JP2002287047A5 - - Google Patents

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Publication number
JP2002287047A5
JP2002287047A5 JP2001085749A JP2001085749A JP2002287047A5 JP 2002287047 A5 JP2002287047 A5 JP 2002287047A5 JP 2001085749 A JP2001085749 A JP 2001085749A JP 2001085749 A JP2001085749 A JP 2001085749A JP 2002287047 A5 JP2002287047 A5 JP 2002287047A5
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JP
Japan
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semi
optical switching
reflector
switching element
switching device
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JP2001085749A
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English (en)
Japanese (ja)
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JP3888075B2 (ja
JP2002287047A (ja
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Priority claimed from JP2001085749A external-priority patent/JP3888075B2/ja
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Publication of JP2002287047A5 publication Critical patent/JP2002287047A5/ja
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Publication of JP3888075B2 publication Critical patent/JP3888075B2/ja
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JP2001085749A 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置 Expired - Fee Related JP3888075B2 (ja)

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JP2001085749A JP3888075B2 (ja) 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置

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JP2001085749A JP3888075B2 (ja) 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置

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JP2002287047A JP2002287047A (ja) 2002-10-03
JP2002287047A5 true JP2002287047A5 (enExample) 2005-03-03
JP3888075B2 JP3888075B2 (ja) 2007-02-28

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US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7556917B2 (en) 2003-04-15 2009-07-07 Idc, Llc Method for manufacturing an array of interferometric modulators
US7561321B2 (en) 2006-06-01 2009-07-14 Qualcomm Mems Technologies, Inc. Process and structure for fabrication of MEMS device having isolated edge posts
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7835093B2 (en) 2005-08-19 2010-11-16 Qualcomm Mems Technologies, Inc. Methods for forming layers within a MEMS device using liftoff processes
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US7952787B2 (en) 2006-06-30 2011-05-31 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8077326B1 (en) 2008-03-31 2011-12-13 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US8111445B2 (en) 2004-02-03 2012-02-07 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US8115988B2 (en) 2004-07-29 2012-02-14 Qualcomm Mems Technologies, Inc. System and method for micro-electromechanical operation of an interferometric modulator
US8284475B2 (en) 2007-05-11 2012-10-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same
US8284474B2 (en) 1994-05-05 2012-10-09 Qualcomm Mems Technologies, Inc. Method and system for interferometric modulation in projection or peripheral devices
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US8368124B2 (en) 2002-09-20 2013-02-05 Qualcomm Mems Technologies, Inc. Electromechanical devices having etch barrier layers
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode

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KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7190434B2 (en) * 2004-02-18 2007-03-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7855824B2 (en) 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
US7630123B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
CN100360982C (zh) * 2005-01-13 2008-01-09 友达光电股份有限公司 微机电光学显示组件
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
JP4520402B2 (ja) 2005-12-07 2010-08-04 株式会社リコー 複数波長光スイッチング素子・複数波長光スイッチングデバイス・カラー光スイッチング素子・カラー光スイッチングデバイス・複数波長光スイッチング素子アレイ・カラー光スイッチング素子アレイ・複数色画像表示装置およびカラー画像表示装置
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
WO2008045207A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Light guide
CN103558686B (zh) 2006-10-06 2017-03-01 追踪有限公司 集成于显示器的照明设备中的光学损失结构
WO2008045463A2 (en) 2006-10-10 2008-04-17 Qualcomm Mems Technologies, Inc. Display device with diffractive optics
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US9778477B2 (en) * 2007-03-02 2017-10-03 Alcatel-Lucent Usa Inc. Holographic MEMS operated optical projectors
KR20100090257A (ko) 2007-10-19 2010-08-13 퀄컴 엠이엠스 테크놀로지스, 인크. 광기전력 소자가 통합된 디스플레이
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
WO2009079279A2 (en) 2007-12-17 2009-06-25 Qualcomm Mems Technologies, Inc. Photovoltaics with interferometric back side masks
US7852491B2 (en) 2008-03-31 2010-12-14 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US8711361B2 (en) 2009-11-05 2014-04-29 Qualcomm, Incorporated Methods and devices for detecting and measuring environmental conditions in high performance device packages
EP2556403A1 (en) 2010-04-09 2013-02-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
US8670171B2 (en) 2010-10-18 2014-03-11 Qualcomm Mems Technologies, Inc. Display having an embedded microlens array
US8902484B2 (en) 2010-12-15 2014-12-02 Qualcomm Mems Technologies, Inc. Holographic brightness enhancement film
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
JP6264810B2 (ja) * 2013-09-27 2018-01-24 セイコーエプソン株式会社 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8284474B2 (en) 1994-05-05 2012-10-09 Qualcomm Mems Technologies, Inc. Method and system for interferometric modulation in projection or peripheral devices
US8368124B2 (en) 2002-09-20 2013-02-05 Qualcomm Mems Technologies, Inc. Electromechanical devices having etch barrier layers
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US7556917B2 (en) 2003-04-15 2009-07-07 Idc, Llc Method for manufacturing an array of interferometric modulators
US8111445B2 (en) 2004-02-03 2012-02-07 Qualcomm Mems Technologies, Inc. Spatial light modulator with integrated optical compensation structure
US8115988B2 (en) 2004-07-29 2012-02-14 Qualcomm Mems Technologies, Inc. System and method for micro-electromechanical operation of an interferometric modulator
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US8298847B2 (en) 2005-08-19 2012-10-30 Qualcomm Mems Technologies, Inc. MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same
US7835093B2 (en) 2005-08-19 2010-11-16 Qualcomm Mems Technologies, Inc. Methods for forming layers within a MEMS device using liftoff processes
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7561321B2 (en) 2006-06-01 2009-07-14 Qualcomm Mems Technologies, Inc. Process and structure for fabrication of MEMS device having isolated edge posts
US8102590B2 (en) 2006-06-30 2012-01-24 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7952787B2 (en) 2006-06-30 2011-05-31 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US8964280B2 (en) 2006-06-30 2015-02-24 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US8284475B2 (en) 2007-05-11 2012-10-09 Qualcomm Mems Technologies, Inc. Methods of fabricating MEMS with spacers between plates and devices formed by same
US8077326B1 (en) 2008-03-31 2011-12-13 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity

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