JP2002036080A5 - - Google Patents

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Publication number
JP2002036080A5
JP2002036080A5 JP2000227437A JP2000227437A JP2002036080A5 JP 2002036080 A5 JP2002036080 A5 JP 2002036080A5 JP 2000227437 A JP2000227437 A JP 2000227437A JP 2000227437 A JP2000227437 A JP 2000227437A JP 2002036080 A5 JP2002036080 A5 JP 2002036080A5
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JP
Japan
Prior art keywords
substrate
polishing
edge
polishing apparatus
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000227437A
Other languages
English (en)
Japanese (ja)
Other versions
JP3933376B2 (ja
JP2002036080A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000227437A priority Critical patent/JP3933376B2/ja
Priority claimed from JP2000227437A external-priority patent/JP3933376B2/ja
Publication of JP2002036080A publication Critical patent/JP2002036080A/ja
Publication of JP2002036080A5 publication Critical patent/JP2002036080A5/ja
Application granted granted Critical
Publication of JP3933376B2 publication Critical patent/JP3933376B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000227437A 2000-07-27 2000-07-27 基板エッジ研磨装置 Expired - Fee Related JP3933376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000227437A JP3933376B2 (ja) 2000-07-27 2000-07-27 基板エッジ研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000227437A JP3933376B2 (ja) 2000-07-27 2000-07-27 基板エッジ研磨装置

Publications (3)

Publication Number Publication Date
JP2002036080A JP2002036080A (ja) 2002-02-05
JP2002036080A5 true JP2002036080A5 (https=) 2004-12-24
JP3933376B2 JP3933376B2 (ja) 2007-06-20

Family

ID=18720889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000227437A Expired - Fee Related JP3933376B2 (ja) 2000-07-27 2000-07-27 基板エッジ研磨装置

Country Status (1)

Country Link
JP (1) JP3933376B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5033066B2 (ja) * 2008-06-13 2012-09-26 株式会社Ｂｂｓ金明 ワーク外周部の研磨装置および研磨方法
JP6350857B2 (ja) * 2014-04-21 2018-07-04 スピードファム株式会社 円盤状半導体ウェーハエッジ部の研磨方法、及びその装置
KR101578713B1 (ko) * 2015-06-22 2015-12-18 황정하 광학렌즈의 양면 모따기 장치
KR102341340B1 (ko) * 2020-03-06 2021-12-17 에스케이실트론 주식회사 패드 드레서 로딩 장치
CN114193308B (zh) * 2021-12-09 2024-06-04 云浮市坚诚机械有限公司 一种台面板的盘孔自动抛光机

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