JP2002221678A5 - - Google Patents

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Publication number
JP2002221678A5
JP2002221678A5 JP2001016899A JP2001016899A JP2002221678A5 JP 2002221678 A5 JP2002221678 A5 JP 2002221678A5 JP 2001016899 A JP2001016899 A JP 2001016899A JP 2001016899 A JP2001016899 A JP 2001016899A JP 2002221678 A5 JP2002221678 A5 JP 2002221678A5
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JP
Japan
Prior art keywords
optical switching
switching device
reflector
semi
distance
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Withdrawn
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JP2001016899A
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English (en)
Japanese (ja)
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JP2002221678A (ja
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Priority to JP2001016899A priority Critical patent/JP2002221678A/ja
Priority claimed from JP2001016899A external-priority patent/JP2002221678A/ja
Publication of JP2002221678A publication Critical patent/JP2002221678A/ja
Publication of JP2002221678A5 publication Critical patent/JP2002221678A5/ja
Withdrawn legal-status Critical Current

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JP2001016899A 2001-01-25 2001-01-25 光スイッチングデバイス、その製造方法および画像表示装置 Withdrawn JP2002221678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001016899A JP2002221678A (ja) 2001-01-25 2001-01-25 光スイッチングデバイス、その製造方法および画像表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001016899A JP2002221678A (ja) 2001-01-25 2001-01-25 光スイッチングデバイス、その製造方法および画像表示装置

Publications (2)

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JP2002221678A JP2002221678A (ja) 2002-08-09
JP2002221678A5 true JP2002221678A5 (enExample) 2005-03-03

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JP2001016899A Withdrawn JP2002221678A (ja) 2001-01-25 2001-01-25 光スイッチングデバイス、その製造方法および画像表示装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display

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JP4003063B2 (ja) * 2002-09-04 2007-11-07 セイコーエプソン株式会社 ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
US6963440B2 (en) * 2004-02-13 2005-11-08 Hewlett-Packard Development Company, L.P. System and method for driving a light delivery device
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7612932B2 (en) 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7403180B1 (en) * 2007-01-29 2008-07-22 Qualcomm Mems Technologies, Inc. Hybrid color synthesis for multistate reflective modulator displays
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7916378B2 (en) 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643199B2 (en) 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7630121B2 (en) 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
EP2183623A1 (en) 2007-07-31 2010-05-12 Qualcomm Mems Technologies, Inc. Devices for enhancing colour shift of interferometric modulators
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
KR20100090257A (ko) 2007-10-19 2010-08-13 퀄컴 엠이엠스 테크놀로지스, 인크. 광기전력 소자가 통합된 디스플레이
WO2009055393A1 (en) 2007-10-23 2009-04-30 Qualcomm Mems Technologies, Inc. Adjustably transmissive mems-based devices
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US7791783B2 (en) 2008-06-25 2010-09-07 Qualcomm Mems Technologies, Inc. Backlight displays
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
JP5442113B2 (ja) 2009-05-29 2014-03-12 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 照明デバイスおよび該照明デバイスの製造方法
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
JP5593671B2 (ja) * 2009-10-05 2014-09-24 セイコーエプソン株式会社 波長可変干渉フィルター、測色センサー、測色モジュール
JP5549222B2 (ja) * 2009-12-28 2014-07-16 株式会社ニコン 空間光変調器、露光装置およびそれらの製造方法
JP2013544370A (ja) 2010-08-17 2013-12-12 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 干渉ディスプレイデバイスの電荷中性電極の作動及び較正
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display

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