Japan Storage Battery Co Ltd | エキシマランプ照射装置 |
| US7109669B2 (en) * | 2004-04-08 | 2006-09-19 | Nordson Corporation | Microwave lamp power supply that can withstand failure in high voltage circuit |
| FR2869719B1 (fr) * | 2004-04-29 | 2007-03-30 | Pascal Sortais | Source lumineuse a resonance cyclotronique d'electrons |
| US20050250346A1 (en) * | 2004-05-06 | 2005-11-10 | Applied Materials, Inc. | Process and apparatus for post deposition treatment of low k dielectric materials |
| US20050286263A1 (en) * | 2004-06-23 | 2005-12-29 | Champion David A | Plasma lamp with light-transmissive waveguide |
| CN100435982C (zh) * | 2004-07-09 | 2008-11-26 | 赫恩龙 | 物件涂装uv漆的固化方法及其设备 |
| US8216061B2 (en) * | 2005-03-31 | 2012-07-10 | Wms Gaming Inc. | Wagering games with unlockable bonus rounds |
| FR2884043A1 (fr) * | 2005-04-01 | 2006-10-06 | Pascal Sortais | Source lumineuse alimentee par radiofrequence pour traitements de substances et procede d'utilisation d'une telle source |
| US20060251827A1 (en) * | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | Tandem uv chamber for curing dielectric materials |
| US20060249175A1 (en) * | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | High efficiency UV curing system |
| US7777198B2 (en) * | 2005-05-09 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
| US7372058B2 (en) | 2005-09-27 | 2008-05-13 | Asml Netherlands B.V. | Ex-situ removal of deposition on an optical element |
| SG136078A1 (en) * | 2006-03-17 | 2007-10-29 | Applied Materials Inc | Uv cure system |
| US7692171B2 (en) * | 2006-03-17 | 2010-04-06 | Andrzei Kaszuba | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors |
| US7435982B2 (en) | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
| US7863834B2 (en) * | 2007-06-29 | 2011-01-04 | Nordson Corporation | Ultraviolet lamp system and method for controlling emitted UV light |
| DE102007031628B4 (de) * | 2007-07-06 | 2012-06-21 | Eastman Kodak Co. | UV-Strahlungsquelle |
| DE102007031629B3 (de) * | 2007-07-06 | 2009-03-19 | Eastman Kodak Co. | Mit Mikrowellen angeregte Strahlungsquelle |
| US7923706B2 (en) * | 2008-10-03 | 2011-04-12 | Nordson Corporation | Ultraviolet curing apparatus for continuous material |
| US20100096569A1 (en) * | 2008-10-21 | 2010-04-22 | Applied Materials, Inc. | Ultraviolet-transmitting microwave reflector comprising a micromesh screen |
| WO2010077132A1 (en) | 2008-12-31 | 2010-07-08 | Draka Comteq B.V. | Uvled apparatus for curing glass-fiber coatings |
| EP2388239B1 (en) | 2010-05-20 | 2017-02-15 | Draka Comteq B.V. | Curing apparatus employing angled UV-LEDs |
| US8871311B2 (en) | 2010-06-03 | 2014-10-28 | Draka Comteq, B.V. | Curing method employing UV sources that emit differing ranges of UV radiation |
| DE112011102371T5 (de) | 2010-07-16 | 2013-04-25 | Nordson Corporation | Lampensysteme und Verfahren zum Erzeugen von ultraviolettem Licht |
| EP2418183B1 (en) | 2010-08-10 | 2018-07-25 | Draka Comteq B.V. | Method for curing coated glass fibres providing increased UVLED intensitiy |
| EP2445313B1 (en) * | 2010-10-21 | 2015-05-13 | Electrolux Home Products Corporation N.V. | Microwave oven cavity and microwave oven |
| WO2012138866A1 (en) | 2011-04-08 | 2012-10-11 | Applied Materials, Inc. | Apparatus and method for uv treatment, chemical treatment, and deposition |
