JP2002221678A5 - - Google Patents

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JP2002221678A5
JP2002221678A5 JP2001016899A JP2001016899A JP2002221678A5 JP 2002221678 A5 JP2002221678 A5 JP 2002221678A5 JP 2001016899 A JP2001016899 A JP 2001016899A JP 2001016899 A JP2001016899 A JP 2001016899A JP 2002221678 A5 JP2002221678 A5 JP 2002221678A5
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Prior art keywords
optical switching
switching device
reflector
semi
distance
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JP2001016899A
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JP2002221678A (en
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Priority to JP2001016899A priority Critical patent/JP2002221678A/en
Priority claimed from JP2001016899A external-priority patent/JP2002221678A/en
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Publication of JP2002221678A5 publication Critical patent/JP2002221678A5/ja
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Claims (15)

半透過体と反射体との距離を変えることによりオンオフおよび／または色を制御可能な複数の光スイッチング素子を有する光スイッチングデバイスであって、
前記半透過体が形成された第１の基板と、
前記反射体が、該反射体を駆動可能なアクチュエータに重ねて形成された第２の基板とを有する光スイッチングデバイス。An optical switching device having a plurality of optical switching elements capable of controlling on / off and / or color by changing a distance between a semi-transmissive body and a reflective body,
A first substrate on which the translucent body is formed;
An optical switching device, wherein the reflector includes a second substrate formed on an actuator capable of driving the reflector. 請求項１において、当該光スイッチング素子から出射される光の波長λに対し、前記反射体は、前記半透過体との距離ｄが以下の式の値となる位置に少なくとも稼動可能である光スイッチングデバイス。
ｄ＝ｎλ／２
ただし、ｎは１以上の整数である。2. The optical switching according to claim 1, wherein the reflector is operable at least at a position where a distance d between the reflector and the semi-transmissive body is a value of the following expression with respect to a wavelength λ of light emitted from the optical switching element. device.
d = nλ / 2
However, n is an integer of 1 or more. 請求項１において、前記第１の基板は透明基板であり、その一方の面に前記半透過体となる半透過層が複数の前記光スイッチング素子にわたり形成されている光スイッチングデバイス。2. The optical switching device according to claim 1, wherein the first substrate is a transparent substrate, and a semi-transmissive layer serving as the semi-transmissive body is formed over the plurality of the optical switching elements on one surface thereof. 請求項１において、前記アクチュエータは、静電アクチュエータである光スイッチングデバイス。The optical switching device according to claim 1, wherein the actuator is an electrostatic actuator. 請求項１において、前記半透過体および反射体の距離が一定の値以下にならないようにする微小突起が、前記半透過体および反射体の少なくともいずれかに形成されている光スイッチングデバイス。2. The optical switching device according to claim 1, wherein a minute protrusion that prevents a distance between the semi-transmissive body and the reflector from being equal to or less than a predetermined value is formed on at least one of the semi-transmissive body and the reflective body. 請求項５において、当該光スイッチング素子から出射される光の波長λに対し、前記微小突起により制限される前記半透過体および反射体との距離ｄ０が以下の式の値となる光スイッチングデバイス。
ｄ０＝ｎλ／４
ただし、ｎは１以上の整数である。6. The optical switching device according to claim 5, wherein a distance d0 between the semitransparent body and the reflector, which is limited by the minute protrusions, is a value of the following expression with respect to the wavelength λ of the light emitted from the optical switching element.
d0 = nλ / 4
However, n is an integer of 1 or more. 請求項５において、前記半透過体および反射体の距離が一定の値以上にならないようにするストッパを備えている光スイッチングデバイス。6. The optical switching device according to claim 5, further comprising a stopper that prevents the distance between the translucent body and the reflector from exceeding a certain value. 請求項７において、前記微小突起により制限された位置から前記ストッパにより制限までの距離ｙが、当該光スイッチング素子から出射される光の波長λに対し、以下の式の値となる光スイッチングデバイス。
ｙ＝ｎλ／４
ただし、ｎは１以上の整数である。8. The optical switching device according to claim 7, wherein the distance y from the position limited by the minute protrusions to the limit by the stopper is a value of the following expression with respect to the wavelength λ of the light emitted from the optical switching element.
y = nλ / 4
However, n is an integer of 1 or more. 請求項２において、異なる前記波長λに対応する、異なる前記距離ｄを備えた少なくとも３種類の前記スイッチング素子が配列されている光スイッチングデバイス。3. The optical switching device according to claim 2, wherein at least three types of the switching elements having different distances d corresponding to the different wavelengths λ are arranged. 請求項２において、前記アクチュエータは、異なる前記波長λに対応する、少なくとも３種類の異なる前記距離ｄに前記反射体を駆動可能な光スイッチングデバイス。3. The optical switching device according to claim 2, wherein the actuator can drive the reflector to at least three different distances d corresponding to the different wavelengths λ. 請求項１０において、前記アクチュエータは静電駆動型であり、前記反射体を駆動可能な距離ｘの異なる少なくとも３種類の電極ペアを備えている光スイッチングデバイス。11. The optical switching device according to claim 10, wherein the actuator is of an electrostatic drive type and includes at least three types of electrode pairs having different distances x capable of driving the reflector. 半透過体と反射体との距離を変えることによりオンオフおよび／または色を制御可能な複数の光スイッチング素子を有する光スイッチングデバイスの製造方法であって、
第１の基板に前記半透過体を形成する第１の工程と、
第２の基板に、前記反射体を、該反射体を駆動可能なアクチュエータに重ねて形成する第２の工程と、
前記第１および第２の基板を前記半透過体と前記反射体とが対面するように組み合わせる工程とを有する光スイッチングデバイスの製造方法。A method of manufacturing an optical switching device having a plurality of optical switching elements that can be turned on and off and / or controlled in color by changing the distance between a semi-transparent body and a reflector,
A first step of forming the translucent body on a first substrate;
A second step of forming, on the second substrate, the reflector overlaid on an actuator capable of driving the reflector;
A method of manufacturing an optical switching device, comprising: combining the first and second substrates so that the transflector and the reflector face each other. 請求項１２において、前記第２の工程では、半導体回路を備えた前記第２の基板上に、複数の前記アクチュエータが配列されたアクチュエータ層と、各々の前記アクチュエータに対応する複数の前記反射体が配列された反射層とを積層する光スイッチングデバイスの製造方法。13. The second step according to claim 12, wherein in the second step, an actuator layer in which a plurality of the actuators are arranged on the second substrate provided with a semiconductor circuit, and a plurality of the reflectors corresponding to each of the actuators. A method of manufacturing an optical switching device in which an array of reflective layers is laminated. 請求項１ないし１１のいずれかに記載の光スイッチングデバイスを有する直視型の画像表示装置。A direct view type image display apparatus comprising the optical switching device according to claim 1. 請求項１ないし１１のいずれに記載の光スイッチングデバイスと、
この光スイッチングデバイスに光を入射可能な光源と、
前記光スイッチングバイスにより変調された光をスクリーン上に投影するレンズシステムとを有する画像表示装置。An optical switching device according to any one of claims 1 to 11,
A light source capable of entering light into the optical switching device;
And a lens system that projects light modulated by the optical switching device onto a screen.
JP2001016899A 2001-01-25 2001-01-25 Optical switching device, method of manufacturing for the same and image display device Withdrawn JP2002221678A (en)

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JP2001016899A JP2002221678A (en) 2001-01-25 2001-01-25 Optical switching device, method of manufacturing for the same and image display device

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JP2002221678A5 true JP2002221678A5 (en) 2005-03-03

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