JP2002025983A5 - - Google Patents

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Publication number
JP2002025983A5
JP2002025983A5 JP2000203765A JP2000203765A JP2002025983A5 JP 2002025983 A5 JP2002025983 A5 JP 2002025983A5 JP 2000203765 A JP2000203765 A JP 2000203765A JP 2000203765 A JP2000203765 A JP 2000203765A JP 2002025983 A5 JP2002025983 A5 JP 2002025983A5
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JP
Japan
Prior art keywords
shield part
etching chamber
opening
movable shield
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000203765A
Other languages
English (en)
Japanese (ja)
Other versions
JP4719337B2 (ja
JP2002025983A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000203765A priority Critical patent/JP4719337B2/ja
Priority claimed from JP2000203765A external-priority patent/JP4719337B2/ja
Publication of JP2002025983A publication Critical patent/JP2002025983A/ja
Publication of JP2002025983A5 publication Critical patent/JP2002025983A5/ja
Application granted granted Critical
Publication of JP4719337B2 publication Critical patent/JP4719337B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000203765A 2000-07-05 2000-07-05 可動シールド機構を備えたエッチングチャンバー Expired - Lifetime JP4719337B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000203765A JP4719337B2 (ja) 2000-07-05 2000-07-05 可動シールド機構を備えたエッチングチャンバー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000203765A JP4719337B2 (ja) 2000-07-05 2000-07-05 可動シールド機構を備えたエッチングチャンバー

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010047323A Division JP4918147B2 (ja) 2010-03-04 2010-03-04 エッチング方法

Publications (3)

Publication Number Publication Date
JP2002025983A JP2002025983A (ja) 2002-01-25
JP2002025983A5 true JP2002025983A5 (enExample) 2007-07-12
JP4719337B2 JP4719337B2 (ja) 2011-07-06

Family

ID=18701133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000203765A Expired - Lifetime JP4719337B2 (ja) 2000-07-05 2000-07-05 可動シールド機構を備えたエッチングチャンバー

Country Status (1)

Country Link
JP (1) JP4719337B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9184072B2 (en) * 2007-07-27 2015-11-10 Mattson Technology, Inc. Advanced multi-workpiece processing chamber
US10319982B2 (en) 2013-02-01 2019-06-11 Encell Technology, Inc. Coated iron electrode and method of making same
CN109314034B (zh) 2016-06-15 2021-11-16 瑞士艾发科技 真空处理室及制造真空处理的板形基底的方法
US12354847B2 (en) * 2020-03-12 2025-07-08 Applied Materials, Inc. Methods and apparatus for conductance liners in semiconductor process chambers

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3210207B2 (ja) * 1994-04-20 2001-09-17 東京エレクトロン株式会社 プラズマ処理装置
JPH0820879A (ja) * 1994-07-08 1996-01-23 Nissin Electric Co Ltd プラズマ処理装置
JP3453223B2 (ja) * 1994-08-19 2003-10-06 東京エレクトロン株式会社 処理装置
JPH10107009A (ja) * 1996-09-27 1998-04-24 Nec Corp ドライエッチング装置
JPH11111679A (ja) * 1997-10-07 1999-04-23 Mitsui Chem Inc 反応性イオンエッチング装置および反応性イオンエッチング方法

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