| US9750091B2 (en) * | 2012-10-15 | 2017-08-29 | Applied Materials, Inc. | Apparatus and method for heat treatment of coatings on substrates |
| US20150123015A1 (en) * | 2013-11-04 | 2015-05-07 | Nordson Corporation | Apparatus and methods for irradiating substrates with ultraviolet light |
| US9117619B2 (en) * | 2013-11-07 | 2015-08-25 | Electronics And Telecommunications Research Institute | Device for generating heavy-ion beam and method thereof |
| KR102482671B1 (ko) * | 2014-07-07 | 2022-12-29 | 노드슨 코포레이션 | Uv 시스템에서 rf 소스의 적합성을 판정하기 위한 시스템 및 방법 |
| US10520251B2 (en) * | 2015-01-15 | 2019-12-31 | Heraeus Noblelight America Llc | UV light curing systems, and methods of designing and operating the same |
| JP6379118B2 (ja) | 2016-01-10 | 2018-08-22 | Hoya Candeo Optronics株式会社 | 光照射装置 |
| US11532328B2 (en) | 2018-05-18 | 2022-12-20 | Samsung Electronics Co., Ltd. | Method for fabricating semiconductor chip by using multi-curing apparatus and multi-curing apparatus |
| JP7548297B2 (ja) * | 2020-03-31 | 2024-09-10 | Agc株式会社 | 無線伝達システム |
| CN115090477A (zh) * | 2022-08-05 | 2022-09-23 | 安徽艾雅伦新材料科技有限公司 | 一种pvc板材防静电镀膜设备及其镀膜方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3872349A (en) * | 1973-03-29 | 1975-03-18 | Fusion Systems Corp | Apparatus and method for generating radiation |
| CA1024246A (en) * | 1973-08-22 | 1978-01-10 | Donald M. Spero | Apparatus and method for generating radiation |
| US4042850A (en) | 1976-03-17 | 1977-08-16 | Fusion Systems Corporation | Microwave generated radiation apparatus |
| JPS55152567A (en) * | 1979-05-18 | 1980-11-27 | Oak Seisakusho:Kk | Coating and drying apparatus for wire and bar |
| JPS60191038A (ja) * | 1984-03-07 | 1985-09-28 | Oak Seisakusho:Kk | 紫外線照射装置 |
| US4535753A (en) | 1984-04-12 | 1985-08-20 | Leo Zayauskas | Radiant heat collector |
| US4710638A (en) * | 1986-02-10 | 1987-12-01 | Fusion Systems Corporation | Apparatus for treating coatings |
| US4800090A (en) * | 1987-03-11 | 1989-01-24 | Musser's Potato Chips, Inc. | Infrared and microwave energy treatment of food |
| JPH0621167Y2 (ja) * | 1987-08-07 | 1994-06-01 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JPH0637521Y2 (ja) * | 1988-10-05 | 1994-09-28 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JPH072184Y2 (ja) * | 1988-07-27 | 1995-01-25 | ウシオ電機株式会社 | 紫外線による処理装置 |
| DE3919334A1 (de) | 1989-06-13 | 1990-12-20 | Tetsuhiro Kano | Reflektor fuer eine leuchte |
| FR2674526B1 (fr) | 1991-03-29 | 2002-05-03 | France Telecom | Dispositif a source de rayonnement ultraviolet induit par des micro-ondes, pour la polymerisation d'objets photopolymerisables. |
| EP1232673A1 (en) * | 1999-10-27 | 2002-08-21 | Fusion Uv Systems, Inc. | Uv oven for curing magnet wire coatings |
-
2000
- 2000-10-31 US US09/702,519 patent/US6559460B1/en not_active Expired - Fee Related
-
2001
- 2001-04-04 US US09/826,028 patent/US6657206B2/en not_active Expired - Fee Related
- 2001-10-27 DE DE10153204A patent/DE10153204A1/de not_active Withdrawn
- 2001-10-31 CN CNB011359919A patent/CN1260013C/zh not_active Expired - Fee Related
- 2001-10-31 JP JP2001334157A patent/JP2002260595A/ja active Pending
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