JP2002210730A5 - - Google Patents

Download PDF

Info

Publication number
JP2002210730A5
JP2002210730A5 JP2001012372A JP2001012372A JP2002210730A5 JP 2002210730 A5 JP2002210730 A5 JP 2002210730A5 JP 2001012372 A JP2001012372 A JP 2001012372A JP 2001012372 A JP2001012372 A JP 2001012372A JP 2002210730 A5 JP2002210730 A5 JP 2002210730A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001012372A
Other languages
Japanese (ja)
Other versions
JP4880820B2 (ja
JP2002210730A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001012372A priority Critical patent/JP4880820B2/ja
Priority claimed from JP2001012372A external-priority patent/JP4880820B2/ja
Publication of JP2002210730A publication Critical patent/JP2002210730A/ja
Publication of JP2002210730A5 publication Critical patent/JP2002210730A5/ja
Application granted granted Critical
Publication of JP4880820B2 publication Critical patent/JP4880820B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2001012372A 2001-01-19 2001-01-19 レーザ支援加工方法 Expired - Lifetime JP4880820B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001012372A JP4880820B2 (ja) 2001-01-19 2001-01-19 レーザ支援加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001012372A JP4880820B2 (ja) 2001-01-19 2001-01-19 レーザ支援加工方法

Publications (3)

Publication Number Publication Date
JP2002210730A JP2002210730A (ja) 2002-07-30
JP2002210730A5 true JP2002210730A5 (enExample) 2008-04-10
JP4880820B2 JP4880820B2 (ja) 2012-02-22

Family

ID=18879388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001012372A Expired - Lifetime JP4880820B2 (ja) 2001-01-19 2001-01-19 レーザ支援加工方法

Country Status (1)

