JP2002156744A - ペリクル収納容器 - Google Patents

ペリクル収納容器

Info

Publication number
JP2002156744A
JP2002156744A JP2000350606A JP2000350606A JP2002156744A JP 2002156744 A JP2002156744 A JP 2002156744A JP 2000350606 A JP2000350606 A JP 2000350606A JP 2000350606 A JP2000350606 A JP 2000350606A JP 2002156744 A JP2002156744 A JP 2002156744A
Authority
JP
Japan
Prior art keywords
pellicle
jig
tray
storage container
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000350606A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002156744A5 (enExample
Inventor
Yoshikatsu Hatada
良勝 畑田
Yoshimasa Kuriyama
芳真 栗山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Electronics Co Ltd
Original Assignee
Asahi Kasei Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei Electronics Co Ltd filed Critical Asahi Kasei Electronics Co Ltd
Priority to JP2000350606A priority Critical patent/JP2002156744A/ja
Publication of JP2002156744A publication Critical patent/JP2002156744A/ja
Publication of JP2002156744A5 publication Critical patent/JP2002156744A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packaging Frangible Articles (AREA)
JP2000350606A 2000-11-17 2000-11-17 ペリクル収納容器 Pending JP2002156744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000350606A JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000350606A JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Publications (2)

Publication Number Publication Date
JP2002156744A true JP2002156744A (ja) 2002-05-31
JP2002156744A5 JP2002156744A5 (enExample) 2008-03-13

Family

ID=18823803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000350606A Pending JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Country Status (1)

Country Link
JP (1) JP2002156744A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009196708A (ja) * 2008-01-21 2009-09-03 Nec Engineering Ltd チップ収容トレイ
US20120202001A1 (en) * 2011-02-08 2012-08-09 Shin-Etsu Chemical Co., Ltd. Pellicle kit for manufacturing a pellicle
WO2016121635A1 (ja) * 2015-01-26 2016-08-04 株式会社ニコン マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置
KR20200079793A (ko) * 2018-12-26 2020-07-06 주식회사 에프에스티 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197961A (ja) * 1987-10-09 1989-04-17 Nikon Corp 露光用原板作成装置及び方法
JPH05323583A (ja) * 1992-05-15 1993-12-07 Fujitsu Ltd ペリクル貼り付け装置
JPH0683042A (ja) * 1992-09-04 1994-03-25 Nikon Corp フレームの貼着装置
JPH0714428U (ja) * 1993-08-12 1995-03-10 株式会社ヤマザキ電機 ガラス基板類の連続熱処理装置
JPH0992702A (ja) * 1995-09-27 1997-04-04 Dainippon Screen Mfg Co Ltd 基板収納カセット、インターフェイス機構および基板処理装置
JPH09106066A (ja) * 1995-10-09 1997-04-22 Nikon Corp ペリクルライナーの剥離方法
JP2000258897A (ja) * 1999-03-05 2000-09-22 Shin Etsu Chem Co Ltd ペリクル収納容器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197961A (ja) * 1987-10-09 1989-04-17 Nikon Corp 露光用原板作成装置及び方法
JPH05323583A (ja) * 1992-05-15 1993-12-07 Fujitsu Ltd ペリクル貼り付け装置
JPH0683042A (ja) * 1992-09-04 1994-03-25 Nikon Corp フレームの貼着装置
JPH0714428U (ja) * 1993-08-12 1995-03-10 株式会社ヤマザキ電機 ガラス基板類の連続熱処理装置
JPH0992702A (ja) * 1995-09-27 1997-04-04 Dainippon Screen Mfg Co Ltd 基板収納カセット、インターフェイス機構および基板処理装置
JPH09106066A (ja) * 1995-10-09 1997-04-22 Nikon Corp ペリクルライナーの剥離方法
JP2000258897A (ja) * 1999-03-05 2000-09-22 Shin Etsu Chem Co Ltd ペリクル収納容器

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009196708A (ja) * 2008-01-21 2009-09-03 Nec Engineering Ltd チップ収容トレイ
US20120202001A1 (en) * 2011-02-08 2012-08-09 Shin-Etsu Chemical Co., Ltd. Pellicle kit for manufacturing a pellicle
US8663756B2 (en) * 2011-02-08 2014-03-04 Shin-Etsu Chemical Co., Ltd. Pellicle kit for manufacturing a pellicle
KR101906131B1 (ko) 2011-02-08 2018-10-10 신에쓰 가가꾸 고교 가부시끼가이샤 펠리클 제조용 키트
WO2016121635A1 (ja) * 2015-01-26 2016-08-04 株式会社ニコン マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置
JPWO2016121635A1 (ja) * 2015-01-26 2017-11-16 株式会社ニコン マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置
KR20200079793A (ko) * 2018-12-26 2020-07-06 주식회사 에프에스티 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐
KR102172722B1 (ko) 2018-12-26 2020-11-02 주식회사 에프에스티 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐

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