JP3888075B2 - 光スイッチング素子、光スイッチングデバイス、および画像表示装置 - Google Patents

光スイッチング素子、光スイッチングデバイス、および画像表示装置 Download PDF

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JP3888075B2
JP3888075B2 JP2001085749A JP2001085749A JP3888075B2 JP 3888075 B2 JP3888075 B2 JP 3888075B2 JP 2001085749 A JP2001085749 A JP 2001085749A JP 2001085749 A JP2001085749 A JP 2001085749A JP 3888075 B2 JP3888075 B2 JP 3888075B2
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Prior art keywords
optical switching
reflector
switching device
light
distance
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JP2002287047A5 (enExample
JP2002287047A (ja
Inventor
重男 野島
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Seiko Epson Corp
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Seiko Epson Corp
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  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
  • Projection Apparatus (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2001085749A 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置 Expired - Fee Related JP3888075B2 (ja)

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JP2001085749A JP3888075B2 (ja) 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置

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JP2001085749A JP3888075B2 (ja) 2001-03-23 2001-03-23 光スイッチング素子、光スイッチングデバイス、および画像表示装置

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JP2002287047A5 JP2002287047A5 (enExample) 2005-03-03
JP3888075B2 true JP3888075B2 (ja) 2007-02-28

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US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
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KR101354520B1 (ko) 2004-07-29 2014-01-21 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7630123B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
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US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
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US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
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US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
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US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
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CN103558686B (zh) 2006-10-06 2017-03-01 追踪有限公司 集成于显示器的照明设备中的光学损失结构
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US9778477B2 (en) * 2007-03-02 2017-10-03 Alcatel-Lucent Usa Inc. Holographic MEMS operated optical projectors
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US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
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US8077326B1 (en) 2008-03-31 2011-12-13 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US7852491B2 (en) 2008-03-31 2010-12-14 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
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US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
US8670171B2 (en) 2010-10-18 2014-03-11 Qualcomm Mems Technologies, Inc. Display having an embedded microlens array
US8902484B2 (en) 2010-12-15 2014-12-02 Qualcomm Mems Technologies, Inc. Holographic brightness enhancement film
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
JP6264810B2 (ja) * 2013-09-27 2018-01-24 セイコーエプソン株式会社 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

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