Country Link
JP (1) JP4880820B2 (enExample)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006142335A (ja) * 2004-11-19 2006-06-08 National Institute Of Advanced Industrial & Technology レーザー加工装置
JP4630971B2 (ja) * 2004-12-21 2011-02-09 並木精密宝石株式会社 パルスレーザによる微小構造の形成方法
JP2006303360A (ja) * 2005-04-25 2006-11-02 Fujikura Ltd 貫通配線基板、複合基板及び電子装置
US8307672B2 (en) 2005-11-22 2012-11-13 Olympus Corporation Glass substrate processing method and glass component
JP4402708B2 (ja) * 2007-08-03 2010-01-20 浜松ホトニクス株式会社 レーザ加工方法、レーザ加工装置及びその製造方法
JP5478009B2 (ja) * 2007-11-09 2014-04-23 株式会社フジクラ 半導体パッケージの製造方法
WO2012014722A1 (ja) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 基板加工方法
JP5653110B2 (ja) 2010-07-26 2015-01-14 浜松ホトニクス株式会社 チップの製造方法
JP5702556B2 (ja) 2010-07-26 2015-04-15 浜松ホトニクス株式会社 レーザ加工方法
KR102035619B1 (ko) 2010-07-26 2019-12-16 하마마츠 포토닉스 가부시키가이샤 레이저 가공방법
KR101825238B1 (ko) 2010-07-26 2018-02-02 하마마츠 포토닉스 가부시키가이샤 광 흡수 기판의 제조 방법, 및 그것을 제조하기 위한 성형형의 제조 방법
US8961806B2 (en) 2010-07-26 2015-02-24 Hamamatsu Photonics K.K. Laser processing method
JP5574866B2 (ja) 2010-07-26 2014-08-20 浜松ホトニクス株式会社 レーザ加工方法
JP5693074B2 (ja) 2010-07-26 2015-04-01 浜松ホトニクス株式会社 レーザ加工方法
US8828873B2 (en) 2010-07-26 2014-09-09 Hamamatsu Photonics K.K. Method for manufacturing semiconductor device
CN103025478B (zh) 2010-07-26 2015-09-30 浜松光子学株式会社 基板加工方法
WO2012014718A1 (ja) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 インターポーザの製造方法
EP2599576B1 (en) 2010-07-26 2019-12-11 Hamamatsu Photonics K.K. Laser processing method
JP2011066449A (ja) * 2010-12-20 2011-03-31 Fujikura Ltd 貫通配線基板の製造方法、複合基板の製造方法、及びこれらの製造方法により形成された貫通配線基板や複合基板を用いた電子装置の製造方法
KR101516609B1 (ko) 2011-05-23 2015-05-04 나미키 세이미쓰 하우세키 가부시키가이샤 발광소자의 제조 방법 및 발광소자
CN103212822B (zh) * 2012-01-19 2016-07-06 昆山思拓机器有限公司 全自动smt模板切割及检测一体化系统切割及检测方法
WO2014079478A1 (en) 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
EP2754524B1 (de) 2013-01-15 2015-11-25 Corning Laser Technologies GmbH Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie
CN103111762B (zh) * 2013-01-29 2015-12-09 无锡鼎晶光电科技有限公司 一种将激光打孔应用于蓝宝石片打孔的方法
EP2781296B1 (de) 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser
JP6157245B2 (ja) * 2013-07-01 2017-07-05 三菱電機株式会社 レーザ加工装置およびレーザ光軸調整方法
US9517963B2 (en) 2013-12-17 2016-12-13 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
JP2015150609A (ja) 2014-02-18 2015-08-24 アイシン精機株式会社 レーザ加工方法
KR102445217B1 (ko) 2014-07-08 2022-09-20 코닝 인코포레이티드 재료를 레이저 가공하는 방법 및 장치
WO2016010991A1 (en) 2014-07-14 2016-01-21 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
WO2016010943A2 (en) 2014-07-14 2016-01-21 Corning Incorporated Method and system for arresting crack propagation
US10611667B2 (en) 2014-07-14 2020-04-07 Corning Incorporated Method and system for forming perforations
TWI659793B (zh) 2014-07-14 2019-05-21 美商康寧公司 用於使用可調整雷射束焦線來處理透明材料的系統及方法
EP3195706B2 (de) 2014-09-16 2025-05-14 LPKF Laser & Electronics SE Verfahren zum einbringen mindestens einer ausnehmung oder einer durchbrechung in ein plattenförmiges werkstück
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
EP3245166B1 (en) 2015-01-12 2020-05-27 Corning Incorporated Laser cutting of thermally tempered substrates using the multi photon absorption method
EP3848334A1 (en) 2015-03-24 2021-07-14 Corning Incorporated Alkaline earth boro-aluminosilicate glass article with laser cut edge
WO2016160391A1 (en) 2015-03-27 2016-10-06 Corning Incorporated Gas permeable window and method of fabricating the same
US11186060B2 (en) 2015-07-10 2021-11-30 Corning Incorporated Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same
MY194570A (en) 2016-05-06 2022-12-02 Corning Inc Laser cutting and removal of contoured shapes from transparent substrates
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
CN109803934A (zh) 2016-07-29 2019-05-24 康宁股份有限公司 用于激光处理的装置和方法
WO2018044843A1 (en) 2016-08-30 2018-03-08 Corning Incorporated Laser processing of transparent materials
CN109803786B (zh) * 2016-09-30 2021-05-07 康宁股份有限公司 使用非轴对称束斑对透明工件进行激光加工的设备和方法
NL2017998B1 (en) * 2016-12-14 2018-06-26 Corning Inc Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
LT3311947T (lt) * 2016-09-30 2019-12-27 Corning Incorporated Skaidrių ruošinių lazerinio apdirbimo, naudojant spindulių pluošto dėmes be simetrijos ašių, būdas
JP7066701B2 (ja) 2016-10-24 2022-05-13 コーニング インコーポレイテッド シート状ガラス基体のレーザに基づく加工のための基体処理ステーション
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
US12180108B2 (en) 2017-12-19 2024-12-31 Corning Incorporated Methods for etching vias in glass-based articles employing positive charge organic molecules
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
JP7230650B2 (ja) 2019-04-05 2023-03-01 Tdk株式会社 無機材料基板の加工方法、デバイス、およびデバイスの製造方法
CN111830695B (zh) * 2020-07-31 2025-03-11 北京兆维电子(集团)有限责任公司 一种oled显示面板亮点缺陷修正系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09258012A (ja) * 1996-03-26 1997-10-03 Sharp Corp レーザビーム発生用光学素子及びレーザビーム発生装置
JP3433110B2 (ja) * 1998-08-03 2003-08-04 科学技術振興事業団 3次元的回折光学素子及びその製造方法
JP2000343714A (ja) * 1999-04-02 2000-12-12 Seiko Epson Corp 水晶穴加工方法およびインクジェット式記録ヘッドの製造方法
JP2000288766A (ja) * 1999-04-07 2000-10-17 Kubota Corp レーザ加工装置

Similar Documents

Publication Publication Date Title
BE2022C531I2 (enExample)
BE2022C547I2 (enExample)
BE2017C059I2 (enExample)
BE2017C055I2 (enExample)
BE2017C051I2 (enExample)
BE2017C032I2 (enExample)
BE2016C051I2 (enExample)
BE2015C077I2 (enExample)
BE2014C052I2 (enExample)
BE2014C036I2 (enExample)
BE2014C026I2 (enExample)
BE2007C047I2 (enExample)
AU2002307149A8 (enExample)
BE2011C034I2 (enExample)
BE2014C006I2 (enExample)
BRPI0209186B1 (enExample)
BE2017C050I2 (enExample)
BRPI0204884A2 (enExample)
CH1379220H1 (enExample)
BE2014C008I2 (enExample)
BE2016C021I2 (enExample)
BRPI0101486B8 (enExample)
BE2012C051I2 (enExample)
BRPI0210463A2 (enExample)
BRMU8103221U (enExample)